Next Article in Journal
An Estimate of Mutual Information that Permits Closed-Form Optimisation
Previous Article in Journal
Statistical Properties of the Foreign Exchange Network at Different Time Scales: Evidence from Detrended Cross-Correlation Coefficient and Minimum Spanning Tree
Open AccessArticle

Application of Maximum Entropy Method to Semiconductor Engineering

Hitachi, Ltd., Yokohama Research Laboratory, 292, Yoshida-cho, Totsuka-ku, Yokohama, Kanagawa 244-0817, Japan
Entropy 2013, 15(5), 1663-1689; https://doi.org/10.3390/e15051663
Received: 15 March 2013 / Revised: 25 April 2013 / Accepted: 1 May 2013 / Published: 7 May 2013
The maximum entropy method (MEM) is widely used in research fields such as linguistics, meteorology, physics, and chemistry. Recently, MEM application has become a subject of interest in the semiconductor engineering field, in which devices utilize very thin films composed of many materials. For thin film fabrication, it is essential to thoroughly understand atomic-scale structures, internal fixed charges, and bulk/interface traps, and many experimental techniques have been developed for evaluating these. However, the difficulty in interpreting the data they provide prevents the improvement of device fabrication processes. As a candidate for a very practical data analyzing technique, MEM is a promising approach to solve this problem. In this paper, we review the application of MEM to thin films used in semiconductor engineering. The method provides interesting and important information that cannot be obtained with conventional methods. This paper explains its theoretical background, important points for practical use, and application results. View Full-Text
Keywords: maximum entropy method; semiconductor engineering; film structure; fixed charge; trap maximum entropy method; semiconductor engineering; film structure; fixed charge; trap
Show Figures

Figure 1

MDPI and ACS Style

Yonamoto, Y. Application of Maximum Entropy Method to Semiconductor Engineering. Entropy 2013, 15, 1663-1689.

Show more citation formats Show less citations formats

Article Access Map by Country/Region

1
Only visits after 24 November 2015 are recorded.
Back to TopTop