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Sensors 2013, 13(10), 13178-13191;

A Micro-Force Sensor with Slotted-Quad-Beam Structure for Measuring the Friction in MEMS Bearings

State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China
School of Optoelectronic Engineering, Xi'an Technological University, Xi'an 710032, China
State Key Laboratory of Digital Manufacturing Equipment & Technology, Huazhong University of Science and Technology, Wuhan 430074, China
Author to whom correspondence should be addressed.
Received: 2 August 2013 / Revised: 5 September 2013 / Accepted: 11 September 2013 / Published: 30 September 2013
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering 2013)
Full-Text   |   PDF [992 KB, uploaded 21 June 2014]


Presented here is a slotted-quad-beam structure sensor for the measurement of friction in micro bearings. Stress concentration slots are incorporated into a conventional quad-beam structure to improve the sensitivity of force measurements. The performance comparison between the quad-beam structure sensor and the slotted-quad-beam structure sensor are performed by theoretical modeling and finite element (FE) analysis. A hollow stainless steel probe is attached to the mesa of the sensor chip by a tailor-made organic glass fixture. Concerning the overload protection of the fragile beams, a glass wafer is bonded onto the bottom of sensor chip to limit the displacement of the mesa. The calibration of the packaged device is experimentally performed by a tri-dimensional positioning stage, a precision piezoelectric ceramic and an electronic analytical balance, which indicates its favorable sensitivity and overload protection. To verify the potential of the proposed sensor being applied in micro friction measurement, a measurement platform is established. The output of the sensor reflects the friction of bearing resulting from dry friction and solid lubrication. The results accord with the theoretical modeling and demonstrate that the sensor has the potential application in measuring the micro friction force under stable stage in MEMS machines. View Full-Text
Keywords: micro-force sensor; stress concentration slots; friction measurement micro-force sensor; stress concentration slots; friction measurement
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Liu, H.; Yang, S.; Zhao, Y.; Jiang, Z.; Liu, Y.; Tian, B. A Micro-Force Sensor with Slotted-Quad-Beam Structure for Measuring the Friction in MEMS Bearings. Sensors 2013, 13, 13178-13191.

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