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Proceedings 2017, 1(4), 625;

Realization of Flexible NMR Microcoils

Laboratoire d’Acoustique (LAUM), Université du Maine, UMR CNRS 6613, 72085 Le Mans, France
NANOMISENE Laboratory LR16CRMN01, Center for Research on Microelectronics and Nanotechnology of Sousse (CRMN), BP 334 Sousse, Tunisia
Institute of Analytical Sciences (ISA)—UMR CNRS 5280, INSA Lyon, 69100 Villeurbanne, France
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
Author to whom correspondence should be addressed.
Published: 7 August 2017
(This article belongs to the Proceedings of Eurosensors 2017)
PDF [1171 KB, uploaded 4 September 2017]


In this paper, we describe the fabrication of miniaturized flexible Radio frequency RF microcoil for Nuclear Magnetic Resonance (NMR), which have been constructed based on Micro Electro Mechanical Systems (MEMS) technology. 3D Electromagnetic numerical simulations of the physical properties of this microcoil were conducted using Multiphysics software. Numerical simulation shows that the rectangular microantenna (500 × 1000 μm2) on kapton substrate has efficient results in terms of magnetic field, inductance, magnetic energy and resistive losses. This micro-coil is fabricated with three mask levels on polyimide substrate using micromoulding technology.
Keywords: flexible substrates; RF planar microcoil; Nuclear magnetic resonance; micromoulding flexible substrates; RF planar microcoil; Nuclear magnetic resonance; micromoulding
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Khelifa, M.; Yaakoubi, N.; Dridi, C.; Picart, P.; Fakri-Bouchet, L. Realization of Flexible NMR Microcoils. Proceedings 2017, 1, 625.

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