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15 pages, 2936 KB  
Article
Experimental Characterization of a Silicon Nitride Asymmetric Loop-Terminated Mach-Zehnder Interferometer with a Refractive Index-Engineered Sensing Arm
by Muhammad A. Butt, Mateusz Słowikowski, Dagmara Drecka, Michał Jarosik and Ryszard Piramidowicz
Nanomaterials 2025, 15(19), 1532; https://doi.org/10.3390/nano15191532 - 8 Oct 2025
Viewed by 402
Abstract
We report the design, fabrication, and experimental characterization of an asymmetric loop-terminated Mach–Zehnder interferometer (a-LT-MZI) realized on a silicon nitride (SiN) platform for refractive index (RI) sensing. The LT-MZI architecture incorporates a Sagnac loop that enables bidirectional light propagation, effectively doubling the interaction [...] Read more.
We report the design, fabrication, and experimental characterization of an asymmetric loop-terminated Mach–Zehnder interferometer (a-LT-MZI) realized on a silicon nitride (SiN) platform for refractive index (RI) sensing. The LT-MZI architecture incorporates a Sagnac loop that enables bidirectional light propagation, effectively doubling the interaction length without enlarging the device footprint, enhancing sensitivity and improving stability against environmental noise. Subwavelength grating (SWG) waveguides were integrated into the sensing arm to further strengthen light-matter interaction. The fabricated devices exhibited stable and well-defined interference fringes, with uniform wavelength shifts that scaled linearly with changes in the surrounding refractive index. Standard a-LT-MZI structures (ΔL = 300 μm) achieved experimental sensitivities of 288.75–301.25 nm/RIU, while SWG-enhanced devices reached 496–518 nm/RIU, confirming the effectiveness of refractive index engineering. Comparative analysis against previously reported MZI-based sensors highlights the competitive performance of the proposed design. By combining the scalability and CMOS compatibility of silicon nitride with the sensitivity and robustness of the a-LT-MZI architecture, this device provides a compact and versatile platform for next-generation lab-on-chip photonic sensors. It holds strong potential for applications in biochemical diagnostics, medical testing, and environmental monitoring. Full article
(This article belongs to the Section Nanoelectronics, Nanosensors and Devices)
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34 pages, 3928 KB  
Article
Simulation of Chirped FBG and EFPI-Based EC-PCF Sensor for Multi-Parameter Monitoring in Lithium Ion Batteries
by Mohith Gaddipati, Krishnamachar Prasad and Jeff Kilby
Sensors 2025, 25(19), 6092; https://doi.org/10.3390/s25196092 - 2 Oct 2025
Viewed by 450
Abstract
The growing need for efficient and safe high-energy lithium-ion batteries (LIBs) in electric vehicles and grid storage necessitates advanced internal monitoring solutions. This work presents a comprehensive simulation model of a novel integrated optical sensor based on ethylene carbonate-filled photonic crystal fiber (EC-PCF). [...] Read more.
