Search Results (33)

This work presents the theoretical design and finite element modeling of high-sensitivity microcantilevers for biosensing applications, integrating piezoelectric actuation with novel ultrananocrystalline diamond (UNCD) structures. Microcantilevers were designed based on projections to grow a multilayer metal/AlN/metal/UNCD stack on silicon substrates, optimized to detect adsorption of biomolecules on the surface of exposed UNCD microcantilevers at the picogram scale. A central design criterion was to match the microcantilever’s eigenfrequency with the resonant frequency of the AlN-based piezoelectric actuator, enabling efficient dynamic excitation. The beam length was tuned to ensure a ≥2 kHz resonant frequency shift upon adsorption of 1 pg of mass distributed on the exposed surface of a UNCD-based microcantilever. Subsequently, a Gaussian distribution mass function with a variance of 5 µm was implemented to evaluate the resonant frequency shift upon mass addition at a certain point on the microcantilever where a variation from 600 Hz to 100 Hz was observed when the mass distribution center was located at the tip of the microcantilever and the piezoelectric borderline, respectively. Both frequency and time domain analyses were performed to predict the resonance behavior, oscillation amplitude, and quality factor. To ensure the reliability of the simulations, the model was first validated using experimental results reported in the literature for an AlN/nanocrystalline diamond (NCD) microcantilever. The results confirmed that the AlN/UNCD architecture exhibits higher resonant frequencies and enhanced sensitivity compared to equivalent AlN/Si structures. The findings demonstrate that using a UNCD-based microcantilever not only improves biocompatibility but also significantly enhances the mechanical performance of the biosensor, offering a robust foundation for the development of next-generation MEMS-based biochemical detection platforms. The research reported here introduces a novel design methodology that integrates piezoelectric actuation with UNCD microcantilevers through eigenfrequency matching, enabling efficient picogram-scale mass detection. Unlike previous approaches, it combines actuator and cantilever optimization within a unified finite element framework, validated against experimental data published in the literature for similar piezo-actuated sensors using materials with inferior biocompatibility compared with the novel UNCD. The dual-domain simulation strategy offers accurate prediction of key performance metrics, establishing a robust and scalable path for next-generation MEMS biosensors. Full article

In this paper, the impact of Lorentz forces and temperature on the natural frequencies of a piezoresistive sensor composed of two microcantilevers with integrated U-shaped thin-film aluminum heaters are investigated. Two types of experiments were performed. In the first, the sensor was placed in a magnetic field so that the current flowing in the heater, in addition to raising the temperature, produced Lorentz forces, inducing normal stresses in the plane of one of the microcantilevers. In the second, which were conducted without magnetic fields, only the temperature variation of the natural frequency was left. In processing of the results, the thermal variations were subtracted from the variations due to both Lorentz forces and temperature in the natural frequency, resulting in the influence of the Lorentz forces only. Theoretical relations for the Lorentz frequency offsets were derived. An indirect method of estimating the natural frequency of one of the cantilevers, through a particular cusp point in the amplitude–frequency response of the sensor, was used in the investigations. The findings show that for thin microcantilevers with silicon masses on the order of 4 × 10⁻⁷ g and currents of 25 µA, thermal eigenfrequency variations are dominant. The results may have applications in the design of similar microsensors with vibrational action. Full article

Micro-nano-scale mechanical properties are vital for engineering and biological materials. The elastic modulus is generally measured by processing the force–indentation curves obtained by atomic force microscopy (AFM). However, the measurement precision is largely affected by tip shape, tip wear, sample morphology, and the contact model. In such research, it has been found that the radius of the sharp tip increases due to wear during contact scanning, affecting elastic modulus calculations. For flat-ended tips, it is difficult to identify the contact condition, leading to inaccurate results. Our research team has invented a nano-spherical tip, obtained by implanting focused helium ions into a silicon microcantilever, causing it to expand into a silicon nanosphere. This nano-spherical tip has the advantages of sub-micro size and a smooth spherical surface. Comparative tests of the elastic modulus measurement were conducted on polytetrafluoroethylene (PTFE) and polypropylene (PP) using these three tips. Overall, the experimental results show that our nano-spherical tip with a consistent tip radius, symmetrical geometric shape, and resistance to wear and contamination can improve precision in elastic modulus measurements of polymer materials. Full article

