Search Results (16)

On-chip optical accelerometers can be a promising alternative to capacitive, piezo-resistive, and piezo-electric accelerometers in some applications due to their immunity to electromagnetic interference and high sensitivity, which allow for robust operation in electromagnetically noisy environments. This paper focuses on the characterization of an easy-to-fabricate tri-axial fiber-free optical MEMS accelerometer, which employs a simple assembly consisting of a light emitting diode (LED), a quadrant photodetector (QPD), and a suspended proof mass, measuring acceleration through light power modulation. This configuration enables simple readout circuitry without the need for complex digital signal processing (DSP). Performance modeling was conducted to simulate the LED’s irradiance profile and its interaction with the proof mass and QPD. Additionally, experimental tests were performed to measure the device’s mechanical sensitivity and validate the mechanical model. Lateral mechanical sensitivity is obtained with acceptable discrepancy from that obtained from FEA simulations. This work consolidates the performance of the design adapted and demonstrates the accelerometer’s feasibility for practical applications. Full article

This study presents the results of an experimental investigation conducted on a 2:3 scale model of a two-story stone masonry building. We tested the model on the UniKORE L.E.D.A. lab shake table, simulating the Mw 6.3 earthquake ground motion that struck L’Aquila, Italy, on 6 April 2009, with progressively increasing peak acceleration levels. We installed a network of accelerometric sensors on the model to capture its structural behaviour under seismic excitation. Medium-to lower-cost MEMS accelerometers (classes A and B) were compared with traditional piezoelectric sensors commonly used in Structural Health Monitoring (SHM). The experiment assessed the structural performance and damage progression of masonry buildings subjected to realistic earthquake inputs. Additionally, the collected data provided valuable insights into the effectiveness of different sensor types and configurations in detecting key vibrational and failure patterns. All the sensors were able to accurately measure the dynamic response during seismic excitation. However, not all of them were suitable for Operational Modal Analysis (OMA) in noisy environments, where their self-noise represents a crucial factor. This suggests that the self-noise of MEMS accelerometers must be less than 1 µg/√Hz, or preferably below 0.5 µg/√Hz, to obtain good results from the OMA. Therefore, we recommend ultra-low-noise sensors for detecting differences in the structural behaviour before and after seismic events. Our findings provide valuable insights into the seismic vulnerability of masonry structures and the effectiveness of sensors in detecting damage. The management of buildings in earthquake-prone areas can benefit from these specifications. Full article

In recent years, there has been an increasing use of digital vibration sensors that are based on capacitive MEMS accelerometers for machine vibration monitoring and diagnostics. These sensors simplify the design of monitoring and diagnostic systems, thus reducing implementation costs. However, it is important to understand how effective these digital sensors are in detecting rolling bearing faults. This article describes a method for determining the diagnostic sensitivity of diagnostic parameters provided by commercially available vibration sensors based on MEMS accelerometers. Experimental tests were conducted in laboratory conditions, during which vibrations from 11 healthy and faulty rolling bearings were measured using two commercial vibration sensors based on MEMS accelerometers and a piezoelectric accelerometer as a reference sensor. The results showed that the diagnostic sensitivity of the parameters depends on the upper-frequency band limit of the sensors, and the parameters most sensitive to the typical fatigue faults of rolling bearings are the peak and peak-to-peak amplitudes of vibration acceleration. Despite having a lower upper-frequency range compared to the piezoelectric accelerometer, the commercial vibration sensors were found to be sensitive to rolling bearing faults and can be successfully used in continuous monitoring and diagnostics systems for machines. Full article

Piezoelectric accelerometers have been widely used because of their large range, simple structure, stable performance, and other advantages. With the improvement of science and technology, the application field is expanding, but there are still some problems in high-temperature environments and low-frequency vibration conditions. Under high-temperature environments, the piezoelectric material will undergo depolarization or resistance change, resulting in sensor failure. Aerospace instruments, water conservancy platforms, and other fields require high-precision instruments with vibration amplitudes of the order of a few microns in the range of 0.01–1 Hz, which require low-frequency and ultra-low-frequency sensors for the measurements. Therefore, how to increase the operating temperature and reduce the noise of piezoelectric accelerometers has become a problem that needs to be solved. This paper reviews the structure, principle, application range, and material selection of piezoelectric components of different types of piezoelectric accelerometers and summarizes the current problems and future research priorities. Full article

