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26 pages, 6031 KB  
Article
Model-Based Design and Sensitivity Optimization of Frequency-Output Pressure Sensors for Real-Time Monitoring in Intelligent Rowing Systems
by Iaroslav Osadchuk, Oleksandr Osadchuk, Serhii Baraban, Andrii Semenov and Mariia Baraban
Electronics 2025, 14(20), 4049; https://doi.org/10.3390/electronics14204049 - 15 Oct 2025
Viewed by 581
Abstract
This study presents a model-driven approach to the design, calibration, and application of frequency-output pressure sensors integrated within an intelligent system for real-time monitoring of rowing performance. The proposed system captures biomechanical parameters of the “boat–rower” complex across 50 parallel channels with a [...] Read more.
This study presents a model-driven approach to the design, calibration, and application of frequency-output pressure sensors integrated within an intelligent system for real-time monitoring of rowing performance. The proposed system captures biomechanical parameters of the “boat–rower” complex across 50 parallel channels with a temporal resolution of 8–12 ms. At the core of the sensing architecture are parametric pressure transducers incorporating strain-gauge primary elements and microelectronic auto-generator circuits featuring negative differential resistance (NDR). These oscillating circuits convert mechanical stress into high-frequency output signals in the 1749.9–1751.9 MHz range, with pressure sensitivities from 0.365 kHz/kPa to 1.370 kHz/kPa. The sensor models are derived using physical energy conversion principles, enabling the formulation of analytical expressions for transformation and sensitivity functions. These models simplify sensitivity tuning and allow clear interpretation of how structural and electronic parameters influence output frequency. The system architecture eliminates the need for analog-to-digital converters and signal amplifiers, reducing cost and power consumption, while enabling wireless ultra high frequency (UHF) transmission of sensor data. Integrated algorithms analyze the influence of biomechanical variables on athlete performance, enabling real-time diagnostics. The proposed model-based methodology offers a scalable and accurate solution for intelligent sports instrumentation and beyond. Full article
(This article belongs to the Special Issue Wearable Sensors for Human Position, Attitude and Motion Tracking)
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20 pages, 6733 KB  
Article
Integration of ANN and RSM to Optimize the Sawing Process of Wood by Circular Saw Blades
by Mihai Ispas, Sergiu Răcășan, Bogdan Bedelean and Ana-Maria Angelescu
Appl. Sci. 2025, 15(18), 10206; https://doi.org/10.3390/app151810206 - 19 Sep 2025
Cited by 1 | Viewed by 1233
Abstract
Various parameters, like blade design, rotational speed, feed speed, tooth geometry, wood moisture content, and wood species, influence the efficiency and quality of sawing processes. Knowing the optimal combination of these factors could lead to lower power consumption and high surface quality during [...] Read more.
Various parameters, like blade design, rotational speed, feed speed, tooth geometry, wood moisture content, and wood species, influence the efficiency and quality of sawing processes. Knowing the optimal combination of these factors could lead to lower power consumption and high surface quality during wood processing. Therefore, in this study, we applied a novel method that could be used to optimize the cutting of wood with circular saw blades. The analyzed factors included rotational speed, feed speed, blade type (the number of cutting teeth and blade geometries), and two wood species, such as beech and spruce. The samples were cut longitudinally using two circular saw blades. The power consumption and the roughness of the processed surfaces were experimentally measured using an active/reactive electrical power transducer and a DAQ connected to a computer and a diamond stylus roughness meter, respectively. Once the data were gathered and processed, an artificial neural network modeling technique was involved in designing two models: one model for the cutting power and the other for surface roughness. Both models are characterized by high values of performance indicators. Therefore, the models could be considered a reliable tool that could be used to predict the cutting power and the surface roughness for the cutting of wood with circular saw blades. Next, response surface methodology was used to identify how each factor affects the cutting power and the surface quality, and to find the optimal values for both. The results showed that the most important factor that influences the roughness of the processed surfaces is the feed speed; the second factor is the blade rotation speed; the third factor is the tool type (the number of cutting teeth combined with their geometry). The optimal machining conditions recommended by the optimization algorithm (low power consumption and low roughness) imply minimum feed speed values (3.5 m/min) and medium (4500 rpm for 54-tooth blade) or high (6000 rpm for 24-tooth blade) blade rotation speeds. A further study will be conducted to consider the behavior of wood species during the circular sawing of wood and to clarify the influence of the different constructive parameters of the blades (number of teeth, tooth geometry) on their performance. Full article
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17 pages, 3712 KB  
Article
Structural Optimization Design of the Dual-Layer CMUT with Low Power Consumption and High Ultrasonic Reception Performance
by Jie Li, Zhaohui Xiao, Zutang Wu, Xiong Hu, Zhikang Li, Yihe Zhao, Min Li, Jiawei Yuan, Shaohui Qin and Libo Zhao
Micromachines 2025, 16(7), 782; https://doi.org/10.3390/mi16070782 - 30 Jun 2025
Viewed by 978
Abstract
Capacitive micromachined ultrasonic transducers (CMUTs) have been widely applied in fields such as air-coupled ultrasonic nondestructive testing, gesture recognition, and 3D imaging. However, most current CMUTs struggle to simultaneously achieve both low power consumption and high performance, which limits their application in relevant [...] Read more.
