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A Monolithic CMOS Magnetic Hall Sensor with High Sensitivity and Linearity Characteristics

by 1,2,*, 1,* and 3
1
School of Electronic Science and Technology, Faculty of Electronic Information and Electronic Engineering, Dalian University of Technology, Dalian 116024, China
2
Institute of New Electron Devices, Hangzhou Dianzi University, Hangzhou 310018, China
3
College of Electronic Science & Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210003, China
*
Authors to whom correspondence should be addressed.
Academic Editor: Vittorio M. N. Passaro
Sensors 2015, 15(10), 27359-27373; https://doi.org/10.3390/s151027359
Received: 15 September 2015 / Revised: 17 October 2015 / Accepted: 20 October 2015 / Published: 27 October 2015
(This article belongs to the Section Physical Sensors)
This paper presents a fully integrated linear Hall sensor by means of 0.8 μm high voltage complementary metal-oxide semiconductor (CMOS) technology. This monolithic Hall sensor chip features a highly sensitive horizontal switched Hall plate and an efficient signal conditioner using dynamic offset cancellation technique. An improved cross-like Hall plate achieves high magnetic sensitivity and low offset. A new spinning current modulator stabilizes the quiescent output voltage and improves the reliability of the signal conditioner. The tested results show that at the 5 V supply voltage, the maximum Hall output voltage of the monolithic Hall sensor microsystem, is up to ±2.1 V and the linearity of Hall output voltage is higher than 99% in the magnetic flux density range from ±5 mT to ±175 mT. The output equivalent residual offset is 0.48 mT and the static power consumption is 20 mW. View Full-Text
Keywords: monolithic Hall sensor; sensitivity and linearity; Hall offset; dynamic offset cancellation technique monolithic Hall sensor; sensitivity and linearity; Hall offset; dynamic offset cancellation technique
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MDPI and ACS Style

Huang, H.; Wang, D.; Xu, Y. A Monolithic CMOS Magnetic Hall Sensor with High Sensitivity and Linearity Characteristics. Sensors 2015, 15, 27359-27373. https://doi.org/10.3390/s151027359

AMA Style

Huang H, Wang D, Xu Y. A Monolithic CMOS Magnetic Hall Sensor with High Sensitivity and Linearity Characteristics. Sensors. 2015; 15(10):27359-27373. https://doi.org/10.3390/s151027359

Chicago/Turabian Style

Huang, Haiyun; Wang, Dejun; Xu, Yue. 2015. "A Monolithic CMOS Magnetic Hall Sensor with High Sensitivity and Linearity Characteristics" Sensors 15, no. 10: 27359-27373. https://doi.org/10.3390/s151027359

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