Search Results (11)

This work presents the design, fabrication, and characterization of a three-dimensional FeCo-based flux-modulator microwinding intended for integration into high-torque axial-flux Vernier micromotors. The proposed micromotor architecture modulates the stator magnetic flux using 12 magnetically isolated FeCo teeth interacting with an 11-pole permanent-magnet rotor. The design requires the manufacturing of complex three-dimensional micrometric parts, including three teeth and a cylindrical core. Such a complex design cannot be manufactured using conventional micromanufacturing lithography or 2D planar methods. The flux-modulator envelope dimensions are 250 μm outer diameter and 355 μm height. It is manufactured using a femtosecond laser-machining process that preserves factory-finished surfaces and minimizes heat-affected zones. In addition, this micrometric part has been wound using 20 μm diameter enamelled copper wire. A dedicated magnetic clamping fixture is developed to enable multilayer microwinding of the integrated core, producing a 17-turn inductor with a 60.6% fill factor—the highest reported for a manually wound ferromagnetic-core microcoil of this scale. Geometric and magnetic characterization validates the simulation model and demonstrates the field distribution inside the isolated core. The results establish a viable micromanufacturing workflow for complex 3D FeCo microwindings, supporting the development of next-generation high-performance MEMS micromotors. Full article

A comprehensive framework for designing a micro-nuclear magnetic resonance (NMR) front-end is presented. Key radio frequency (RF) engineering principles are established to enable efficient excitation and detection of NMR signals. This foundation aims to guide the optimal design of novel handheld NMR devices operating with magnetic fields ($B_0$) below 0.5 Tesla and RF frequencies under 30 MHz. To address the complexities of signal-to-noise ratio optimization in this regime, a specialized metric called the coil performance factor (CPF) is introduced, emphasizing the role of coil design. Through systematic optimization under realistic constraints, an optimal coil configuration maximizing the CPF is identified. This design, with three turns, a coil width of 0.22 mm, and a coil spacing of 0.15 mm, achieves an optimal balance between magnetic field strength, homogeneity, and noise. This work serves as a valuable resource for engineers developing optimized coil designs and RF solutions for handheld NMR devices, providing clear explanations of essential concepts and a practical design methodology. Full article

Rapid detection of a biological agent is essential to anticipate a threat to the protection of biodiversity and ecosystems. Our goal is to miniaturize a magnetic pathogen detection system in order to fabricate an efficient and portable system. The detection device is based on flat, multilayer coils associated with microfluidic structures to detect magnetic nanoparticles linked to pathogen agents. One type of immunological diagnosis is based on the measurement of the magnetic sensitivity of magnetic nanoparticles (MNPs), which are markers connected to pathogens. This method of analysis involves the coupling of antibodies or antigen proteins with MNPs. Among the available magnetic techniques, the frequency mixing method has a definite advantage by making it possible to quantify MNPs. An external magnetic field composed of a low- and a high-frequency field is applied to the sample reservoir. Then, the response signal is measured and analyzed. In this paper, magnetic microcoils are implemented on a multilayer Printed Circuit Board (PCB), and a microfluidics microstructure is designed in connection with the planar coils. Simulation software, COMSOL version 5.3, provides an analytical perspective to choose the number of turns in magnetic coils and to understand the effects of changing the shape and dimensions of the microfluidics microstructure. Full article

Magnetic microgrippers, with their miniaturized size, flexible movement, untethered actuation, and programmable deformation, can perform tasks such as cell manipulation, targeted drug delivery, biopsy, and minimally invasive surgery in hard-to-reach regions. However, common external magnetic-field-driving devices suffer from low efficiency and utilization due to the significant size disparity with magnetic microgrippers. Here, we introduce a microgripper robot (MGR) driven by end electromagnetic and permanent magnet collaboration. The magnetic field generated by the microcoils can be amplified by the permanent magnets and the direction can be controlled by changing the current, allowing for precise control over the opening and closing of the magnetic microgripper and enhancing its operational range. Experimental results demonstrate that the MGR can be flexibly controlled in complex constrained environments and is highly adaptable for manipulating objects. Furthermore, the MGR can achieve planar and antigravity object grasping and transportation within complex simulated human cavity pathways. The MGR’s grasping capabilities can also be extended to specialized tasks, such as circuit connection in confined spaces. The MGR combines the required safety and controllability for in vivo operations, making it suitable for potential clinical applications such as tumor or abnormal tissue sampling and surgical assistance. Full article

The design, analysis, and simulation of a new Micro-electromechanical System (MEMS) gyroscope based on differential tunneling magnetoresistance sensing are presented in this paper. The device is driven by electrostatic force, whereas the Coriolis displacements are transferred to intensity variations of magnetic fields, further detected by the Tunneling Magnetoresistance units. The magnetic fields are generated by a pair of two-layer planar multi-turn copper coils that are coated on the backs of the inner masses. Together with the dual-mass structure of proposed tuning fork gyroscope, a two-stage differential detection is formed, thereby enabling rejection of mechanical and magnetic common-mode errors concurrently. The overall conception is described followed by detailed analyses of proposed micro-gyroscope and rectangle coil. Subsequently, the FEM simulations are implemented to determine the mechanical and magnetic characteristics of the device separately. The results demonstrate that the micro-gyroscope has a mechanical sensitivity of 1.754 nm/°/s, and the micro-coil has a maximum sensitivity of 41.38 mOe/µm. When the detection height of Tunneling Magnetoresistance unit is set as 60 µm, the proposed device exhibits a voltage-angular velocity sensitivity of 0.131 mV/°/s with a noise floor of 7.713 × 10⁻⁶°/s/$\sqrt{\mathrm{Hz}}$ in the absence of any external amplification. Full article