Capacitive micromachined ultrasonic transducers (CMUTs) have been widely applied in fields such as air-coupled ultrasonic nondestructive testing, gesture recognition, and 3D imaging. However, most current CMUTs struggle to simultaneously achieve both low power consumption and high performance, which limits their application in relevant fields. In this paper, a dual-layer CMUT is proposed, and its structural optimization design is also analyzed. The dual-layer CMUT consists of a top-layer circular CMUT cell and a bottom-layer annular CMUT cell. A movable pillar connects the top and bottom cells of the double-layer CMUT. This design increases the total deflection and reduces the stiffness, making the membrane more susceptible to deformation under external forces, thereby achieving low power consumption and high reception performance. The finite element method (FEM) results showed that, compared with conventional CMUTs, the structural optimization design of the dual-layer CMUT had a 13.7% reduction in collapse voltage. The improvements in the maximum deflection, average deflection, electromechanical coupling coefficient, transmitting sensitivity, and receiving sensitivity were 41.2%, 68.0%, 84.6%, 17.7%, and 101.6%, respectively. Therefore, the dual-layer CMUT has low power consumption and high reception performance while maintaining transmission performance, and it has potential for applications in portable, low-power devices and air-coupled ultrasonic nondestructive testing. Full article
(This article belongs to the Section E:Engineering and Technology)
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17 pages, 4458 KB  
Article
A Sub-50nW Implantable Body Temperature Sensor and Its Application to a Rat
by Jounghoon Lim, Sieun Lee, Seonae Jang, Young Sang Cho and Jong Pal Kim
Appl. Sci. 2025, 15(5), 2269; https://doi.org/10.3390/app15052269 - 20 Feb 2025
Cited by 1 | Viewed by 2261
Abstract
An ultra-low-power implantable body temperature sensor with a power consumption of 40.9 nW is presented. Deep body temperature measurement can be utilized for diseases such as inflammatory response due to implantable devices, treatment of traumatic brain injury, early monitoring of rejection after kidney [...] Read more.
An ultra-low-power implantable body temperature sensor with a power consumption of 40.9 nW is presented. Deep body temperature measurement can be utilized for diseases such as inflammatory response due to implantable devices, treatment of traumatic brain injury, early monitoring of rejection after kidney transplantation, and monitoring of frictional heat in artificial joints, as well as health management such as ovulation cycles. Since it is implanted in the body and operated by a battery, it is very important to minimize power consumption. For low power consumption, we propose a dynamic virtual Wheatstone bridge technology for low-power transducer driving, and the simplified architecture is designed to operate at 0.6 V. The chip fabricated in a 180 nm CMOS process meets the ASTM E1112-00 specification for medical thermometers. That is, it can measure from 34 °C to 43 °C and meets the accuracy of ±0.1 °C between 37 °C and 39 °C. The measured power consumption at 37 °C is 40.9 nW. To verify practical application, a temperature sensor was implanted in a rat and body temperature changes before and after anesthesia were observed. Full article
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15 pages, 5765 KB  
Article
An Acoustic Underwater Glider for the Real-Time Transmission of Observation Data via an Underwater Acoustic Communication Modem
by Sichen Zou and Qindong Sun
Sensors 2025, 25(3), 849; https://doi.org/10.3390/s25030849 - 30 Jan 2025
Cited by 2 | Viewed by 2507
Abstract
This paper introduces the development of an acoustic underwater glider integrated with an underwater acoustic modem designed to enable the real-time transmission of ocean observation data. The glider features three sequentially connected, independent compartments and is capable of operating at depths exceeding 1000 [...] Read more.