The growing need for efficient and safe high-energy lithium-ion batteries (LIBs) in electric vehicles and grid storage necessitates advanced internal monitoring solutions. This work presents a comprehensive simulation model of a novel integrated optical sensor based on ethylene carbonate-filled photonic crystal fiber (EC-PCF). The proposed design synergistically combines a chirped fiber Bragg grating (FBG) and an extrinsic Fabry–Pérot interferometer (EFPI) on a multiplexed platform for the multifunctional sensing of refractive index (RI), temperature, strain, and pressure (via strain coupling) within LIBs. By matching the RI of the PCF cladding to the battery electrolyte using ethylene carbonate, the design maximizes light–matter interaction for exceptional RI sensitivity, while the cascaded EFPI enhances mechanical deformation detection beyond conventional FBG arrays. The simulation framework employs the Transfer Matrix Method with Gaussian apodization to model FBG reflectivity and the Airy formula for high-fidelity EFPI spectra, incorporating critical effects like stress-induced birefringence, Transverse Electric (TE)/Transverse Magnetic (TM) polarization modes, and wavelength dispersion across the 1540–1560 nm range. Robustness against fabrication variations and environmental noise is rigorously quantified through Monte Carlo simulations with Sobol sequences, predicting temperature sensitivities of ∼12 pm/°C, strain sensitivities of ∼1.10 pm/με, and a remarkable RI sensitivity of ∼1200 nm/RIU. Validated against independent experimental data from instrumented battery cells, this model establishes a robust computational foundation for real-time battery monitoring and provides a critical design blueprint for future experimental realization and integration into advanced battery management systems. Full article
(This article belongs to the Special Issue Feature Papers in Optical Sensors 2025)
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15 pages, 3091 KB  
Article
Dark-Field Lau Interferometer: Barker-Babinet Gratings
by Cristina Margarita Gómez-Sarabia and Jorge Ojeda-Castañeda
Appl. Sci. 2025, 15(19), 10580; https://doi.org/10.3390/app151910580 - 30 Sep 2025
Viewed by 189
Abstract
We design a phase rendering technique that exploits the link between the angular deviations of a beam and the optical implementation of cross-correlations. We employ two suitably coded gratings, which are incorporated as part of a new device here called a dark-field, Lau [...] Read more.
We design a phase rendering technique that exploits the link between the angular deviations of a beam and the optical implementation of cross-correlations. We employ two suitably coded gratings, which are incorporated as part of a new device here called a dark-field, Lau interferometer. To this end, we use a first grating whose unit cell is coded with the white and black versions of a Barker sequence. We employ a second grating that is coded as the Babinet’s complementary of the first grating. We describe the cross-correlation operation by using a compact matrix formulation, which is amenable to numerical evaluation. Full article
(This article belongs to the Special Issue Interdisciplinary Approaches and Applications of Optics & Photonics)
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27 pages, 2641 KB  
Review
Progress in Passive Silicon Photonic Devices: A Review
by Qidi Liu, Yusheng Bian and Jiawei Xiong
Photonics 2025, 12(9), 928; https://doi.org/10.3390/photonics12090928 - 18 Sep 2025
Viewed by 2233
Abstract
Silicon photonics has emerged as a critical enabling technology for a diverse range of applications, from high-speed data communication and computing to advanced sensing and quantum information processing. This paper provides a comprehensive review of recent progress in the foundational passive devices that [...] Read more.
Silicon photonics has emerged as a critical enabling technology for a diverse range of applications, from high-speed data communication and computing to advanced sensing and quantum information processing. This paper provides a comprehensive review of recent progress in the foundational passive devices that underpin this technological revolution. We survey the state of the art in fundamental building blocks, including strip, rib, and silicon nitride waveguides, with a focus on achieving ultra-low propagation loss. The review details essential components for light coupling and splitting, such as grating couplers, edge couplers, multimode interference couplers, and directional couplers, citing their typical performance metrics. Key wavelength filtering and routing components, including high-Q ring resonators, Mach–Zehnder interferometers, and arrayed waveguide gratings, are analyzed. Furthermore, we provide a comparative overview of the capabilities of major photonic foundries operating on a multi-project wafer model. The paper concludes by discussing persistent challenges in packaging and polarization management, and explores future trends driven by co-packaged optics, inverse design methodologies, and the expansion of silicon photonics into new application domains. Full article
(This article belongs to the Special Issue Recent Progress in Integrated Photonics)
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14 pages, 7832 KB  
Article
Self-Adaptive Polymer Fabry–Pérot Thermometer for High-Sensitivity and Wide-Linear-Range Sensing
by Yifan Cheng, Maolin Yu, Junjie Liu, Yingling Tan and Jinhui Chen
Biosensors 2025, 15(9), 602; https://doi.org/10.3390/bios15090602 - 12 Sep 2025
Viewed by 448
Abstract
Fiber-optic temperature sensors with advantages such as simplicity, low cost, and high sensitivity have attracted increasing attention. In this work, we propose a self-adaptive polymer Fabry–Pérot interferometer (PFPI) sensor for ultrasensitive and wide-linear-range thermal sensing. This design achieves a temperature sensitivity of 0.95 [...] Read more.
