- Article
Slow Mode-Based Control Method for Multi-Point Temperature Control System
- Song Xu,
- Seiji Hashimoto,
- Wei Jiang,
- Yuqi Jiang,
- Katsutoshi Izaki,
- Takeshi Kihara and
- Ryota Ikeda
In recent years, thermal processing systems with integrated temperature control have been increasingly needed to achieve high quality and high performance. In this paper, responding to the growing demands for proper transient response and to provide...