This paper introduces the development of an acoustic underwater glider integrated with an underwater acoustic modem designed to enable the real-time transmission of ocean observation data. The glider features three sequentially connected, independent compartments and is capable of operating at depths exceeding 1000 m. To ensure stable communication, two acoustic transducers are mounted at the rear of the glider and optimized to maintain a consistent energy radiation angle despite variations in the glider’s attitude. The acoustic modem, housed within one of the compartments, operates with a standby power consumption as low as 5 mW, significantly enhancing the overall energy efficiency of the system. To address the glider’s motion dynamics and the unique characteristics of the underwater acoustic channel, a multi-carrier frequency shift keying-based underwater acoustic communication scheme combined with a Stop-and-Wait Automatic Repeat Request protocol was designed and implemented. The system’s performance and reliability were validated through sea trials conducted in the South China Sea. The results demonstrated that the glider achieved reliable underwater acoustic communication over distances of up to 5 km. This research highlights the potential of the acoustic underwater glider for applications such as underwater acoustic measurements and distributed networking collaboration. The system holds significant promise for advancing underwater acoustic communication and ocean observation technologies. Full article
(This article belongs to the Section Physical Sensors)
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13 pages, 833 KB  
Article
Low-Complexity Ultrasonic Flowmeter Signal Processor Using Peak Detector-Based Envelope Detection
by Myeong-Geon Yu and Dong-Sun Kim
J. Sens. Actuator Netw. 2025, 14(1), 12; https://doi.org/10.3390/jsan14010012 - 30 Jan 2025
Cited by 4 | Viewed by 2686
Abstract
Ultrasonic flowmeters are essential sensor devices widely used in remote metering systems, smart grids, and monitoring systems. In these environments, a low-power design is critical to maximize energy efficiency. Real-time data collection and remote consumption monitoring through remote metering significantly enhance network flexibility [...] Read more.
Ultrasonic flowmeters are essential sensor devices widely used in remote metering systems, smart grids, and monitoring systems. In these environments, a low-power design is critical to maximize energy efficiency. Real-time data collection and remote consumption monitoring through remote metering significantly enhance network flexibility and efficiency. This paper proposes a low-complexity structure that ensures an accurate time-of-flight (ToF) estimation within an acceptable error range while reducing computational complexity. The proposed system utilizes Hilbert envelope detection and a differentiator-based parallel peak detector. It transmits and collects data through ultrasonic transmitter and receiver transducers and is designed for seamless integration as a node into wireless sensor networks (WSNs). The system can be involved in various IoT and industrial applications through high energy efficiency and real-time data transmission capabilities. The proposed structure was validated using the MATLAB software, with an LPG gas flowmeter as the medium. The results demonstrated a mean relative deviation of 5.07% across a flow velocity range of 0.1–1.7 m/s while reducing hardware complexity by 78.9% compared to the conventional FFT-based cross-correlation methods. This study presents a novel design integrating energy-efficient ultrasonic flowmeters into remote metering systems, smart grids, and industrial monitoring applications. Full article
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13 pages, 7247 KB  
Article
Reconfigurable ScAlN Piezoelectric Micromachined Ultrasonic Transducer Arrays for Range Finding
by Wenling Shang, Danrui Wang, Bin Miao, Shutao Yao, Guifeng Ta, Haojie Liu, Jinyan Tao, Xiaonan Liu, Xiangyong Zhao and Jiadong Li
Micromachines 2025, 16(2), 145; https://doi.org/10.3390/mi16020145 - 26 Jan 2025
Viewed by 2081
Abstract
Due to their compact sizes, low power consumption levels, and convenient integration capabilities, piezoelectric micromachined ultrasonic transducers (PMUTs) have gained significant attention for enabling environmental sensing functionalities. However, the frequency inconsistency of the PMUT arrays often leads to directional errors with the ultrasonic [...] Read more.
