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Sensors 2013, 13(5), 5478-5492;

Flexible PZT Thin Film Tactile Sensor for Biomedical Monitoring

Department of Engineering Science and Ocean Engineering, National Taiwan University, Taipei 10617, Taiwan
Department of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan
Graduate Institute of Electronics Engineering, National Taiwan University, Taipei 10617, Taiwan
Graduate Institute of Biomedical Electronics and Bioinformatics, National Taiwan University, Taipei 10617, Taiwan
Authors to whom correspondence should be addressed.
Received: 16 February 2013 / Revised: 15 April 2013 / Accepted: 18 April 2013 / Published: 25 April 2013
(This article belongs to the Special Issue Piezoelectric Sensors and Actuators)
PDF [1205 KB, uploaded 21 June 2014]


This paper presents the development of tactile sensors using the sol-gel process to deposit a PZT thin-film from 250 nm to 1 μm on a flexible stainless steel substrate. The PZT thin-film tactile sensor can be used to measure human pulses from several areas, including carotid, brachial, finger, ankle, radial artery, and the apical region. Flexible PZT tactile sensors can overcome the diverse topology of various human regions and sense the corresponding signals from human bodies. The measured arterial pulse waveform can be used to diagnose hypertension and cardiac failure in patients. The proposed sensors have several advantages, such as flexibility, reliability, high strain, low cost, simple fabrication, and low temperature processing. The PZT thin-film deposition process includes a pyrolysis process at 150 °C/500 °C for 10/5 min, followed by an annealing process at 650 °C for 10 min. Finally, the consistent pulse wave velocity (PWV) was demonstrated based on human pulse measurements from apical to radial, brachial to radial, and radial to ankle. It is characterized that the sensitivity of our PZT-based tactile sensor was approximately 0.798 mV/g. View Full-Text
Keywords: PZT thin-film; sol-gel; sensor; biomedical PZT thin-film; sol-gel; sensor; biomedical
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Tseng, H.-J.; Tian, W.-C.; Wu, W.-J. Flexible PZT Thin Film Tactile Sensor for Biomedical Monitoring. Sensors 2013, 13, 5478-5492.

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