Fiber-optic temperature sensors with advantages such as simplicity, low cost, and high sensitivity have attracted increasing attention. In this work, we propose a self-adaptive polymer Fabry–Pérot interferometer (PFPI) sensor for ultrasensitive and wide-linear-range thermal sensing. This design achieves a temperature sensitivity of 0.95 nm/°C, representing an enhancement of two orders of magnitude compared to conventional fiber Bragg gratings. To address the challenge of spectral shifts exceeding the free spectral range due to the high sensitivity, a local cross-correlation algorithm is introduced for accurate wavelength tracking. We demonstrate ultrahigh-resolution (0.025 °C) scanning thermal field imaging and sensitive human physiological monitoring, including precise body temperature and respiratory rate detection. These results highlight the dual capability of our PFPI sensor for both microscopic thermal mapping and non-invasive healthcare applications. Full article
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17 pages, 4685 KB  
Article
Development of an Automated Phase-Shifting Interferometer Using a Homemade Liquid-Crystal Phase Shifter
by Zhenghao Song, Lin Xu, Jing Wang, Xitong Liang and Jun Dai
Photonics 2025, 12(7), 722; https://doi.org/10.3390/photonics12070722 - 16 Jul 2025
Viewed by 665
Abstract
In this paper, an automatic phase-shifting interferometer has been developed using a homemade liquid-crystal phase shifter, which demonstrates a low-cost, fully automated technical solution for measuring the phase information of optical waves in devices. Conventional phase-shifting interferometers usually rely on PZT piezoelectric phase [...] Read more.
In this paper, an automatic phase-shifting interferometer has been developed using a homemade liquid-crystal phase shifter, which demonstrates a low-cost, fully automated technical solution for measuring the phase information of optical waves in devices. Conventional phase-shifting interferometers usually rely on PZT piezoelectric phase shifters, which are complex, require additional half-inverse and half-transparent optics to build the optical path, and are expensive. To overcome these limitations, we used a laboratory-made liquid-crystal waveplate as a phase shifter and integrated it into a Mach–Zehnder phase-shifting interferometer. The system is controlled by an STM32 microcontroller and self-developed measurement software, and it utilizes a four-step phase-shift interferometry algorithm and the CPULSI phase-unwrapping algorithm to achieve automatic phase measurements. Phase test experiments using a standard plano-convex lens and a homemade liquid-crystal grating as test objects demonstrate the feasibility and accuracy of the device by the fact that the measured focal lengths are in good agreement with the nominal values, and the phase distributions of the gratings are also in good agreement with the predefined values. This study validates the potential of liquid-crystal-based phase shifters for low-cost, fully automated optical phase measurements, providing a simpler and cheaper alternative to conventional methods. Full article
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38 pages, 10589 KB  
Review
Research Progress of Grating-Based X-Ray Phase-Contrast Imaging and Key Devices
by Fangke Zong, Jun Yang, Jinchuan Guo, Jingjin Zhang, Yang Du and Chenggong Zhang
Photonics 2025, 12(3), 222; https://doi.org/10.3390/photonics12030222 - 28 Feb 2025
Viewed by 2820
Abstract
X-ray phase-contrast imaging presents a significant advancement in the field of X-ray imaging, surpassing traditional X-ray absorption imaging in detecting hydrogen substances. It effectively addresses the limitations of the latter in providing contrast for imaging weakly absorbing objects, thereby opening up vast potential [...] Read more.