Due to their compact sizes, low power consumption levels, and convenient integration capabilities, piezoelectric micromachined ultrasonic transducers (PMUTs) have gained significant attention for enabling environmental sensing functionalities. However, the frequency inconsistency of the PMUT arrays often leads to directional errors with the ultrasonic beams. Herein, we propose a reconfigurable PMUT array based on a Sc0.2Al0.8N piezoelectric thin film for in-air ranging. Each element of the reconfigurable PMUT array possesses the ability to be independently replaced, enabling matching of the required frequency characteristics, which enhances the reusability of the device. The experimental results show that the frequency uniformity of the 2 × 2 PMUT array reaches 0.38% and the half-power beam width (θ−3dB) of the array measured at 20 cm is 60°. At a resonance of 69.7 kHz, the sound pressure output reaches 7.4 Pa (sound pressure level of 108.2 dB) at 19 mm, with a reception sensitivity of approximately 11.6 mV/Pa. Ultimately, the maximum sensing distance of the array is 7.9 m, and it extends to 14.1 m with a horn, with a signal-to-noise ratio (SNR) of 19.5 dB. This research significantly expands the ranging capability of PMUTs and showcases their great potential in environmental perception applications. Full article
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17 pages, 18270 KB  
Article
An Investigation into High-Accuracy and Energy-Efficient Novel Capacitive MEMS for Tire Pressure Sensor Application
by Liang Luo, Ziyuan Wang, Jianwei Chen, Aisn Gioronara Hui, Allwins Moore Rogikin, Rongzhen Liu, Yao Zhou, Zhujin Jiang and Changde He
Sensors 2024, 24(24), 8037; https://doi.org/10.3390/s24248037 - 17 Dec 2024
Cited by 4 | Viewed by 2209
Abstract
Tire pressure monitoring systems (TPMSs) are essential for maintaining driving safety by continuously monitoring critical tire parameters, such as pressure and temperature, in real time during vehicle operation. Among these parameters, tire pressure is the most significant, necessitating the use of highly precise, [...] Read more.
Tire pressure monitoring systems (TPMSs) are essential for maintaining driving safety by continuously monitoring critical tire parameters, such as pressure and temperature, in real time during vehicle operation. Among these parameters, tire pressure is the most significant, necessitating the use of highly precise, cost-effective, and energy-efficient sensing technologies. With the rapid advancements in micro-electro-mechanical system (MEMS) technology, modern automotive sensing and monitoring systems increasingly rely on MEMS sensors due to their compact size, low cost, and low power consumption. This study presents a novel high-precision capacitive pressure sensor based on a capacitive micromachined ultrasonic transducer (CMUT) structure and a silicon–silicon direct bonding process. The proposed design offers exceptional performance with high accuracy, ultra-low power consumption, and reduced production costs, making it an optimal solution for enhancing the precision and efficiency of TPMS. Leveraging its low power requirements, capacitive sensing technology emerges as a superior choice for energy-efficient systems in the automotive industry. Full article
(This article belongs to the Special Issue Applications of Manufacturing and Measurement Sensors)
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17 pages, 9133 KB  
Article
Comparative Analysis of Piezoelectric Transducers for Low-Power Systems: A Focus on Vibration Energy Harvesting
by Iusley S. Lacerda, Antonio A. Silva, Eisenhawer M. Fernandes, Richard Senko, Andersson G. Oliveira, João M. P. Q. Delgado, Diego D. S. Diniz, Maria J. Figueiredo and Antonio G. B. Lima
Appl. Sci. 2024, 14(20), 9451; https://doi.org/10.3390/app14209451 - 16 Oct 2024
Cited by 3 | Viewed by 2901
Abstract
With advances in technology, the generation of electrical energy through the harvesting of energies dissipated in the form of mechanical vibration, known as power harvesting, has received increasing attention in recent decades. It is undoubtedly an interesting means to power systems with low [...] Read more.