A single-fiber photoacoustic (PA) sensor with a silicon cantilever beam for trace acetylene (C₂H₂) gas analysis was proposed. The miniature gas sensor mainly consisted of a microcantilever and a non-resonant PA cell for the real-time detection of acetylene gas. The gas diffused into the photoacoustic cell through the silicon cantilever beam gap. The volume of the PA cell in the sensor was about 14 μL. By using a 1 × 2 fiber optical coupler, a 1532.8 nm distributed feedback (DFB) laser and a white light interference demodulation module were connected to the single-fiber photoacoustic sensor. A silicon cantilever was utilized to improve the performance when detecting the PA signal. To eliminate the interference of the laser-reflected light, a part of the Fabry–Perot (F-P) interference spectrum was used for phase demodulation to achieve the highly sensitive detection of acetylene gas. The minimum detection limit (MDL) achieved was 0.2 ppm with 100 s averaging time. In addition, the calculated normalized noise equivalent absorption (NNEA) coefficient was 4.4 × 10⁻⁹ W·cm⁻¹·Hz^−1/2. The single-fiber photoacoustic sensor designed has great application prospects in the early warning of transformer faults. Full article

In this work, an adaptive holographic interferometer was implemented for the measurement of a micromechanical oscillator frequency. A silicon micro-cantilever mounted on a piezoquartz plate was used as the sensing element. Out-of-plane vibrations of the cantilever were excited using a sinusoidal electrical signal. The cantilever vibrations were measured with the adaptive interferometer using two waves coupling in a semi-insulating photorefractive CdTe:V crystal. In the experiment, the mass of absorbed molecules of bovine serum albumin (BSA) was measured at various concentrations of water solution. The biosensor demonstrated the ability to measure the concentration of BSA in water solutions with a concentration of 0.2 mg/mL. The result shows the possibility of using adaptive interferometry to detect the vibration of micromechanical sensors and the potential prospects for building biosensors based on them. Full article

Most current thermal MEMS use fragile structures such as thin-film membranes or microcantilevers for thermal isolation. To increase the robustness of these devices, solid thermal insulators that are compatible with MEMS cleanroom processing are needed. This work introduces a novel approach for microscale thermal isolation using porous microstructures created with the recently developed PowderMEMS wafer-level process. MEMS devices consisting of heaters on a thin-film membrane were modified with porous microstructures made from three different materials. A thermal model for the estimation of the resulting thermal conductivity was developed, and measurements for porous structures in ambient air and under vacuum were performed. The PowderMEMS process was successfully used to create microscale thermal insulators in silicon cavities at the wafer level. Measurements indicate thermal conductivities of close to 0.1 W/mK in ambient air and close to 0.04 W/mK for porous structures under vacuum for the best-performing material. The obtained thermal conductivities are lower than those reported for both glass and porous silicon, making PowderMEMS a very interesting alternative for solid microscale thermal isolation. Full article

Terahertz imaging technology has shown great potential in many fields. As the core component of terahertz imaging systems, terahertz detectors have received extensive attention. In this paper, a metasurface-based terahertz optomechanical detector is proposed, which is made of two fabrication-friendly materials: gold and silicon nitride. The optomechanical detector is essentially a thermal detector composed of metasurface absorber, bi-material micro-cantilevers and heat insulation pillars. Compared with traditional thermal terahertz detectors, the optomechanical detector employs a metasurface absorber as the terahertz radiation coupler and obtains an absorptivity higher than 90% from 3.24 to 3.98 THz, which is much higher than that of traditional terahertz detectors with absorbers made from natural materials. Furthermore, the detector is fabricated by MEMS process and its responsivity has been verified by a specifically designed optical read-out system; the measured optomechanical responsivity is 24.8 μm/μW, which agrees well with the multi-physics simulation. These results indicated that the detector can be employed as a pixel to form a terahertz focal plane array in the future, and further realize real-time terahertz imaging at room temperature. Full article

