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Sensors 2016, 16(11), 1893;

Influence of PZT Coating Thickness and Electrical Pole Alignment on Microresonator Properties

Faculty of Mechanical Engineering and Design, Kaunas University of Technology, Studentu str. 56, Kaunas LT-51424, Lithuania
Institute of Materials Science, Kaunas University of Technology, Barsausko str. 59, Kaunas LT-51423, Lithuania
Author to whom correspondence should be addressed.
Academic Editor: Vittorio M. N. Passaro
Received: 19 August 2016 / Revised: 29 September 2016 / Accepted: 7 October 2016 / Published: 10 November 2016
(This article belongs to the Section Physical Sensors)
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With increasing technical requirements in the design of microresonators, the development of new techniques for lightweight, simple, and inexpensive components becomes relevant. Lead zirconate titanate (PZT) is a powerful tool in the formation of these components, allowing a self-actuation or self-sensing capability. Different fabrication methods lead to the variation of the properties of the device itself. This research paper covers the fabrication of a novel PZT film and the investigations of its chemical, surface, and dynamic properties when film thickness is varied. A screen-printing technique was used for the formation of smooth films of 60 µm, 68 µm, and 25 µm thickness. A custom-made poling technique was applied to enhance the piezoelectric properties of the designed films. However, poling did not change any compositional or surface characteristics of the films; changes were only seen in the electrical ones. The results showed that a thinner poled PZT film having a chemical composition with the highest amount of copper and zirconium led to better electrical characteristics (generated voltage of 3.5 mV). View Full-Text
Keywords: microresonator; PZT; poling; coating microresonator; PZT; poling; coating

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Janusas, G.; Ponelyte, S.; Brunius, A.; Guobiene, A.; Vilkauskas, A.; Palevicius, A. Influence of PZT Coating Thickness and Electrical Pole Alignment on Microresonator Properties. Sensors 2016, 16, 1893.

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