In response to the growing demand for high-sensitivity accelerometers in vector hydrophones, a piezoelectric MEMS accelerometer (PMA) was proposed, which has a four-cantilever beam integrated inertial mass unit structure, with the advantages of being lightweight and highly sensitive. A theoretical energy harvesting model was established for the piezoelectric cantilever beam, and the geometric dimensions and structure of the microdevice were optimized to meet the vibration pickup conditions. The sol-gel and annealing technology was employed to prepare high-quality PZT thin films on silicon substrate, and accelerometer microdevices were manufactured by using MEMS technology. Furthermore, the MEMS accelerometer was packaged for testing on a vibration measuring platform. Test results show that the PMA has a resonant frequency of 2300 Hz. In addition, there is a good linear relationship between the input acceleration and the output voltage, with V = 8.412a − 0.212. The PMA not only has high sensitivity, but also has outstanding anti-interference ability. The accelerometer structure was integrated into a vector hydrophone for testing in a calibration system. The results show that the piezoelectric vector hydrophone (PVH) has a sensitivity of –178.99 dB@1000 Hz (0 dB = 1 V/μPa) and a bandwidth of 20~1100 Hz. Meanwhile, it exhibits a good “8” shape directivity and consistency of each channel. These results demonstrate that the piezoelectric MEMS accelerometer has excellent capabilities suitable for use in vector hydrophones. Full article

In this paper, a high-sensitivity microelectromechanical system (MEMS) piezoelectric accelerometer based on a Scandium-doped Aluminum Nitride (ScAlN) thin film is proposed. The primary structure of this accelerometer is a silicon proof mass fixed by four piezoelectric cantilever beams. In order to enhance the sensitivity of the accelerometer, the Sc_0.2Al_0.8N piezoelectric film is used in the device. The transverse piezoelectric coefficient d₃₁ of the Sc_0.2Al_0.8N piezoelectric film is measured by the cantilever beam method and found to be −4.7661 pC/N, which is approximately two to three times greater than that of a pure AlN film. To further enhance the sensitivity of the accelerometer, the top electrodes are divided into inner and outer electrodes; then, the four piezoelectric cantilever beams can achieve a series connection by these inner and outer electrodes. Subsequently, theoretical and finite element models are established to analyze the effectiveness of the above structure. After fabricating the device, the measurement results demonstrate that the resonant frequency of the device is 7.24 kHz and the operating frequency is 56 Hz to 2360 Hz. At a frequency of 480 Hz, the sensitivity, minimum detectable acceleration, and resolution of the device are 2.448 mV/g, 1 mg, and 1 mg, respectively. The linearity of the accelerometer is good for accelerations less than 2 g. The proposed piezoelectric MEMS accelerometer has demonstrated high sensitivity and linearity, making it suitable for accurately detecting low-frequency vibrations. Full article

Active and passive vibration control systems are of paramount importance in many engineering applications. If an external load excites a structure’s resonance and the damping is too low, detrimental events, such as crack initiation, growth and, in the worst case, fatigue failure, can be entailed. Damping systems can be commonly found in applications such as industrial machines, vehicles, buildings, turbomachinery blades, and so forth. Active control systems usually achieve higher damping effectiveness than passive ones, but they need a sensor to detect the working conditions that require damping system activation. Recently, the development of such systems in rotating structures has received considerable interest among designers. As a result, the development of vibration monitoring equipment in rotating structures is also a topic of particular interest. In this respect, a reliable, inexpensive and wireless monitoring system is of utmost importance. Typically, optical systems are used to measure vibrations, but they are expensive and require rather complex processing algorithms. In this paper, a wireless system based on a commercial MEMS accelerometer is developed for rotating blade vibration monitoring. The proposed system measurement accuracy was assessed by means of comparison with a reference wired measurement setup based on a mini integrated circuit piezoelectric (ICP) accelerometer adapted for data acquisition in a rotating frame. Both the accelerometers were mounted on the tip of the blade and, in order to test the structure under different conditions, the first four blade resonances were excited by means of piezoelectric actuators, embedded in a novel experimental setup. The frequency and amplitude of acceleration, simultaneously measured by the reference and MEMS sensors, were compared with each other in order to investigate the viability and accuracy of the proposed wireless monitoring system. The rotor angular speed was varied from 0 to 300 rpm, and the data acquisitions were repeated six times for each considered condition. The outcomes reveal that the wireless measurement system may be successfully used for vibration monitoring in rotating blades. Full article