With advances in technology, the generation of electrical energy through the harvesting of energies dissipated in the form of mechanical vibration, known as power harvesting, has received increasing attention in recent decades. It is undoubtedly an interesting means to power systems with low energy consumption. This research aims to evaluate an energy generation system based on the piezoelectric effect activated by mechanical excitation and develop a system capable of powering devices and sensors for temperature monitoring in a practical situation, such as in an engine room, aiming to ensure its safe operation. Two transducers subjected to vibrational excitation were evaluated, and then an energy generation system using a buck DC-DC converter circuit was assessed. The transducer was connected to the input of the board, the microcontroller to the output, and the LM35 temperature sensor along with the battery was used to ensure the circuit’s autonomy. Additionally, the Attiny85 microcontroller was programmed to perform temperature monitoring tasks in a continuous low-energy-consumption mode. The obtained spectral analysis results showed a maximum generation power of 8.88 mW for the PZT-5H transducer and 3.3 mW for the P5-13B transducer. The use of LTC3588-1 increased the autonomy of the monitoring system by 64.3% and reduced the system’s usage time in cases of temperature anomalies by 50%. Full article
(This article belongs to the Topic Power System Protection)
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31 pages, 3231 KB  
Review
Use of Triboelectric Nanogenerators in Advanced Hybrid Renewable Energy Systems for High Efficiency in Sustainable Energy Production: A Review
by Van-Long Trinh and Chen-Kuei Chung
Processes 2024, 12(9), 1964; https://doi.org/10.3390/pr12091964 - 12 Sep 2024
Cited by 8 | Viewed by 4000
Abstract
Renewable energy is the best choice for clean and sustainable energy development. A single renewable energy system reveals an intermittent disadvantage during the energy production process due to the effects of weather, season, day/night, and working environment. A generally hybrid renewable energy system [...] Read more.
Renewable energy is the best choice for clean and sustainable energy development. A single renewable energy system reveals an intermittent disadvantage during the energy production process due to the effects of weather, season, day/night, and working environment. A generally hybrid renewable energy system (HRES) is an energy production scheme that is built based on a combination of two or more single renewable energy sources (such as solar energy, wind power, hydropower, thermal energy, and ocean energy) to produce electrical energy for energy consumption, energy storage, or a power transmission line. HRESs feature the outstanding characteristics of enhancing energy conversion efficiency and reducing fluctuations during the energy production process. Triboelectric nanogenerator (TENG) technology transduces wasted mechanical energies into electrical energy. The TENG can harvest renewable energy sources (such as wind, water flow, and ocean energy) into electricity with a sustainable working ability that can be integrated into an HRES for high power efficiency in sustainable renewable energy production. This article reviews the recent techniques and methods using HRESs and triboelectric nanogenerators (TENGs) in advanced hybrid renewable energy systems for improvements in the efficiency of harvesting energy, sustainable energy production, and practical applications. The paper mentions the benefits, challenges, and specific solutions related to the development and utilization of HRESs. The results show that the TENG is a highly potential power source for harvesting energy, renewable energy integration, application, and sustainable energy development. The results are a useful reference source for developing HRES models for practical applications and robust development in the near future. Full article
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14 pages, 10353 KB  
Article
Energy Harvester Based on Mechanical Impacts of an Oscillating Rod on Piezoelectric Transducers
by Marco Antonio Islas-Herrera, David Sánchez-Luna, Jorge Miguel Jaimes-Ponce, Daniel Andrés Córdova-Córdova, Christopher Iván Lorenzo-Alfaro and Daniel Hernández-Rivera
Clean Technol. 2024, 6(3), 907-920; https://doi.org/10.3390/cleantechnol6030046 - 10 Jul 2024
Cited by 3 | Viewed by 2627
Abstract
Energy harvesting is a clean technique for obtaining electrical energy from environmental energy. Mechanical vibrations are an energy source that can be used to produce electricity using piezoelectric energy harvesters. Vibrations and wind in bridges have the potential to produce clean energy that [...] Read more.
