Search Results (229)

There is an increasing demand for ultrasound imaging technologies, particularly wearable and portable systems, for continuous physiological monitoring applications. Although some recent flexible ultrasound devices have adopted polymer encapsulations, typical rigid transducer designs still include metal housings and costly electrodes, contributing to increased device weight and fabrication cost. To address these limitations, we developed an aluminum-electrode/3D-printed polymer-housing ultrasound transducer (APUT) utilizing a polyvinylidene fluoride piezoelectric film. Compared to a gold-electrode/metal-housing ultrasound transducer, the APUT material costs and total weight were approximately 66% and 86% lower, respectively. Acoustic evaluation revealed a center frequency of 24.5 MHz and a fractional bandwidth of 60.9%, with axial and lateral resolutions of 51 and 152 μm, respectively. Furthermore, during a 3-h pulsed operation test, the APUT exhibited an initial increase in capacitance followed by a relatively stable response, with no progressive surface-temperature increase detected within the accuracy of the measurement method. Finally, successful ex vivo imaging of chicken breast tissue confirms the APUT’s biomedical applicability, highlighting its potential as a wearable, portable, and disposable ultrasound platform. Full article

Micromachined ultrasonic transducers (MUTs) represent a notable advance in miniaturized sensing, enabling compact, low-power, and complementary metal-oxide-semiconductor (CMOS)-integrated platforms that extend ultrasonic capabilities into wearable, implantable, and edge-computing domains. The integration of artificial intelligence (AI) has introduced new approaches for signal interpretation, adaptive control, and data-driven optimization, enhancing performance in specific areas such as compressed sensing, neural beamforming, and learned image enhancement that complement conventional signal processing. Meanwhile, sensor fusion strategies that combine ultrasonic data with complementary modalities have improved robustness, contextual awareness, and diagnostic accuracy across applications ranging from industrial monitoring to clinical diagnostics. This review provides a comprehensive analysis of this active research area, systematically covering transducer hardware platforms, design methodologies, and intelligent signal processing frameworks. While traditional bulk piezoelectric transducers remain the benchmark for high-power applications, capacitive and piezoelectric micromachined variants offer superior acoustic impedance matching and monolithic CMOS compatibility essential for portable systems. We examine the evolution from deterministic analytical and numerical modeling toward AI-powered inverse design, which enables the discovery of non-intuitive, high-performance geometries beyond human intuition. Furthermore, the integration of machine learning (ML) for signal recovery, image enhancement, and multi-modal sensor fusion is discussed as a pathway to compensate for hardware constraints such as limited aperture, sparse sampling, and low signal-to-noise ratio (SNR), while pointing out that AI technology cannot overcome fundamental physical limits including acoustic attenuation, thermal noise floors, and transduction efficiency boundaries. By synthesizing recent advancements, this review demonstrates how the convergence of classical acoustic physics and data-driven intelligence is guiding the development of of intelligent ultrasonic systems. Full article

Capacitive micromachined ultrasonic transducers (CMUTs) have been extensively investigated for applications in medical imaging and industrial non-destructive testing. However, their relatively low acoustic pressure output remains a major limitation to broader adoption. This paper proposes a CMUT structure that combines collapse-mode operation with a trenched membrane to enhance output performance. An analytical model based on von Kármán large-deflection plate theory is developed to estimate the optimal radial position of the trench, thereby defining the search space for subsequent Bayesian optimization. Single-parameter sequential Bayesian optimizations are first performed to identify the individual effects and optimal ranges of the trench’s radial position, depth, and width. Subsequently, a three-parameter global Bayesian optimization framework is employed for global parameter refinement. The three-parameter joint optimization reveals strong synergistic interactions among the design variables, achieving a higher output pressure of 72.34 kPa compared to 70.02 kPa from sequential approaches. Under identical operating conditions, the optimized trenched membrane CMUT exhibits a 100.15% increase in output acoustic pressure and a 28.77% improvement in the pressure-bandwidth product compared to a uniform membrane. Statistical analysis across multiple independent runs yielded a coefficient of variation (CV) of only 0.052% for the output pressure in the three-parameter global optimization results. This confirms that the proposed framework robustly optimizes CMUT designs for high output pressure, offering a promising technical approach to enhancing device performance. Full article

