Design, Simulation and Experimental Study of the Linear Magnetic Microactuator
Abstract
:1. Introduction
2. Structural Design of the Linear Magnetic Microactuator
3. Topology Design and Simulation of the Microspring
4. Simulation of the Bistable Mechanism of the Microactuator
5. Fabrication and Testing of the Bistable Microactuator
6. Conclusions
Author Contributions
Acknowledgments
Conflicts of Interest
References
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Part | Material | Value |
---|---|---|
Central Platform | Permalloy | 1 mm × 1 mm × 15 µm |
Planar Microcoil | Copper | 2.5 mm |
Microspring | Nickel | 3 mm × 3 mm × 12 µm |
Yoke | Permalloy | 2.8 mm × 2.8 mm × 50 µm |
Substrate | Ferrite | 2.8 mm × 2.8 mm × 200 µm |
Supporter | Nickel | 1.2 mm × 0.2 mm × 160 µm |
p1 = −1.551 × e−10 | p2 = 8.225 × e−8 |
p3 = −1.691 × e−5 | p4 = 0.0017 |
p5 = −0.08869 | p6 = 3.003 |
Type | Threshold Area |
---|---|
Da | 40.2 |
Db | 23.45 |
Dc | 22.74 |
Dd | 53.48 |
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Feng, H.; Miao, X.; Yang, Z. Design, Simulation and Experimental Study of the Linear Magnetic Microactuator. Micromachines 2018, 9, 454. https://doi.org/10.3390/mi9090454
Feng H, Miao X, Yang Z. Design, Simulation and Experimental Study of the Linear Magnetic Microactuator. Micromachines. 2018; 9(9):454. https://doi.org/10.3390/mi9090454
Chicago/Turabian StyleFeng, Hanlin, Xiaodan Miao, and Zhuoqing Yang. 2018. "Design, Simulation and Experimental Study of the Linear Magnetic Microactuator" Micromachines 9, no. 9: 454. https://doi.org/10.3390/mi9090454