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Micromachines
Volume 17
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10.3390/mi17010115
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This is an early access version, the complete PDF, HTML, and XML versions will be available soon.
Article

Micromanufacturing Process of Complex 3D FeCo Core Microwindings for Magnetic Flux Modulation in Micromotors

by
Efren Diez-Jimenez
1,*,
Diego Lopez-Pascual
2,
Gabriel Villalba-Alumbreros
1,
Ignacio Valiente-Blanco
1,
Miguel Fernandez-Munoz
1,
Jesús del Olmo-Anguix
1,
Oscar Manzano-Narro
1,
Alexander Kanitz
3,
Jan Hoppius
3 and
Jan Philipp
3
1
Mechanical Engineering Area, Universidad de Alcalá, 28801 Alcalá de Henares, Spain
2
Electrical Engineering Area, Universidad de Alcalá, 28801 Alcalá de Henares, Spain
3
Lidrotec GmbH, Universitätsstraße 150, 44801 Bochum, Germany
*
Author to whom correspondence should be addressed.
Micromachines 2026, 17(1), 115; https://doi.org/10.3390/mi17010115 (registering DOI)
Submission received: 5 December 2025 / Revised: 9 January 2026 / Accepted: 13 January 2026 / Published: 15 January 2026
(This article belongs to the Section E：Engineering and Technology)
Versions Notes

Abstract

This work presents the design, fabrication, and characterization of a three-dimensional FeCo-based flux-modulator microwinding intended for integration into high-torque axial-flux Vernier micromotors. The proposed micromotor architecture modulates the stator magnetic flux using 12 magnetically isolated FeCo teeth interacting with an 11-pole permanent-magnet rotor. The design requires the manufacturing of complex three-dimensional micrometric parts, including three teeth and a cylindrical core. Such a complex design cannot be manufactured using conventional micromanufacturing lithography or 2D planar methods. The flux-modulator envelope dimensions are 250 μm outer diameter and 355 μm height. It is manufactured using a femtosecond laser-machining process that preserves factory-finished surfaces and minimizes heat-affected zones. In addition, this micrometric part has been wound using 20 μm diameter enamelled copper wire. A dedicated magnetic clamping fixture is developed to enable multilayer microwinding of the integrated core, producing a 17-turn inductor with a 60.6% fill factor—the highest reported for a manually wound ferromagnetic-core microcoil of this scale. Geometric and magnetic characterization validates the simulation model and demonstrates the field distribution inside the isolated core. The results establish a viable micromanufacturing workflow for complex 3D FeCo microwindings, supporting the development of next-generation high-performance MEMS micromotors.
Keywords: MEMS; microcoils; micromanufacturing; laser micromachining MEMS; microcoils; micromanufacturing; laser micromachining

Share and Cite

MDPI and ACS Style

Diez-Jimenez, E.; Lopez-Pascual, D.; Villalba-Alumbreros, G.; Valiente-Blanco, I.; Fernandez-Munoz, M.; del Olmo-Anguix, J.; Manzano-Narro, O.; Kanitz, A.; Hoppius, J.; Philipp, J. Micromanufacturing Process of Complex 3D FeCo Core Microwindings for Magnetic Flux Modulation in Micromotors. Micromachines 2026, 17, 115. https://doi.org/10.3390/mi17010115

AMA Style

Diez-Jimenez E, Lopez-Pascual D, Villalba-Alumbreros G, Valiente-Blanco I, Fernandez-Munoz M, del Olmo-Anguix J, Manzano-Narro O, Kanitz A, Hoppius J, Philipp J. Micromanufacturing Process of Complex 3D FeCo Core Microwindings for Magnetic Flux Modulation in Micromotors. Micromachines. 2026; 17(1):115. https://doi.org/10.3390/mi17010115

Chicago/Turabian Style

Diez-Jimenez, Efren, Diego Lopez-Pascual, Gabriel Villalba-Alumbreros, Ignacio Valiente-Blanco, Miguel Fernandez-Munoz, Jesús del Olmo-Anguix, Oscar Manzano-Narro, Alexander Kanitz, Jan Hoppius, and Jan Philipp. 2026. "Micromanufacturing Process of Complex 3D FeCo Core Microwindings for Magnetic Flux Modulation in Micromotors" Micromachines 17, no. 1: 115. https://doi.org/10.3390/mi17010115

APA Style

Diez-Jimenez, E., Lopez-Pascual, D., Villalba-Alumbreros, G., Valiente-Blanco, I., Fernandez-Munoz, M., del Olmo-Anguix, J., Manzano-Narro, O., Kanitz, A., Hoppius, J., & Philipp, J. (2026). Micromanufacturing Process of Complex 3D FeCo Core Microwindings for Magnetic Flux Modulation in Micromotors. Micromachines, 17(1), 115. https://doi.org/10.3390/mi17010115

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