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Sensors 2015, 15(2), 3351-3361;

Fabrication and Characterization of a Multichannel 3D Thermopile for Chip Calorimeter Applications

School of Mechanical and Aerospace Engineering, Nanyang Technological University, 50 Nanyang Avenue 639798, Singapore
Singapore Centre on Environmental Life Sciences and Engineering, Interdisciplinary Graduate School, Nanyang Technological University, 60 Nanyang Drive 637551, Singapore
Author to whom correspondence should be addressed.
Received: 8 October 2014 / Revised: 19 January 2015 / Accepted: 26 January 2015 / Published: 3 February 2015
(This article belongs to the Section Physical Sensors)
Full-Text   |   PDF [1759 KB, uploaded 3 February 2015]


Thermal sensors based on thermopiles are some of the most robust and popular temperature sensing technologies across industries and research disciplines. A chip calorimeter with a 3D thermopile layout with a large sensing area and multichannel capacity has been developed, which is highly desired for many applications requiring large reaction chambers or high throughputs, such as biofilm research, drug screening, etc. The performance of the device, including temperature sensitivity and heat power sensitivity, was evaluated. The capability to split the chip calorimeter to multiple channels was also demonstrated, which makes the chip calorimeter very flexible and powerful in many applications. View Full-Text
Keywords: chip calorimeter; microfabrication; 3D thermopile chip calorimeter; microfabrication; 3D thermopile
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Huynh, T.P.; Zhang, Y.; Yehuda, C. Fabrication and Characterization of a Multichannel 3D Thermopile for Chip Calorimeter Applications. Sensors 2015, 15, 3351-3361.

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