X-ray phase-contrast imaging presents a significant advancement in the field of X-ray imaging, surpassing traditional X-ray absorption imaging in detecting hydrogen substances. It effectively addresses the limitations of the latter in providing contrast for imaging weakly absorbing objects, thereby opening up vast potential applications in biomedical research, materials science, and industrial inspection. This article initially explores the fundamental principles of X-ray phase-contrast imaging and several prevalent imaging techniques. Notably, imaging devices such as grating-based Talbot–Lau interferometers emerge as the most promising in phase-contrast imaging due to their exceptional compatibility and imaging quality. Furthermore, this article introduces key parameters for assessing the quality of grating phase-contrast imaging, specifically image noise and sensitivity, along with their calculation methods. These insights are valuable for optimizing grating-based phase-contrast imaging devices. Lastly, this article examines potential applications and advancements in the key components of X-ray phase-contrast imaging while addressing current challenges and future directions in its technological development. This article aims to provide insights and inspiration for scholars interested in this field. Full article
(This article belongs to the Special Issue Advances in X-ray Optics for High-Resolution Imaging)
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14 pages, 4595 KB  
Article
High Sensitivity Design for Silicon-On-Insulator-Based Asymmetric Loop-Terminated Mach–Zehnder Interferometer
by Muhammad A. Butt
Materials 2025, 18(4), 798; https://doi.org/10.3390/ma18040798 - 11 Feb 2025
Cited by 3 | Viewed by 1128
Abstract
This work presents a novel design for an asymmetric loop-terminated Mach–Zehnder interferometer (a-LT-MZI) based on a silicon-on-insulator (SOI) platform, tailored for refractive index (RI) sensing applications. A significant advantage of incorporating the Sagnac loop into the MZI configuration is its ability to reduce [...] Read more.
This work presents a novel design for an asymmetric loop-terminated Mach–Zehnder interferometer (a-LT-MZI) based on a silicon-on-insulator (SOI) platform, tailored for refractive index (RI) sensing applications. A significant advantage of incorporating the Sagnac loop into the MZI configuration is its ability to reduce the interferometer’s effective length by half, offering a more compact design. This makes it ideal for integration into miniaturized optical devices, enabling space-efficient configurations without compromising precision or performance. The proposed device, featuring a pathlength difference (∆L) of 24.35 µm demonstrates a sensitivity of 261 nm/RIU, which is further enhanced to 510 nm/RIU by incorporating a subwavelength (SWG) waveguide in the asymmetric sensing arm. This modification boosts light–matter interaction, resulting in a larger shift in the interference fringes and significantly improving the sensor’s performance. Full article
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14 pages, 4762 KB  
Article
Trigger-Free and Low-Cross-Sensitivity Displacement Sensing System Using a Wavelength-Swept Laser and a Cascaded Balloon-like Interferometer
by Jianming Zhou, Jinying Fan, Junkai Zhang, Jianping Yao and Jiejun Zhang
Sensors 2025, 25(3), 750; https://doi.org/10.3390/s25030750 - 26 Jan 2025
Viewed by 2896
Abstract
A wavelength-swept laser (WSL) demodulation system offers a unique time-domain analysis solution for high-sensitivity optical fiber sensors, providing a high-resolution and high-speed method compared to optical spectrum analysis. However, most traditional WSL-demodulated sensing systems require a synchronous trigger signal or an additional optical [...] Read more.