Energy harvesting is a clean technique for obtaining electrical energy from environmental energy. Mechanical vibrations are an energy source that can be used to produce electricity using piezoelectric energy harvesters. Vibrations and wind in bridges have the potential to produce clean energy that can be employed to supply energy to electronic devices with low consumption. The purpose of this paper was to validate the functioning of an energy harvester and test the electrical power generation potential of a system based on the oscillation of a rod with a tip mass to stimulate piezoelectric transducers by impact. The obtained results showed the electric energy productions for different test conditions. Experimentally, the proposed structure produced 0.337 µJ of energy after 14 s of testing. In addition, after one hour of operation, an estimated production of 10.4 mJ was obtained, considering four stacks of 25 piezoelectric disks each when periodic impacts of 50 N at 5.7 Hz stimulated the transducers. In future work, we will focus on taking advantage of the vibrations produced in the proposed structure induced by the mechanical vibration of bridges and vortex-induced vibration (VIV) through interaction with wind to produce clean energy that is useful for low-power applications. Full article
(This article belongs to the Collection Brilliant Young Researchers in Clean Technologies)
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19 pages, 11299 KB  
Article
Design of Ultrasonic Guided Wave Pipeline Non-Destructive Testing System Based on Adaptive Wavelet Threshold Denoising
by Si-Yu Huang, Ying-Qing Guo, Xu-Lei Zang and Zhao-Dong Xu
Electronics 2024, 13(13), 2536; https://doi.org/10.3390/electronics13132536 - 28 Jun 2024
Cited by 11 | Viewed by 3001
Abstract
Guided wave ultrasonic testing (GWUT) within the realm of pipeline inspection is an efficacious approach; however, current GWUT systems are characterized by high costs and power consumption, and their detection results are significantly susceptible to noise interference. Addressing these issues, this study introduces [...] Read more.
Guided wave ultrasonic testing (GWUT) within the realm of pipeline inspection is an efficacious approach; however, current GWUT systems are characterized by high costs and power consumption, and their detection results are significantly susceptible to noise interference. Addressing these issues, this study introduces a GWUT system predicated on adaptive wavelet threshold denoising, centered around a low-power main controller, achieving cost-effective and low-power-consumption pipeline non-destructive testing (NDT) with clear results. The system employs an STM32 as the main controller and utilizes direct digital frequency synthesis (DDS) technology to generate ultrasonic excitation signals. These signals, after power amplifier processing, ensure high-stability output for the driving signal. In conjunction with the signal acquisition module, digital filtering of the collected signals is executed via the host computer. Empirical validation has demonstrated that the system can achieve an output amplitude of up to 90 Vpp within an excitation frequency range of 20 kHz–400 kHz, directly driving piezoelectric transducers. The optimal threshold is identified using the butterfly optimization algorithm, enabling the wavelet threshold function to adaptively denoise the echo signals, thereby significantly enhancing the capability to identify pipeline damage. Full article
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20 pages, 11866 KB  
Article
Smart Wireless Transducer Dedicated for Use in Aviation Laboratories
by Tomasz Kabala and Jerzy Weremczuk
Sensors 2024, 24(11), 3585; https://doi.org/10.3390/s24113585 - 2 Jun 2024
Cited by 1 | Viewed by 1783
Abstract
Reliable testing of aviation components depends on the quality and configuration flexibility of measurement systems. In a typical approach to test instrumentation, there are tens or hundreds of sensors on the test head and test facility, which are connected by wires to measurement [...] Read more.
Reliable testing of aviation components depends on the quality and configuration flexibility of measurement systems. In a typical approach to test instrumentation, there are tens or hundreds of sensors on the test head and test facility, which are connected by wires to measurement cards in control cabinets. The preparation of wiring and the setup of measurement systems are laborious tasks requiring diligence. The use of smart wireless transducers allows for a new approach to test preparation by reducing the number of wires. Moreover, additional functionalities like data processing, alarm-level monitoring, compensation, or self-diagnosis could improve the functionality and accuracy of measurement systems. A combination of low power consumption, wireless communication, and wireless power transfer could speed up the test-rig instrumentation process and bring new test possibilities, e.g., long-term testing of moving or rotating components. This paper presents the design of a wireless smart transducer dedicated for use with sensors typical of aviation laboratories such as thermocouples, RTDs (Resistance Temperature Detectors), strain gauges, and voltage output integrated sensors. The following sections present various design requirements, proposed technical solutions, a study of battery and wireless power supply possibilities, assembly, and test results. All presented tests were carried out in the Components Test Laboratory located at the Łukasiewicz Research Network–Institute of Aviation. Full article
(This article belongs to the Special Issue Feature Papers in Intelligent Sensors 2024)
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14 pages, 2042 KB  
Article
Wideband Current Transducer Traceable Calibration up to 10 A and 1 MHz
by Mohamed Ouameur, Daniela Istrate and François Ziade
Sensors 2024, 24(8), 2608; https://doi.org/10.3390/s24082608 - 19 Apr 2024
Cited by 4 | Viewed by 1667
Abstract
Energy efficiency is an important issue in industry, especially with the ever-increasing consumption of electrical energy. The power quality and the traceability of metering devices are essential when integrating energy metering systems for energy efficiency. This management requires an understanding of electrical current [...] Read more.
