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Keywords = suspended nanowire

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18 pages, 4773 KiB  
Article
An Acoustoelectric Approach to Neuron Function
by Jörg P. Kotthaus
Acoustics 2023, 5(3), 601-618; https://doi.org/10.3390/acoustics5030037 - 22 Jun 2023
Viewed by 3857
Abstract
An acoustoelectric approach to neuron function is proposed that combines aspects of the widely accepted electrical-circuit-based Hodgkin–Huxley model for the generation and propagation of action potentials via electric polarization with mechanical models based on propagation via capillary waves. Explaining measured velocities of action [...] Read more.
An acoustoelectric approach to neuron function is proposed that combines aspects of the widely accepted electrical-circuit-based Hodgkin–Huxley model for the generation and propagation of action potentials via electric polarization with mechanical models based on propagation via capillary waves. Explaining measured velocities of action potentials quantitatively, it also predicts the electrical tunability of highly anisotropic polarization packages that surf on the dynamic mechanical force field deforming the neuron membrane. It relies substantially on the local motion of dipoles formed by excess charges close to the inside surface of the neuron membrane, which in turn are anisotropically screened by water molecules in their hydration shell, thus modulating the strong electric field at the interface. As demonstrated on acoustic resonators of suspended nanowires fabricated out of amorphous dipolar silicon nitride, high electric fields combined with predominantly axial-strain modulation can cause transverse acoustoelectric polarization waves that propagate soliton-like with extremely low loss. In neurons, the modulation of electric polarization is confined in the nanometer-thin skin of a high electric field inside the neuron membrane and propagates phase-coherent along the axon as a lowest-order one-dimensional breathing mode, similar to transverse polarization pulses studied in nanowire resonators. Some experiments for the further manifestation of the model as well as topological protection of such breathing-mode polarization waves are discussed. Full article
(This article belongs to the Special Issue Resonators in Acoustics (2nd Edition))
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11 pages, 2458 KiB  
Article
All-Optical Nanosensor for Displacement Detection in Mechanical Applications
by Lorena Escandell, Carlos Álvarez-Rodríguez, Ángela Barreda, Ramón Zaera and Braulio García-Cámara
Nanomaterials 2022, 12(22), 4107; https://doi.org/10.3390/nano12224107 - 21 Nov 2022
Cited by 1 | Viewed by 2522
Abstract
In this paper, we propose the design of an optical system based on two parallel suspended silicon nanowires that support a range of optical resonances that efficiently confine and scatter light in the infrared range as the base of an all-optical displacement sensor. [...] Read more.
In this paper, we propose the design of an optical system based on two parallel suspended silicon nanowires that support a range of optical resonances that efficiently confine and scatter light in the infrared range as the base of an all-optical displacement sensor. The effects of the variation of the distance between the nanowires are analyzed. The simulation models are designed by COMSOL Multiphysics software, which is based on the finite element method. The diameter of the nanocylinders (d = 140 nm) was previously optimized to achieve resonances at the operating wavelengths (λ = 1064 nm and 1310 nm). The results pointed out that a detectable change in their resonant behavior and optical interaction was achieved. The proposed design aims to use a simple light source using a commercial diode laser and simplify the readout systems with a high sensitivity of 1.1 × 106 V/m2 and 1.14 × 106 V/m2 at 1064 nm and 1310 nm, respectively. The results may provide an opportunity to investigate alternative designs of displacement sensors from an all-optical approach and explore their potential use. Full article
(This article belongs to the Topic Advanced Nanomaterials for Sensing Applications)
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23 pages, 4554 KiB  
Review
Heat Transfer Enhancement of Nanofluids with Non-Spherical Nanoparticles: A Review
by Xiaoyin Li, Fangyang Yuan, Wenma Tian, Chenlong Dai, Xinjun Yang, Dongxiang Wang, Jiyun Du, Wei Yu and Huixin Yuan
Appl. Sci. 2022, 12(9), 4767; https://doi.org/10.3390/app12094767 - 9 May 2022
Cited by 26 | Viewed by 4217
Abstract
This article reviews the heat transfer enhancement of nanofluids with non-spherical nanoparticles. We divided the non-spherical nanoparticles suspended in nanofluids into three categories based on the dimension of geometric particle structure. Based on the measured data in experimental studies, we then evaluated the [...] Read more.
