Next Article in Journal
N-acyl Homoserine Lactone-Producing Pseudomonas putida Strain T2-2 from Human Tongue Surface
Next Article in Special Issue
Improving Electronic Sensor Reliability by Robust Outlier Screening
Previous Article in Journal
Identification and Quantification of Explosives in Nanolitre Solution Volumes by Raman Spectroscopy in Suspended Core Optical Fibers
Previous Article in Special Issue
A Multi-Fork Z-Axis Quartz Micromachined Gyroscope
Open AccessArticle

A Micro-Force Sensor with Slotted-Quad-Beam Structure for Measuring the Friction in MEMS Bearings

1
State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China
2
School of Optoelectronic Engineering, Xi'an Technological University, Xi'an 710032, China
3
State Key Laboratory of Digital Manufacturing Equipment & Technology, Huazhong University of Science and Technology, Wuhan 430074, China
*
Author to whom correspondence should be addressed.
Sensors 2013, 13(10), 13178-13191; https://doi.org/10.3390/s131013178
Received: 2 August 2013 / Revised: 5 September 2013 / Accepted: 11 September 2013 / Published: 30 September 2013
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering 2013)
Presented here is a slotted-quad-beam structure sensor for the measurement of friction in micro bearings. Stress concentration slots are incorporated into a conventional quad-beam structure to improve the sensitivity of force measurements. The performance comparison between the quad-beam structure sensor and the slotted-quad-beam structure sensor are performed by theoretical modeling and finite element (FE) analysis. A hollow stainless steel probe is attached to the mesa of the sensor chip by a tailor-made organic glass fixture. Concerning the overload protection of the fragile beams, a glass wafer is bonded onto the bottom of sensor chip to limit the displacement of the mesa. The calibration of the packaged device is experimentally performed by a tri-dimensional positioning stage, a precision piezoelectric ceramic and an electronic analytical balance, which indicates its favorable sensitivity and overload protection. To verify the potential of the proposed sensor being applied in micro friction measurement, a measurement platform is established. The output of the sensor reflects the friction of bearing resulting from dry friction and solid lubrication. The results accord with the theoretical modeling and demonstrate that the sensor has the potential application in measuring the micro friction force under stable stage in MEMS machines. View Full-Text
Keywords: micro-force sensor; stress concentration slots; friction measurement micro-force sensor; stress concentration slots; friction measurement
Show Figures

MDPI and ACS Style

Liu, H.; Yang, S.; Zhao, Y.; Jiang, Z.; Liu, Y.; Tian, B. A Micro-Force Sensor with Slotted-Quad-Beam Structure for Measuring the Friction in MEMS Bearings. Sensors 2013, 13, 13178-13191. https://doi.org/10.3390/s131013178

AMA Style

Liu H, Yang S, Zhao Y, Jiang Z, Liu Y, Tian B. A Micro-Force Sensor with Slotted-Quad-Beam Structure for Measuring the Friction in MEMS Bearings. Sensors. 2013; 13(10):13178-13191. https://doi.org/10.3390/s131013178

Chicago/Turabian Style

Liu, Huan; Yang, Shuming; Zhao, Yulong; Jiang, Zhuangde; Liu, Yan; Tian, Bian. 2013. "A Micro-Force Sensor with Slotted-Quad-Beam Structure for Measuring the Friction in MEMS Bearings" Sensors 13, no. 10: 13178-13191. https://doi.org/10.3390/s131013178

Find Other Styles

Article Access Map by Country/Region

1
Only visits after 24 November 2015 are recorded.
Search more from Scilit
 
Search
Back to TopTop