Micro-opto-electromechanical systems (MOEMSs) are a new class of integrated and miniaturized optical systems that have significant applications in modern optics. However, the integration of micro-optical elements with complex morphologies on existing micro-electromechanical systems is difficult. Herein, we propose a femtosecond-laser-assisted dry etching technology to realize the fabrication of silicon microlenses. The size of the microlens can be controlled by the femtosecond laser pulse energy and the number of pulses. To verify the applicability of this method, multifocal microlens arrays (focal lengths of 7–9 μm) were integrated into a silicon microcantilever using this method. The proposed technology would broaden the application scope of MOEMSs in three-dimensional imaging systems. Full article

We used a spray-coating process to cover silicon microcantilevers with ca. 33 wt% [Fe(Htrz)₂(trz)](BF₄)@P(VDF₇₀-TrFE₃₀) nanocomposite thin films of 1500 nm thickness. The bilayer cantilevers were then used to investigate the thermomechanical properties of the composites through a combined static and dynamic flexural analysis. The out-of-plane flexural resonance frequencies were used to assess the Young’s modulus of the spray-coated films (3.2 GPa). Then, the quasi-static flexural bending data allowed us to extract the actuation strain (1.3%) and an actuation stress (7.7 MPa) associated with the spin transition in the composite. Full article

This paper describes the development of a biosensor designed for the enzymatic detection of short-chain alcohols. The biorecognition element, alcohol dehydrogenase, was immobilized on self-assembled monolayers deposited on top of silicon nitride microcantilevers. The self-assembly process was performed by surface activation using 3-aminopropyltriethoxysilane, followed by glutaraldehyde and biomolecule binding. X-ray photoelectron spectroscopy and atomic force microscopy were used. The biosensor showed a lower response time and sensibility from 0.03 to 1.2 mL/L. Its selectivity was analyzed through exposure to pure and mixed volatile solvents. Sensor sensibility was higher in the presence of short-chain alcohols and practically null involving other polar or nonpolar solvents. Full article

In this paper, a polyimide (PI)/Si/SiO₂-based piezoresistive microcantilever biosensor was developed to achieve a trace level detection for aflatoxin B1. To take advantage of both the high piezoresistance coefficient of single-crystal silicon and the small spring constant of PI, the flexible piezoresistive microcantilever was designed using the buried oxide (BOX) layer of a silicon-on-insulator (SOI) wafer as a bottom passivation layer, the topmost single-crystal silicon layer as a piezoresistor layer, and a thin PI film as a top passivation layer. To obtain higher sensitivity and output voltage stability, four identical piezoresistors, two of which were located in the substrate and two integrated in the microcantilevers, were composed of a quarter-bridge configuration wheatstone bridge. The fabricated PI/Si/SiO₂ microcantilever showed good mechanical properties with a spring constant of 21.31 nN/μm and a deflection sensitivity of 3.54 × 10⁻⁷ nm⁻¹. The microcantilever biosensor also showed a stable voltage output in the Phosphate Buffered Saline (PBS) buffer with a fluctuation less than 1 μV @ 3 V. By functionalizing anti-aflatoxin B1 on the sensing piezoresistive microcantilever with a biotin avidin system (BAS), a linear aflatoxin B1 detection concentration resulting from 1 ng/mL to 100 ng/mL was obtained, and the toxic molecule detection also showed good specificity. The experimental results indicate that the PI/Si/SiO₂ flexible piezoresistive microcantilever biosensor has excellent abilities in trace-level and specific detections of aflatoxin B1 and other biomolecules. Full article

This paper introduces a piezoresistive microcantilever with a low spring constant. The microcantilever was fabricated with titanium (Ti) as the piezoresistor, a low spring constant polyimide (PI) layer, and a thin silicon oxide (SiO₂) layer as the top and bottom passive layers, respectively. Excellent mechanical performances with the spring constant of 0.02128 N/m and the deflection sensitivity $(∆\mathrm{V}/\mathrm{V})/∆z$ of 1.03 × 10⁻⁷ nm⁻¹ were obtained. The output voltage fluctuation of a Wheatstone bridge, which consists of four piezoresistive microcantilevers, is less than 3 μV@3 V in a phosphate buffered saline (PBS) environment. A microcantilever aptasensor was then developed through functionalizing the microcantilevers with a ricin aptamer probe, and detections on ricin with concentrations of 10, 20, 50 and 100 ng/mL were successfully realized. A good specificity was also confirmed by using bovine serum albumin (BSA) as a blank control. The experiment results show that the Ti and PI-based microcantilever has great prospects for ultrasensitive biochemical molecule detections with high reliability and specificity. Full article