This article reviews the heat transfer enhancement of nanofluids with non-spherical nanoparticles. We divided the non-spherical nanoparticles suspended in nanofluids into three categories based on the dimension of geometric particle structure. Based on the measured data in experimental studies, we then evaluated the shape effect of non-spherical nanoparticles on thermal conductivity and convective heat transfer enhancement of nanofluids. Recent studies explored the numerical predictions and related heat transfer mechanisms. Due to large aspect ratios, thermal conductivity is abnormally enhanced only for nanofluids with carbon nanotubes/nanofibers/nanowires. The approximate enhancement effect exerted by three types of non-spherical nanoparticles on thermal conductivity was 4.5:2.5:1. Thermal conductivity enhancement per concentration was larger for nanorods/ellipsoids with small aspect ratios. The convective heat transfer coefficient was increased by suspending non-spherical nanoparticles in the base fluid. Consequently, no significant thermohydraulic performance was discovered for convective heat transfer of non-spherical nanoparticle nanofluid flow, specifically for turbulent flows, due to increased pumping power. However, the temperature and particle concentration effect on convective heat transfer remains unclear. In addition, no perfect model for predicting the thermal conductivity and convective heat transfer of non-spherical nanoparticle nanofluids has been reported. Full article
(This article belongs to the Special Issue Multiphase Flows in Microfluidics: Fundamentals and Applications)
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13 pages, 2935 KiB  
Article
Development of a Novel Gas-Sensing Platform Based on a Network of Metal Oxide Nanowire Junctions Formed on a Suspended Carbon Nanomesh Backbone
by Taejung Kim, Seungwook Lee, Wootaek Cho, Yeong Min Kwon, Jeong Min Baik and Heungjoo Shin
Sensors 2021, 21(13), 4525; https://doi.org/10.3390/s21134525 - 1 Jul 2021
Cited by 9 | Viewed by 4519
Abstract
Junction networks made of longitudinally connected metal oxide nanowires (MOx NWs) have been widely utilized in resistive-type gas sensors because the potential barrier at the NW junctions leads to improved gas sensing performances. However, conventional MOx–NW-based gas sensors exhibit limited gas access to [...] Read more.
Junction networks made of longitudinally connected metal oxide nanowires (MOx NWs) have been widely utilized in resistive-type gas sensors because the potential barrier at the NW junctions leads to improved gas sensing performances. However, conventional MOx–NW-based gas sensors exhibit limited gas access to the sensing sites and reduced utilization of the entire NW surfaces because the NW networks are grown on the substrate. This study presents a novel gas sensor platform facilitating the formation of ZnO NW junction networks in a suspended architecture by growing ZnO NWs radially on a suspended carbon mesh backbone consisting of sub-micrometer-sized wires. NW networks were densely formed in the lateral and longitudinal directions of the ZnO NWs, forming additional longitudinally connected junctions in the voids of the carbon mesh. Therefore, target gases could efficiently access the sensing sites, including the junctions and the entire surface of the ZnO NWs. Thus, the present sensor, based on a suspended network of longitudinally connected NW junctions, exhibited enhanced gas response, sensitivity, and lower limit of detection compared to sensors consisting of only laterally connected NWs. In addition, complete sensor structures consisting of a suspended carbon mesh backbone and ZnO NWs could be prepared using only batch fabrication processes such as carbon microelectromechanical systems and hydrothermal synthesis, allowing cost-effective sensor fabrication. Full article
(This article belongs to the Special Issue Gas Sensors for Environmental Applications)
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10 pages, 3626 KiB  
Article
Epitaxial Growth of Ordered In-Plane Si and Ge Nanowires on Si (001)
by Jian-Huan Wang, Ting Wang and Jian-Jun Zhang
Nanomaterials 2021, 11(3), 788; https://doi.org/10.3390/nano11030788 - 19 Mar 2021
Cited by 2 | Viewed by 2950
Abstract
Controllable growth of wafer-scale in-plane nanowires (NWs) is a prerequisite for achieving addressable and scalable NW-based quantum devices. Here, by introducing molecular beam epitaxy on patterned Si structures, we demonstrate the wafer-scale epitaxial growth of site-controlled in-plane Si, SiGe, and Ge/Si core/shell NW [...] Read more.
