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Sensors 2014, 14(9), 17256-17274;

The Stiffness Variation of a Micro-Ring Driven by a Traveling Piecewise-Electrode

School of Electromechanical Automobile Engineering, Yantai University, Yantai 264005, China
Department of Mechanical and Electromechanical Engineering, National ILan University, 26041 ILan, Taiwan
These authors contributed equally to this work.
Author to whom correspondence should be addressed.
Received: 12 August 2014 / Revised: 2 September 2014 / Accepted: 12 September 2014 / Published: 16 September 2014
(This article belongs to the Collection Modeling, Testing and Reliability Issues in MEMS Engineering)
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In the practice of electrostatically actuated micro devices; the electrostatic force is implemented by sequentially actuated piecewise-electrodes which result in a traveling distributed electrostatic force. However; such force was modeled as a traveling concentrated electrostatic force in literatures. This article; for the first time; presents an analytical study on the stiffness variation of microstructures driven by a traveling piecewise electrode. The analytical model is based on the theory of shallow shell and uniform electrical field. The traveling electrode not only applies electrostatic force on the circular-ring but also alters its dynamical characteristics via the negative electrostatic stiffness. It is known that; when a structure is subjected to a traveling constant force; its natural mode will be resonated as the traveling speed approaches certain critical speeds; and each natural mode refers to exactly one critical speed. However; for the case of a traveling electrostatic force; the number of critical speeds is more than that of the natural modes. This is due to the fact that the traveling electrostatic force makes the resonant frequencies of the forward and backward traveling waves of the circular-ring different. Furthermore; the resonance and stability can be independently controlled by the length of the traveling electrode; though the driving voltage and traveling speed of the electrostatic force alter the dynamics and stabilities of microstructures. This paper extends the fundamental insights into the electromechanical behavior of microstructures driven by electrostatic forces as well as the future development of MEMS/NEMS devices with electrostatic actuation and sensing. View Full-Text
Keywords: electrostatics; MEMS; microstructures; stabilities; stiffness electrostatics; MEMS; microstructures; stabilities; stiffness
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Li, Y.; Yu, T.; Hu, Y.-C. The Stiffness Variation of a Micro-Ring Driven by a Traveling Piecewise-Electrode. Sensors 2014, 14, 17256-17274.

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