Energy efficiency is an important issue in industry, especially with the ever-increasing consumption of electrical energy. The power quality and the traceability of metering devices are essential when integrating energy metering systems for energy efficiency. This management requires an understanding of electrical current events such as pulse and transient currents. Current transducers are widely used to measure these electrical current events up to a few megahertz. Their use makes it possible to measure not only the main current flowing through the transducer, but also the bypass current that affects electrical equipment. Calibration of these sensors up to a few megahertz then becomes an essential step. Currently, most calibration methods are limited to 100 kHz frequency for a current of 10 A. This paper presents an improvement of a traceable calibration methodology for current transducers up to 10 A and 1 MHz, thus increasing, by 10 times, the current level for such high frequency applications. This calibration methodology is based on a metrological traceability chain (uninterrupted link to the International System of Units) with respect to a calculable current shunt and is currently the only traceable method for calibrating current transducers at 10 A and up to 1 MHz. The uncertainty obtained for the transimpedance ratio is less than 0.2%, which is considerably reduced with respect to the existing capabilities. Full article
(This article belongs to the Section Industrial Sensors)
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14 pages, 5054 KB  
Article
Piezoelectric Micromachined Ultrasonic Transducers with Micro-Hole Inter-Etch and Sealing Process on (111) Silicon Wafer
by Yunhao Wang, Sheng Wu, Wenjing Wang, Tao Wu and Xinxin Li
Micromachines 2024, 15(4), 482; https://doi.org/10.3390/mi15040482 - 30 Mar 2024
Cited by 5 | Viewed by 5851
Abstract
Piezoelectric micromachined ultrasound transducers (PMUTs) have gained significant popularity in the field of ultrasound ranging and medical imaging owing to their small size, low power consumption, and affordability. The scar-free “MIS” (micro-hole inter-etch and sealing) process, a novel bulk-silicon manufacturing technique, has been [...] Read more.
Piezoelectric micromachined ultrasound transducers (PMUTs) have gained significant popularity in the field of ultrasound ranging and medical imaging owing to their small size, low power consumption, and affordability. The scar-free “MIS” (micro-hole inter-etch and sealing) process, a novel bulk-silicon manufacturing technique, has been successfully developed for the fabrication of pressure sensors, flow sensors, and accelerometers. In this study, we utilize the MIS process to fabricate cavity diaphragm structures for PMUTs, resulting in the formation of a flat cavity diaphragm structure through anisotropic etching of (111) wafers in a 70 °C tetramethylammonium hydroxide (TMAH) solution. This study investigates the corrosion characteristics of the MIS technology on (111) silicon wafers, arranges micro-pores etched on bulk silicon around the desired cavity structure in a regular pattern, and takes into consideration the distance compensation for lateral corrosion, resulting in a fully connected cavity structure closely approximating an ortho-hexagonal shape. By utilizing a sputtering process to deposit metallic molybdenum as upper and lower electrodes, as well as piezoelectric materials above the cavity structure, we have successfully fabricated aluminum nitride (AlN) piezoelectric ultrasonic transducer arrays of various sizes and structures. The final hexagonal PMUT cells of various sizes that were fabricated achieved a maximum quality factor (Q) of 251 and a displacement sensitivity of 18.49 nm/V across a range of resonant frequencies from 6.28 MHz to 11.99 MHz. This fabrication design facilitates the achievement of IC-compatible and cost-effective mass production of PMUT array devices with high resonance frequencies. Full article
(This article belongs to the Section A:Physics)
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