A wavelength-swept laser (WSL) demodulation system offers a unique time-domain analysis solution for high-sensitivity optical fiber sensors, providing a high-resolution and high-speed method compared to optical spectrum analysis. However, most traditional WSL-demodulated sensing systems require a synchronous trigger signal or an additional optical dispersion link for sensing analysis and typically use a fiber Bragg grating (FBG) as the sensing unit, which limits displacement sensitivity and increases fabrication costs. We present a novel displacement sensing system that combines a trigger-free WSL demodulation method with a cascaded balloon-like interferometer, featuring a simple structure, high sensitivity, and low temperature cross-sensitivity. The sensor is implemented by bending a short length of single-mode fiber with an optimal radius of around 4 mm to excite cladding modes, which form an interference spectral response with the core mode. Experimental findings reveal that the system achieves a high sensitivity of 397.6 pm/μm for displacement variation, corresponding to 19.88 ms/μm when demodulated using a WSL with a sweeping speed of 20 nm/s. At the same time, the temperature cross-sensitivity is as low as 5 pm/°C or 0.25 ms/°C, making it a strong candidate for displacement sensing in harsh environments with significant temperature interference. Full article
(This article belongs to the Special Issue Advances in Microwave Photonics)
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7 pages, 944 KB  
Proceeding Paper
Fast Method for the Measurement of Dispersion of Integrated Waveguides by Utilizing Michelson Interferometry Effects
by Isaac Yorke, Lars Emil Gutt, Peter David Girouard and Michael Galili
Phys. Sci. Forum 2024, 10(1), 4; https://doi.org/10.3390/psf2024010004 - 20 Dec 2024
Viewed by 755
Abstract
In this paper we demonstrate a new approach to the measurement of dispersion of light reflected in integrated optical devices. The approach utilizes the fact that light reflected from the end facet of an integrated waveguide will interfere with light reflected from points [...] Read more.
In this paper we demonstrate a new approach to the measurement of dispersion of light reflected in integrated optical devices. The approach utilizes the fact that light reflected from the end facet of an integrated waveguide will interfere with light reflected from points inside the device under test (DUT), effectively creating a Michelson interferometer. The distance between the measured fringes of this interferometric signal will depend directly on the group delay experienced in the device under test, allowing for fast and easy measurement of waveguide dispersion. This approach has been used to determine the dispersion of a fabricated linearly chirped Bragg gratings waveguide and the result agrees well with the designed value. Full article
(This article belongs to the Proceedings of The 1st International Online Conference on Photonics)
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11 pages, 1995 KB  
Article
Angle-Tunable Method for Optimizing Rear Reflectance in Fabry–Perot Interferometers and Its Application in Fiber-Optic Ultrasound Sensing
by Yufei Chu, Mohammed Alshammari, Xiaoli Wang and Ming Han
Photonics 2024, 11(12), 1100; https://doi.org/10.3390/photonics11121100 - 21 Nov 2024
Cited by 2 | Viewed by 1341
Abstract
With the introduction of advanced Fiber Bragg Grating (FBG) technology, Fabry–Pérot (FP) interferometers have become widely used in fiber-optic ultrasound detection. In these applications, the slope of the reflectance is a critical factor influencing detection results. Due to the intensity limitations of the [...] Read more.
With the introduction of advanced Fiber Bragg Grating (FBG) technology, Fabry–Pérot (FP) interferometers have become widely used in fiber-optic ultrasound detection. In these applications, the slope of the reflectance is a critical factor influencing detection results. Due to the intensity limitations of the laser source in fiber-optic ultrasound detection, the reflectance of the FBG is generally increased to enhance the signal-to-noise ratio (SNR). However, increasing reflectance can cause the reflectance curve to deviate from a sinusoidal shape, which in turn affects the slope of the reflectance and introduces greater errors. This paper first investigates the relationship between the transmission curve of the FP interferometer and reflectance, with a focus on the errors introduced by simplified assumptions. Further research shows that in sensors with asymmetric reflectance slopes, their transmittance curves deviate significantly from sinusoidal signals. This discrepancy highlights the importance of achieving symmetrical slopes to ensure consistent and accurate detection. To address this issue, this paper proposes an innovative method to adjust the rear-end reflectance of the FP interferometer by combining stress modulation, UV adhesive, and a high-reflectivity metal disk. Additionally, by adjusting the rear-end reflectance to ensure that the transmittance curve approximates a sinusoidal signal, the symmetry of the slope is maintained. Finally, through practical ultrasound testing, by adjusting the incident wavelength to the positions of slope extrema (or zero) at equal intervals, the expected ultrasound signals at extrema (or zero) can be detected. This method converts the problem of approximating a sinusoidal signal into a problem of the slope adjustment of the transmittance curve, making it easier and more direct to determine its impact on detection results. The proposed method not only improves the performance of fiber-optic ultrasound sensors but also reduces costs, paving the way for broader applications in medical diagnostics and structural health monitoring. Full article
(This article belongs to the Special Issue Optical Sensing Technologies, Devices and Their Data Applications)
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12 pages, 4110 KB  
Article
Wavelength Locking and Calibration of Fiber-Optic Ultrasonic Sensors Using Single-Sideband-Modulated Laser
by Mohammed Alshammari and Ming Han
Photonics 2024, 11(11), 1063; https://doi.org/10.3390/photonics11111063 - 13 Nov 2024
Viewed by 1432
Abstract
Implementation of edge-filter detection for interrogating optical interferometric ultrasonic sensors is often hindered by the lack of cost-effective laser sources with agile wavelength tunability and good noise performance. The detected signal can also be affected by optical power variations and locking-point drift, negatively [...] Read more.
