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Recent Enhancements to Interline and Electron Multiplying CCD Image Sensors
- Eric G. Stevens,
- Jeffrey A. Clayhold,
- Hung Doan,
- Robert P. Fabinski,
- Jaroslav Hynecek,
- Stephen L. Kosman and
- Christopher Parks
This paper describes recent process modifications made to enhance the performance of interline and electron-multiplying charge-coupled-device (EMCCD) image sensors. By use of MeV ion implantation, quantum efficiency in the NIR region of the spectrum...