Controllable growth of wafer-scale in-plane nanowires (NWs) is a prerequisite for achieving addressable and scalable NW-based quantum devices. Here, by introducing molecular beam epitaxy on patterned Si structures, we demonstrate the wafer-scale epitaxial growth of site-controlled in-plane Si, SiGe, and Ge/Si core/shell NW arrays on Si (001) substrate. The epitaxially grown Si, SiGe, and Ge/Si core/shell NW are highly homogeneous with well-defined facets. Suspended Si NWs with four {111} facets and a side width of about 25 nm are observed. Characterizations including high resolution transmission electron microscopy (HRTEM) confirm the high quality of these epitaxial NWs. Full article
(This article belongs to the Special Issue Silicon Nanodevices)
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20 pages, 3149 KiB  
Review
Directed Self-Assembly of Block Copolymers for the Fabrication of Functional Devices
by Christian Pinto-Gómez, Francesc Pérez-Murano, Joan Bausells, Luis Guillermo Villanueva and Marta Fernández-Regúlez
Polymers 2020, 12(10), 2432; https://doi.org/10.3390/polym12102432 - 21 Oct 2020
Cited by 30 | Viewed by 10995
Abstract
Directed self-assembly of block copolymers is a bottom-up approach to nanofabrication that has attracted high interest in recent years due to its inherent simplicity, high throughput, low cost and potential for sub-10 nm resolution. In this paper, we review the main principles of [...] Read more.
Directed self-assembly of block copolymers is a bottom-up approach to nanofabrication that has attracted high interest in recent years due to its inherent simplicity, high throughput, low cost and potential for sub-10 nm resolution. In this paper, we review the main principles of directed self-assembly of block copolymers and give a brief overview of some of the most extended applications. We present a novel fabrication route based on the introduction of directed self-assembly of block copolymers as a patterning option for the fabrication of nanoelectromechanical systems. As a proof of concept, we demonstrate the fabrication of suspended silicon membranes clamped by dense arrays of single-crystal silicon nanowires of sub-10 nm diameter. Resulting devices can be further developed for building up high-sensitive mass sensors based on nanomechanical resonators. Full article
(This article belongs to the Special Issue State-of-the-Art Polymer Science and Technology in Spain (2020,2021))
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9 pages, 3182 KiB  
Article
Configurational Effects on Strain and Doping at Graphene-Silver Nanowire Interfaces
by Frank Lee, Manoj Tripathi, Peter Lynch and Alan B. Dalton
Appl. Sci. 2020, 10(15), 5157; https://doi.org/10.3390/app10155157 - 27 Jul 2020
Cited by 5 | Viewed by 3401
Abstract
Graphene shows substrate-dependent physical and electronic properties. Here, we presented the interaction between single-layer graphene and silver nanowire (AgNW) in terms of physical straining and doping. We observed a snap-through event for single-layer graphene/AgNW at a separation of AgNWs of 55 nm, beyond [...] Read more.
Graphene shows substrate-dependent physical and electronic properties. Here, we presented the interaction between single-layer graphene and silver nanowire (AgNW) in terms of physical straining and doping. We observed a snap-through event for single-layer graphene/AgNW at a separation of AgNWs of 55 nm, beyond the graphene suspended over the nanowires. The adhesion force between the Atomic Force Microscopy (AFM) tip apex and the suspended graphene was measured as higher than the conformed one by 1.8 nN. The presence of AgNW modulates the Fermi energy level of graphene and reduces the work function by 0.25 eV, which results in n-type doping. Consequently, a lateral p-n-p junction is formed with single AgNW. The correlation Raman plot between G-2D modes reveals the increment of strain in graphene of 0.05% due to the curvature around AgNW, and 0.01% when AgNW lies on the top of graphene. These results provide essential information in inspecting the physical and electronic influences from AgNW. Full article
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14 pages, 2770 KiB  
Article
Internalization and Viability Studies of Suspended Nanowire Silicon Chips in HeLa Cells
by Sara Durán, Marta Duch, Rodrigo Gómez-Martínez, Marta Fernández-Regúlez, Juan Pablo Agusil, Manuel Reina, Claudia Müller, Álvaro San Paulo, Jaume Esteve, Susana Castel and José A. Plaza
Nanomaterials 2020, 10(5), 893; https://doi.org/10.3390/nano10050893 - 7 May 2020
Cited by 3 | Viewed by 3694
Abstract
Micrometer-sized silicon chips have been demonstrated to be cell-internalizable, offering the possibility of introducing in cells even smaller nanoelements for intracellular applications. On the other hand, silicon nanowires on extracellular devices have been widely studied as biosensors or drug delivery systems. Here, we [...] Read more.