This work proposes a miniaturized piezoelectric MEMS accelerometer based on polygonal topology with an area of only 868 × 833 μm². The device consists of six trapezoidal cantilever beams with shorter fixed sides. Meanwhile, a device with larger fixed sides is also designed for comparison. The theoretical and finite element models are established to analyze the effect of the beam′s effective stiffness on the output voltage and natural frequency. As the stiffness of the device decreases, the natural frequency of the device decreases while the output signal increases. The proposed polygonal topology with shorter fixed sides has higher voltage sensitivity than the larger fixed one based on finite element simulations. The piezoelectric accelerometers are fabricated using Cavity-SOI substrates with a core piezoelectric film of aluminum nitride (AlN) of about 928 nm. The fabricated piezoelectric MEMS accelerometers have good linearity (0.99996) at accelerations less than 2 g. The measured natural frequency of the accelerometer with shorter fixed sides is 98 kHz, and the sensitivity, resolution, and minimum detectable signal at 400 Hz are 1.553 mV/g, 1 mg, and 2 mg, respectively. Compared with the traditional trapezoidal cantilever with the same diaphragm area, its output voltage sensitivity is increased by 22.48%. Full article

This paper presents the design, development and testing of a low-cost Structural Health Monitoring (SHM) system based on MEMS (Micro Electro-Mechanical Systems) triaxial accelerometers. A new control system composed by a myRIO platform, managed by specific LabVIEW software, has been developed. The LabVIEW software also computes the frequency response functions for the subsequent modal analysis. The proposed SHM system was validated by comparing the data measured by this set-up with a conventional SHM system based on piezoelectric accelerometers. After carrying out some validation tests, a high correlation can be appreciated in the behavior of both systems, being possible to conclude that the proposed system is sufficiently accurate and sensitive for operative purposes, apart from being significantly more affordable than the traditional one. Full article

Microelectromechanical (MEMS) piezoelectric accelerometers are diversely used in consumer electronics and handheld devices due to their low power consumption as well as simple reading circuit and good dynamic performance. In this paper, a tri-axial piezoelectric accelerometer with folded beams is presented. The four beam suspensions are located at two sides of the mass aligned with edges of the mass, and the thickness of the beams is the same as the thickness of the mass block. In order to realize the multi-axis detection, a total of 16 sensing elements are distributed at the end of the folded beams. The structural deformations, stress distribution, and output characteristics due to the acceleration in x-, y-, and z-axis directions are theoretically analyzed and simulated. The proposed accelerometer is fabricated by MEMS processes to form Mo/AlN/ScAlN/Mo piezoelectric stacks as the sensing layer. Experiments show that the charge sensitivity along the x-, y-, and z-axes could reach up to ~1.07 pC/g, ~0.66 pC/g, and ~3.35 pC/g. The new structure can provide inspiration for the design of tri-axial piezoelectric accelerometers with great sensitivity and linearity. Full article

In this paper, we report a novel aluminum nitride (AlN) thin-film piezoelectric resonant accelerometer. Different from the ordinary MEMS (micro-electro-mechanical systems) resonant accelerometers, the entire structure of the accelerometer, including the mass and the springs, is excited to resonate in-plane, and the resonance frequency is sensitive to the out-plane acceleration. The structure is centrosymmetrical with serpentine electrodes laid on supporting beams for driving and sensing. The stiffness of the supporting beams changes when an out-plane inertial force is applied on the structure. Therefore, the resonance frequency of the accelerometer will also change under the inertial force. The working principle is analyzed and the properties are simulated in the paper. The proposed AlN accelerometer is fabricated by the MEMS technology, and the structure is released by an ICP isotropic etching. The resonance frequency is 24.66 kHz at a static state. The quality factor is 1868. The relative sensitivity of this accelerometer, defined as the shift in the resonance frequency per gravity unit (1 g = 9.8 m/s²) is 346 ppm/g. The linearity of the accelerometer is 0.9988. The temperature coefficient of frequency (TCF) of this accelerometer is −2.628 Hz/°C (i.e., −106 ppm/°C), tested from −40 °C to 85 °C. Full article