Implementation of edge-filter detection for interrogating optical interferometric ultrasonic sensors is often hindered by the lack of cost-effective laser sources with agile wavelength tunability and good noise performance. The detected signal can also be affected by optical power variations and locking-point drift, negatively affecting the sensor accuracy. Here, we report the use of laser single-sideband generation with a dual-parallel Mach–Zehnder interferometer (DP-MZI) for laser wavelength tuning and locking in edge-filter detection of fiber-optic ultrasonic sensors. We also demonstrate real-time in situ calibration of the sensor response to ultrasound-induced wavelength shift tuning. The DP-MZI is employed to generate a known wavelength modulation of the laser, whose response is used to gauge the sensor response to the ultrasound-induced wavelength shifts in real time and in situ. Experiments were performed on a fiber-optic ultrasonic sensor based on a high-finesse Fabry–Perot interferometer formed by two fiber Bragg gratings. The results demonstrated the effectiveness of the laser locking against laser wavelength drift and temperature variations and the effectiveness of the calibration method against optical power variations and locking-point drift. These techniques can enhance the operational robustness and increase the measurement accuracy of optical ultrasonic sensors. Full article
(This article belongs to the Special Issue Recent Research on Optical Sensing and Precision Measurement)
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14 pages, 4903 KB  
Article
Fiber-Optic Sensor Spectrum Noise Reduction Based on a Generative Adversarial Network
by Yujie Lu, Qingbin Du, Ruijia Zhang, Bo Wang, Zigeng Liu, Qizhe Tang, Pan Dai, Xiangxiang Fan and Chun Huang
Sensors 2024, 24(22), 7127; https://doi.org/10.3390/s24227127 - 6 Nov 2024
Cited by 2 | Viewed by 2194
Abstract
In the field of fiber-optic sensing, effectively reducing the noise of sensing spectra and achieving a high signal-to-noise ratio (SNR) has consistently been a focal point of research. This study proposes a deep-learning-based denoising method for fiber-optic sensors, which involves pre-processing the sensor [...] Read more.