Liquid-borne particles sampling and cantilever-based mass detection are widely applied in many industrial and scientific fields e.g., in the detection of physical, chemical, and biological particles, and disease diagnostics, etc. Microscopic analysis of particles-adsorbed cantilever-samples can provide a good basis for measurement comparison. However, when a particles-laden droplet on a solid surface is vaporized, a cluster-ring deposit is often yielded which makes particles counting difficult or impractical. Nevertheless, in this study, we present an approach, i.e., on-cantilever particles imprinting, which effectively defies such odds to sample and deposit countable single particles on a sensing surface. Initially, we designed and fabricated a triangular microcantilever sensor whose mass m₀, total beam-length L, and clamped-end beam-width w are equivalent to that of a rectangular/normal cantilever but with a higher resonant frequency (271 kHz), enhanced sensitivity (0.13 Hz/pg), and quality factor (~3000). To imprint particles on these cantilever sensors, various calibrated stainless steel dispensing tips were utilized to pioneer this study by dipping and retracting each tip from a small particle-laden droplet (resting on a hydrophobic n-type silicon substrate), followed by tip-sensor-contact (at a target point on the sensing area) to detach the solution (from the tip) and adsorb the particles, and ultimately determine the particles mass concentration. Upon imprinting/adsorbing the particles on the sensor, resonant frequency response measurements were made to determine the mass (or number of particles). A minimum detectable mass of ~0.05 pg was demonstrated. To further validate and compare such results, cantilever samples (containing adsorbed particles) were imaged by scanning electron microscopy (SEM) to determine the number of particles through counting (from which, the lowest count of about 11 magnetic polystyrene particles was obtained). The practicality of particle counting was essentially due to monolayer particle arrangement on the sensing surface. Moreover, in this work, the main measurement process influences are also explicitly examined. Full article

Microcantilevers are really promising sensitive sensors despite their small surface. In order to increase this surface and consequently their sensitivity, we nanostructured them with copper oxide (CuO) nanorods. The synthesis of the nanostructure consists of the oxidation of a copper layer deposited beforehand on the surface of the sample. The oxidation is performed in an alkaline solution containing a mixture of Na(OH) and (NH₄)₂S₂O₈. The synthesis procedure was first optimized on a silicon wafer, then transferred to optical cantilever-based sensors. This transfer requires specific synthesis modifications in order to cover all the cantilever with nanorods. A masking procedure was specially developed and the copper layer deposition was also optimized. These nanostructured cantilevers were engineered in order to detect vapors of organophosphorous chemical warfare agents (CWA). The nanostructured microcantilevers were exposed to various concentration of dimethyl methylphosphonate (DMMP) which is a well-known simulant of sarin (GB). The detection measurements showed that copper oxide is able to detect DMMP via hydrogen interactions. The results showed also that the increase of the microcantilever surface with the nanostructures improves the sensors efficiency. The evolution of the detection performances of the CuO nanostructured cantilevers with the DMMP concentration was also evaluated. Full article

The high sensitivity of silicon microcantilever sensors has expanded their use in areas ranging from gas sensing to bio-medical applications. Photochromic molecules also represent promising candidates for a large variety of sensing applications. In this work, the operating principles of these two sensing methods are combined in order to detect the reversible conformational change of a molecular switch, spiropyran. Thus, arrays of silicon microcantilever sensors were functionalized with spiropyran on the gold covered side and used as test microcantilevers. The microcantilever deflection response was observed, in five sequential cycles, as the transition from the spiropyran (SP) (CLOSED) to the merocyanine (MC) (OPEN) state and vice-versa when induced by UV and white light LED sources, respectively, proving the reversibility capabilities of this type of sensor. The microcantilever deflection direction was observed to be in one direction when changing to the MC state and in the opposite direction when changing back to the SP state. A tensile stress was induced in the microcantilever when the SP to MC transition took place, while a compressive stress was observed for the reverse transition. These different type of stresses are believed to be related to the spatial conformational changes induced in the photochromic molecule upon photo-isomerisation. Full article