Micrometer-sized silicon chips have been demonstrated to be cell-internalizable, offering the possibility of introducing in cells even smaller nanoelements for intracellular applications. On the other hand, silicon nanowires on extracellular devices have been widely studied as biosensors or drug delivery systems. Here, we propose the integration of silicon nanowires on cell-internalizable chips in order to combine the functional features of both approaches for advanced intracellular applications. As an initial fundamental study, the cellular uptake in HeLa cells of silicon 3 µm × 3 µm nanowire-based chips with two different morphologies was investigated, and the results were compared with those of non-nanostructured silicon chips. Chip internalization without affecting cell viability was achieved in all cases; however, important cell behavior differences were observed. In particular, the first stage of cell internalization was favored by silicon nanowire interfaces with respect to bulk silicon. In addition, chips were found inside membrane vesicles, and some nanowires seemed to penetrate the cytosol, which opens the door to the development of silicon nanowire chips as future intracellular sensors and drug delivery systems. Full article
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8 pages, 2003 KiB  
Article
Second-Harmonic Generation in Suspended AlGaAs Waveguides: A Comparative Study
by Iännis Roland, Marco Ravaro, Stéphan Suffit, Pascal Filloux, Aristide Lemaître, Ivan Favero and Giuseppe Leo
Micromachines 2020, 11(2), 229; https://doi.org/10.3390/mi11020229 - 23 Feb 2020
Cited by 11 | Viewed by 3937
Abstract
Due to adjustable modal birefringence, suspended AlGaAs optical waveguides with submicron transverse sections can support phase-matched frequency mixing in the whole material transparency range, even close to the material bandgap, by tuning the width-to-height ratio. Furthermore, their single-pass conversion efficiency is potentially huge, [...] Read more.
Due to adjustable modal birefringence, suspended AlGaAs optical waveguides with submicron transverse sections can support phase-matched frequency mixing in the whole material transparency range, even close to the material bandgap, by tuning the width-to-height ratio. Furthermore, their single-pass conversion efficiency is potentially huge, thanks to the extreme confinement of the interacting modes in the highly nonlinear and high-refractive-index core, with scattering losses lower than in selectively oxidized or quasi-phase-matched AlGaAs waveguides. Here we compare the performances of two types of suspended waveguides made of this material, designed for second-harmonic generation (SHG) in the telecom range: (a) a nanowire suspended in air by lateral tethers and (b) an ultrathin nanorib, made of a strip lying on a suspended membrane of the same material. Both devices have been fabricated from a 123 nm thick AlGaAs epitaxial layer and tested in terms of SHG efficiency, injection and propagation losses. Our results point out that the nanorib waveguide, which benefits from a far better mechanical robustness, performs comparably to the fully suspended nanowire and is well-suited for liquid sensing applications. Full article
(This article belongs to the Special Issue Nonlinear Photonics Devices)
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8 pages, 2037 KiB  
Article
Evaluation of Nanoplasmonic Optical Fiber Sensors Based on D-Type and Suspended Core Fibers with Metallic Nanowires
by Diego Santos, Ariel Guerreiro and José Manuel Baptista
Photonics 2019, 6(3), 100; https://doi.org/10.3390/photonics6030100 - 13 Sep 2019
Cited by 6 | Viewed by 3425
Abstract
The introduction of metallic nanostructures in optical fibers has revolutionized the field of plasmonic sensors since they produce sharper and fine-tuned resonances resulting in higher sensitivities and resolutions. This article evaluates the performance of three different plasmonic optical fiber sensors based on D-type [...] Read more.
The introduction of metallic nanostructures in optical fibers has revolutionized the field of plasmonic sensors since they produce sharper and fine-tuned resonances resulting in higher sensitivities and resolutions. This article evaluates the performance of three different plasmonic optical fiber sensors based on D-type and suspended core fibers with metallic nanowires. It addresses how their different materials, geometry of the components, and their relative position can influence the coupling between the localized plasmonic modes and the guided optical mode. It also evaluates how that affects the spatial distributions of optical power of the different modes and consequently their overlap and coupling, which ultimately impacts the sensor performance. In this work, we use numerical simulations based on finite element methods to validate the importance of tailoring the features of the guided optical mode to promote an enhanced coupling with the localized modes. The results in terms of sensitivity and resolution demonstrate the advantages of using suspended core fibers with metallic nanowires. Full article
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11 pages, 2388 KiB  
Article
Polyacrylamide Ferrogels with Ni Nanowires
by Alexander P. Safronov, Bethanie J. H. Stadler, Joseph Um, Mohammad Reza Zamani Kouhpanji, Javier Alonso Masa, Andrey G. Galyas and Galina V. Kurlyandskaya
Materials 2019, 12(16), 2582; https://doi.org/10.3390/ma12162582 - 13 Aug 2019
Cited by 31 | Viewed by 4034
Abstract
Nickel magnetic nanowires (NWs) have attracted significant attention due to their unique properties, which are useful for basic studies and technological applications, for example in biomedicine. Their structure and magnetic properties were systematically studied in the recent years. In this work, Ni NWs [...] Read more.