In the field of fiber-optic sensing, effectively reducing the noise of sensing spectra and achieving a high signal-to-noise ratio (SNR) has consistently been a focal point of research. This study proposes a deep-learning-based denoising method for fiber-optic sensors, which involves pre-processing the sensor spectrum into a 2D image and training with a cycle-consistent generative adversarial network (Cycle-GAN) model. The pre-trained algorithm demonstrates the ability to effectively denoise various spectrum types and noise profiles. This study evaluates the denoising performance of simulated spectra obtained from four different types of fiber-optic sensors: fiber Fabry–Perot interferometer (FPI), regular fiber Bragg grating (FBG), chirped FBG, and FBG pair. Compared to traditional denoising algorithms such as wavelet transform (WT) and empirical mode decomposition (EMD), the proposed method achieves an SNR improvement of up to 13.71 dB, an RMSE that is up to three times smaller, and a minimum correlation coefficient (R2) of no less than 99.70% with the original high-SNR signals. Additionally, the proposed algorithm was tested for multimode noise reduction, demonstrating an excellent linearity in temperature response with a R2 of 99.95% for its linear fitting and 99.74% for the temperature response obtained from single-mode fiber sensors. The proposed denoising approach effectively reduces the impact of various noises from the sensing system, enhancing the practicality of fiber-optic sensing, especially for specialized fiber applications in research and industrial domains. Full article
(This article belongs to the Special Issue New Prospects in Fiber Optic Sensors and Applications)
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9 pages, 1515 KB  
Article
Temperature and Lateral Pressure Sensing Using a Sagnac Sensor Based on Cascaded Tilted Grating and Polarization-Maintaining Fibers
by Yifan Liu, Yujian Li, Pin Xu and Changyuan Yu
Sensors 2024, 24(21), 6779; https://doi.org/10.3390/s24216779 - 22 Oct 2024
Cited by 3 | Viewed by 3389
Abstract
This study introduces a Sagnac Interferometer (SI) fiber sensor that integrates Polarization-Maintaining Fibers (PMFs) with a Tilted Fiber Bragg Grating (TFBG) for the dual-parameter measurement of strain and lateral pressure. By incorporating a 6° TFBG with PMFs into the SI sensor, its sensitivity [...] Read more.
This study introduces a Sagnac Interferometer (SI) fiber sensor that integrates Polarization-Maintaining Fibers (PMFs) with a Tilted Fiber Bragg Grating (TFBG) for the dual-parameter measurement of strain and lateral pressure. By incorporating a 6° TFBG with PMFs into the SI sensor, its sensitivity is significantly enhanced, enabling advanced multi-parameter sensing capabilities. The sensor demonstrates a temperature sensitivity of −1.413 nm/°C and a lateral pressure sensitivity of −4.264 dB/kPa, as validated by repeated experiments. The results exhibit excellent repeatability and high precision, underscoring the sensor’s potential for robust and accurate multi-parameter sensing applications. Full article
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44 pages, 14459 KB  
Review
A Review: Laser Interference Lithography for Diffraction Gratings and Their Applications in Encoders and Spectrometers
by Linbin Luo, Shuonan Shan and Xinghui Li
Sensors 2024, 24(20), 6617; https://doi.org/10.3390/s24206617 - 14 Oct 2024
Cited by 16 | Viewed by 7116
Abstract
The unique diffractive properties of gratings have made them essential in a wide range of applications, including spectral analysis, precision measurement, optical data storage, laser technology, and biomedical imaging. With advancements in micro- and nanotechnologies, the demand for more precise and efficient grating [...] Read more.
The unique diffractive properties of gratings have made them essential in a wide range of applications, including spectral analysis, precision measurement, optical data storage, laser technology, and biomedical imaging. With advancements in micro- and nanotechnologies, the demand for more precise and efficient grating fabrication has increased. This review discusses the latest advancements in grating manufacturing techniques, particularly highlighting laser interference lithography, which excels in sub-beam generation through wavefront and amplitude division. Techniques such as Lloyd’s mirror configurations produce stable interference fringe fields for grating patterning in a single exposure. Orthogonal and non-orthogonal, two-axis Lloyd’s mirror interferometers have advanced the fabrication of two-dimensional gratings and large-area gratings, respectively, while laser interference combined with concave lenses enables the creation of concave gratings. Grating interferometry, utilizing optical interference principles, allows for highly precise measurements of minute displacements at the nanometer to sub-nanometer scale. This review also examines the application of grating interferometry in high-precision, absolute, and multi-degree-of-freedom measurement systems. Progress in grating fabrication has significantly advanced spectrometer technology, with integrated structures such as concave gratings, Fresnel gratings, and grating–microlens arrays driving the miniaturization of spectrometers and expanding their use in compact analytical instruments. Full article
(This article belongs to the Special Issue Feature Papers in Optical Sensors 2024)
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