Damage detection and structural health monitoring have always been of great importance to civil engineers and researchers. Vibration-based damage detection has several advantages compared to traditional methods of non-destructive evaluation, such as ground penetrating radar (GPR) or ultrasonic testing, since they give a global response and are feasible for large structures. Damage detection requires a comparison between two systems states, the baseline or “healthy state”, i.e., the initial modal parameters, and the damaged state. In this study, system identification (SI) was carried out on a pedestrian bridge by measuring the dynamic response using six low-cost triaxial accelerometers. These low-cost accelerometers use a micro-electro-mechanical system (MEMS), which is cheaper compared to a piezoelectric sensor. The frequency domain decomposition algorithm, which is an output-only method of modal analysis, was used to obtain the modal properties, i.e., natural frequencies and mode shapes. Three mode shapes and frequencies were found out using system identification and were compared with the finite element model (FEM) of the bridge, developed using the commercial finite element software, Abaqus. A good comparison was found between the FEM and SI results. The frequency difference was nearly 10%, and the modal assurance criterion (MAC) of experimental and analytical mode shapes was greater than 0.80, which proved to be a good comparison despite the small number of accelerometers available and the simplifications and idealizations in FEM. Full article

We demonstrate a low-volume, stress-free, piezoelectric micro-electromechanical system (MEMS) cantilever array for fully implantable hearing aids. The 12-element spiral-matrix is sensitive to the lower part of audible frequency range (300–700 Hz) through the proper resonant frequency of the individual spirals tuned by dimensions of the cantilevers. The obtained high Q-factors (117–254) provide high frequency selectivity. The generated open circuit voltage signals could be sufficient for the direct analog conversion of the signals for cochlear multielectrode implants. By comparing different geometries we have also demonstrated that the initial stress, which is derived from silicon-dioxide (SiO₂) and aluminum-nitride (AlN) layers, could be drastically reduced simply by the spiral geometry. The results of vibration measurements have shown a good agreement with the calculated resonant frequencies. Full article

With the continuous advancements in microelectromechanical systems (MEMS) fabrication technology, inertial sensors like accelerometers and gyroscopes can be designed and manufactured with smaller footprint and lower power consumption. In the literature, there are several reported accelerometer designs based on MEMS technology and utilizing various transductions like capacitive, piezoelectric, optical, thermal, among several others. In particular, capacitive accelerometers are the most popular and highly researched due to several advantages like high sensitivity, low noise, low temperature sensitivity, linearity, and small footprint. Accelerometers can be designed to sense acceleration in all the three directions (X, Y, and Z-axis). Single-axis accelerometers are the most common and are often integrated orthogonally and combined as multiple-degree-of-freedom (MDoF) packages for sensing acceleration in the three directions. This type of MDoF increases the overall device footprint and cost. It also causes calibration errors and may require expensive compensations. Another type of MDoF accelerometers is based on monolithic integration and is proving to be effective in solving the footprint and calibration problems. There are mainly two classes of such monolithic MDoF accelerometers, depending on the number of proof masses used. The first class uses multiple proof masses with the main advantage being zero calibration issues. The second class uses a single proof mass, which results in compact device with a reduced noise floor. The latter class, however, suffers from high cross-axis sensitivity. It also requires very innovative layout designs, owing to the complicated mechanical structures and electrical contact placement. The performance complications due to nonlinearity, post fabrication process, and readout electronics affects both classes of accelerometers. In order to effectively compare them, we have used metrics such as sensitivity per unit area and noise-area product. This paper is devoted to an in-depth review of monolithic multi-axis capacitive MEMS accelerometers, including a detailed analysis of recent advancements aimed at solving their problems such as size, noise floor, cross-axis sensitivity, and process aware modeling. Full article

This paper presents the design and testing of a one-axis piezoelectric accelerometer made from cellulose paper and piezoelectric zinc oxide nanowires (ZnO NWs) hydrothermally grown on paper. The accelerometer adopts a cantilever-based configuration with two parallel cantilever beams attached with a paper proof mass. A piece of U-shaped, ZnO-NW-coated paper is attached on top of the parallel beams, serving as the strain sensing element for acceleration measurement. The electric charges produced from the ZnO-NW-coated paper are converted into a voltage output using a custom-made charge amplifier circuit. The device fabrication only involves cutting of paper and hydrothermal growth of ZnO NWs, and does not require the access to expensive and sophisticated equipment. The performance of the devices with different weight growth percentages of the ZnO NWs was characterized. Full article