Next Article in Journal
Fabrication and Characterization of PZT Fibered-Epitaxial Thin Film on Si for Piezoelectric Micromachined Ultrasound Transducer
Next Article in Special Issue
Miniaturized NIR Spectrometer Based on Novel MOEMS Scanning Tilted Grating
Previous Article in Journal
Characterization and Integration of Terahertz Technology within Microfluidic Platforms
Previous Article in Special Issue
Frequency Characteristic of Resonant Micro Fluidic Chip for Oil Detection Based on Resistance Parameter
Article Menu
Issue 9 (September) cover image

Export Article

Open AccessArticle
Micromachines 2018, 9(9), 454;

Design, Simulation and Experimental Study of the Linear Magnetic Microactuator

College of Mechanical Engineering, Shanghai University of Engineering Science, Shanghai 201620, China
National Key Laboratory of Science and Technology on Micro/Nano Fabrication, School of Electronics Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
Author to whom correspondence should be addressed.
Received: 3 August 2018 / Revised: 28 August 2018 / Accepted: 6 September 2018 / Published: 11 September 2018
(This article belongs to the Special Issue MEMS/NEMS Sensors: Fabrication and Application)
Full-Text   |   PDF [3367 KB, uploaded 11 September 2018]   |  


This paper reports the design, simulation and experimental study of a linear magnetic microactuator for portable electronic equipment and microsatellite high resolution remote sensing technology. The linear magnetic microactuator consists of a planar microcoil, a supporter and a microspring. Its bistable mechanism can be kept without current by external permanent magnetic force, and can be switched by the bidirectional electromagnetic force. The linearization and threshold of the bistable mechanism was optimized by topology structure design of the microspring. The linear microactuator was then fabricated based on non-silicon technology and the prototype was tested. The testing results indicated that the bistable mechanism was realized with a fast response of 0.96 ms, which verified the simulation and analysis. View Full-Text
Keywords: MEMS; microactuator; magnetic MEMS; microactuator; magnetic

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

Share & Cite This Article

MDPI and ACS Style

Feng, H.; Miao, X.; Yang, Z. Design, Simulation and Experimental Study of the Linear Magnetic Microactuator. Micromachines 2018, 9, 454.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics



[Return to top]
Micromachines EISSN 2072-666X Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top