Nickel magnetic nanowires (NWs) have attracted significant attention due to their unique properties, which are useful for basic studies and technological applications, for example in biomedicine. Their structure and magnetic properties were systematically studied in the recent years. In this work, Ni NWs with high aspect ratios (length/diameter ~250) were fabricated by electrodeposition into commercial anodic aluminum oxide templates. The templates were then etched and the NWs were suspended in water, where their hydrodynamic size was evaluated by dynamic light scattering. The magnetic response of these NWs as a function of an external magnetic field indicates a dominant shape anisotropy with propagation of the vortex domain wall as the main magnetization reversal process. The suspension of Ni NWs was used in the synthesis of two types of polyacrylamide ferrogels (FGs) by free radical polymerization, with weight fractions of Ni NWs in FGs of 0.036% and 0.169%. The FGs were reasonably homogeneous. The magnetic response of these FGs (hysteresis loops) indicated that the NWs are randomly oriented inside the FG, and their magnetic response remains stable after embedding. Full article
(This article belongs to the Special Issue Advances in Magnetic Materials and Magneto-Elastic Sensors)
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15 pages, 3128 KiB  
Article
Conductometric Sensing with Individual InAs Nanowires
by Valeria Demontis, Mirko Rocci, Maurizio Donarelli, Rishi Maiti, Valentina Zannier, Fabio Beltram, Lucia Sorba, Stefano Roddaro, Francesco Rossella and Camilla Baratto
Sensors 2019, 19(13), 2994; https://doi.org/10.3390/s19132994 - 7 Jul 2019
Cited by 24 | Viewed by 4966
Abstract
In this work, we isolate individual wurtzite InAs nanowires and fabricate electrical contacts at both ends, exploiting the single nanostructures as building blocks to realize two different architectures of conductometric sensors: (a) the nanowire is drop-casted onto—supported by—a SiO2/Si substrate, and [...] Read more.
In this work, we isolate individual wurtzite InAs nanowires and fabricate electrical contacts at both ends, exploiting the single nanostructures as building blocks to realize two different architectures of conductometric sensors: (a) the nanowire is drop-casted onto—supported by—a SiO2/Si substrate, and (b) the nanowire is suspended at approximately 250 nm from the substrate. We test the source-drain current upon changes in the concentration of humidity, ethanol, and NO2, using synthetic air as a gas carrier, moving a step forward towards mimicking operational environmental conditions. The supported architecture shows higher response in the mid humidity range (50% relative humidity), with shorter response and recovery times and lower detection limit with respect to the suspended nanowire. These experimental pieces of evidence indicate a minor role of the InAs/SiO2 contact area; hence, there is no need for suspended nanostructures to improve the sensing performance. Moreover, the sensing capability of single InAs nanowires for detection of NO2 and ethanol in the ambient atmosphere is reported and discussed. Full article
(This article belongs to the Special Issue Advanced Nanomaterials based Gas Sensors)
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12 pages, 2634 KiB  
Article
Manipulation and Investigation of Uniformly-Spaced Nanowire Array on a Substrate via Dielectrophoresis and Electrostatic Interaction
by U Hyeok Choi, Ji Hun Park and Jaekyun Kim
Nanomaterials 2018, 8(7), 456; https://doi.org/10.3390/nano8070456 - 21 Jun 2018
Cited by 1 | Viewed by 3395
Abstract
Directed-assembly of nanowires on the dielectrics-covered parallel electrode structure is capable of producing uniformly-spaced nanowire array at the electrode gap due to dielectrophoretic nanowire attraction and electrostatic nanowire repulsion. Beyond uniformly-spaced nanowire array formation, the control of spacing in the array is beneficial [...] Read more.