In this study, a microfluidic chip with integrated coil was designed and fabricated for the aim of effectively trapping magnetic nanobeads (Adembeads^®, 300 nm) and measuring the chip’s temperature during the working time. In addition, a reversible technique of bonding Polydimethylsiloxane (PDMS) channels was presented. This bonding process used a coating layer of CYTOP^®product as a protection, insulation and low-adhesion layer. The reversible packaging technique allows the bottom substrate to be reused, possibly equipped with sensors, and to use a disposable microchannels network. The FE method was employed to calculate the magnetic field and power consumption by the ANSYS^® version 12.1 software. Merit factors were defined in order to synthetically represent the ability of the simulated coil to trap beads for a unit power consumption, i.e. a given heat generation. The simulation results propose a new approach to optimize the design criteria in fabricating planar microcoils. The optimal microcoils were fabricated and then used to realize a magnetic immunoassay in a microfluidic chip. The aim was to integrate these microcoils into a lab-on-chip and obtain a fast and highly sensitive biological element detection. Full article

This paper reports the design, simulation and experimental study of a linear magnetic microactuator for portable electronic equipment and microsatellite high resolution remote sensing technology. The linear magnetic microactuator consists of a planar microcoil, a supporter and a microspring. Its bistable mechanism can be kept without current by external permanent magnetic force, and can be switched by the bidirectional electromagnetic force. The linearization and threshold of the bistable mechanism was optimized by topology structure design of the microspring. The linear microactuator was then fabricated based on non-silicon technology and the prototype was tested. The testing results indicated that the bistable mechanism was realized with a fast response of 0.96 ms, which verified the simulation and analysis. Full article

The aim of this work is to develop a completely integrated Lab-On-Chip (LOC) for easy, rapid and cost-effective immunoassays. The pathogen sensing system is composed of a microfluidic channel surrounded by planar microcoils which are responsible for the emission and the detection of magnetic fields. The system allows the detection and quantification of superparamagnetic beads used for immunoassays in a “sandwich” antigen-antibody configuration. Multiphysics simulations have been achieved and preliminary experimental results have allowed to validate the structure. Full article

The fabrication of electroplated planar copper microcoils for telemetric orthodontic applications is presented. A set of microcoils with overall dimensions of 2 × 2.5 × 0.5 mm³, track widths down to 5 μm and turn numbers up to 35 were fabricated on glass substrates. The coils were electrically characterized and assembled via flip-chip bonding onto a stress-mapping CMOS chip for smart orthodontic brackets. The passive system was successfully read out telemetrically with a reader microcoil for a coil-coil distance of 1 mm at 13.56 MHz. The digital signal representing the measured stress values was extracted telemetrically using a commercially available RFID reader. Full article

In this paper, we describe the fabrication of miniaturized flexible Radio frequency RF microcoil for Nuclear Magnetic Resonance (NMR), which have been constructed based on Micro Electro Mechanical Systems (MEMS) technology. 3D Electromagnetic numerical simulations of the physical properties of this microcoil were conducted using Multiphysics software. Numerical simulation shows that the rectangular microantenna (500 × 1000 μm²) on kapton substrate has efficient results in terms of magnetic field, inductance, magnetic energy and resistive losses. This micro-coil is fabricated with three mask levels on polyimide substrate using micromoulding technology. Full article

We present a comprehensive experimental investigation of a micromachined inductive suspension (MIS) based on 3D wire-bonded microcoils. A theoretical model has been developed to predict the levitation height of the disc-shaped proof mass (PM), which has good agreement with the experimental results. The 3D MIS consists of two coaxial wire-bonded coils, the inner coil being used for levitation, while the outer coil for the stabilization of the PM. The levitation behavior is mapped with respect to the input parameters of the excitation currents applied to the levitation and stabilization coil, respectively: amplitude and frequency. At the same time, the levitation is investigated with respect to various thickness values (12.5 to 50 μm) and two materials (Al and Cu) of the proof mass. An important characteristic of an MIS, which determines its suitability for various applications, such as, e.g., micro-motors, is the dynamics in the lateral direction. We experimentally study the lateral stabilization force acting on the PM as a function of the linear displacement. The analysis of this dependency allows us to define a transition between stable and unstable levitation behavior. From an energetic point of view, this transition corresponds to the local maximum of the MIS potential energy. 2D simulations of the potential energy help us predict the location of this maximum, which is proven to be in good agreement with the experiment. Additionally, we map the temperature distribution for the coils, as well as for the PM levitated at 120 μm, which confirms the significant reduction of the heat dissipation in the MIS based on 3D microcoils compared to the planar topology. Full article