Directed-assembly of nanowires on the dielectrics-covered parallel electrode structure is capable of producing uniformly-spaced nanowire array at the electrode gap due to dielectrophoretic nanowire attraction and electrostatic nanowire repulsion. Beyond uniformly-spaced nanowire array formation, the control of spacing in the array is beneficial in that it should be the experimental basis of the precise positioning of functional nanowires on a circuit. Here, we investigate the material parameters and bias conditions to modulate the nanowire spacing in the ordered array, where the nanowire array formation is readily attained due to the electrostatic nanowire interaction. A theoretical model for the force calculation and the simulation of the induced charge in the assembled nanowire verifies that the longer nanowires on thicker dielectric layer tend to be assembled with a larger pitch due to the stronger nanowire-nanowire electrostatic repulsion, which is consistent with the experimental results. It was claimed that the stronger dielectrophoretic force is likely to attract more nanowires that are suspended in solution at the electrode gap, causing them to be less-spaced. Thus, we propose a generic mechanism, competition of dielectrophoretic and electrostatic force, to determine the nanowire pitch in an ordered array. Furthermore, this spacing-controlled nanowire array offers a way to fabricate the high-density nanodevice array without nanowire registration. Full article
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13 pages, 4903 KiB  
Article
A Three-Step Resolution-Reconfigurable Hazardous Multi-Gas Sensor Interface for Wireless Air-Quality Monitoring Applications
by Subin Choi, Kyeonghwan Park, Seungwook Lee, Yeongjin Lim, Byungjoo Oh, Hee Young Chae, Chan Sam Park, Heungjoo Shin and Jae Joon Kim
Sensors 2018, 18(3), 761; https://doi.org/10.3390/s18030761 - 2 Mar 2018
Cited by 14 | Viewed by 7058
Abstract
This paper presents a resolution-reconfigurable wide-range resistive sensor readout interface for wireless multi-gas monitoring applications that displays results on a smartphone. Three types of sensing resolutions were selected to minimize processing power consumption, and a dual-mode front-end structure was proposed to support the [...] Read more.
This paper presents a resolution-reconfigurable wide-range resistive sensor readout interface for wireless multi-gas monitoring applications that displays results on a smartphone. Three types of sensing resolutions were selected to minimize processing power consumption, and a dual-mode front-end structure was proposed to support the detection of a variety of hazardous gases with wide range of characteristic resistance. The readout integrated circuit (ROIC) was fabricated in a 0.18 μm CMOS process to provide three reconfigurable data conversions that correspond to a low-power resistance-to-digital converter (RDC), a 12-bit successive approximation register (SAR) analog-to-digital converter (ADC), and a 16-bit delta-sigma modulator. For functional feasibility, a wireless sensor system prototype that included in-house microelectromechanical (MEMS) sensing devices and commercial device products was manufactured and experimentally verified to detect a variety of hazardous gases. Full article
(This article belongs to the Section Physical Sensors)
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11 pages, 7435 KiB  
Article
Heavily Boron-Doped Silicon Layer for the Fabrication of Nanoscale Thermoelectric Devices
by Zhe Ma, Yang Liu, Lingxiao Deng, Mingliang Zhang, Shuyuan Zhang, Jing Ma, Peishuai Song, Qing Liu, An Ji, Fuhua Yang and Xiaodong Wang
Nanomaterials 2018, 8(2), 77; https://doi.org/10.3390/nano8020077 - 30 Jan 2018
Cited by 11 | Viewed by 6179
Abstract
Heavily boron-doped silicon layers and boron etch-stop techniques have been widely used in the fabrication of microelectromechanical systems (MEMS). This paper provides an introduction to the fabrication process of nanoscale silicon thermoelectric devices. Low-dimensional structures such as silicon nanowire (SiNW) have been considered [...] Read more.
Heavily boron-doped silicon layers and boron etch-stop techniques have been widely used in the fabrication of microelectromechanical systems (MEMS). This paper provides an introduction to the fabrication process of nanoscale silicon thermoelectric devices. Low-dimensional structures such as silicon nanowire (SiNW) have been considered as a promising alternative for thermoelectric applications in order to achieve a higher thermoelectric figure of merit (ZT) than bulk silicon. Here, heavily boron-doped silicon layers and boron etch-stop processes for the fabrication of suspended SiNWs will be discussed in detail, including boron diffusion, electron beam lithography, inductively coupled plasma (ICP) etching and tetramethylammonium hydroxide (TMAH) etch-stop processes. A 7 μm long nanowire structure with a height of 280 nm and a width of 55 nm was achieved, indicating that the proposed technique is useful for nanoscale fabrication. Furthermore, a SiNW thermoelectric device has also been demonstrated, and its performance shows an obvious reduction in thermal conductivity. Full article
(This article belongs to the Special Issue Thermoelectric Nanomaterials)
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