To address the need for bubble detection in industrial silicone sealing rings, this paper presents a compact non-invasive ultrasonic monitoring system based on a capacitive micromachined ultrasonic transducer (CMUT) array, aiming to overcome the limitations of conventional X-ray inspection in terms of safety, portability, and real-time in situ monitoring. The system comprises two 8.8 mm × 8.8 mm CMUT arrays with associated transmitting and receiving circuitry. The silicone thickness is determined using the time-of-flight (TOF) method, while bubble size is quantitatively estimated by combining received signal amplitude analysis, which characterizes bubble-induced attenuation, with correlation function evaluation. Experimental measurements on industrial-grade silicone samples and finite element simulations demonstrate that the system achieves a spatial resolution of 0.5 mm and effectively captures attenuation variations caused by bubbles. The integrated strategy of TOF, amplitude analysis, and correlation assessment ensures reliable non-destructive evaluation. Compared with X-ray inspection, the proposed system is safer, more portable, and suitable for real-time on-site monitoring, thereby significantly improving quality control efficiency in silicone manufacturing. This study provides a novel CMUT-array-based solution for quantitative bubble detection in silicone media, offering both high resolution and practical application potential. Full article

Electrochemical impedance spectroscopy (EIS) is a powerful, non-destructive tool for evaluating ion-selective electrode (ISE) membrane condition. This work investigated EIS for identifying degradation mechanisms in all-solid-state Pb²⁺-selective electrodes. Graphene-containing PVC membranes deposited on glassy carbon electrodes were exposed to synthetic urine, river water, and seawater (24 h and 1 week) and to mechanical damage (cutting, needle puncture, or both). Degradation was assessed using EIS, potentiometric measurements, contact-angle analysis, profilometry, and SEM. River water and urine exposure decreased hydrophobicity, increased roughness, and produced fouling deposits. Seawater caused only minor morphological and wettability changes, though impedance data showed increased membrane hydration due to high ionic strength. Mechanical damage substantially disrupted membrane integrity, causing pronounced impedance changes, increased potential drift, and reduced analytical performance. Fouling and mechanical damage produced distinct electrochemical signatures: fouling mainly affected surface properties, while mechanical damage altered the membrane–transducer interface, increasing capacitance and reducing resistance. Notably, needle-punctured electrodes retained a near-Nernstian response despite clear impedance changes and reduced long-term stability, showing that EIS detects defects invisible to conventional calibration. These results confirm EIS as a sensitive method for distinguishing fouling from physical damage, useful for early degradation detection and lifetime monitoring of all-solid-state ISEs. Full article

This paper investigates the accuracy of conventional inductive current transformers (iCTs) and Rogowski coils (RCs) in measuring distorted currents, evaluating compliance with the WB0 (up to the 13th harmonic) and WB1 (up to the 60th harmonic) accuracy classes according to the IEC 61869-1 standard. A custom reference iCT, calibrated via the ampere-turns method to achieve a superior baseline accuracy (0.02%), served as the primary benchmark. A zero-flux electronic transducer was utilized strictly to verify this reference. Despite inherent core nonlinearity, tested conventional iCTs with reduced to minimum secondary burdens successfully met the class 0.5-WB1 requirements. In the case of tested Rogowski coils, the study reveals that their wideband performance depends on physical design of the particular type. High-sensitivity coils suffer from increased parasitic capacitance and self-inductance, causing significant additional phase shift at higher frequencies, whereas low-sensitivity, small-diameter coils offer superior linearity. Overall, the tested RCs generally ensured compliance with the 0.5-WB1 class across the evaluated frequency range, with certain units successfully achieving the more restrictive 0.2-WB1 class. Ultimately, conventional iCTs remain a highly reliable solution for metering purposes in low-voltage networks, while properly selected Rogowski coils provide a valuable alternative for power quality analysis and harmonic distortion measurements. Full article

This paper reports on the performance of an optical voltage transducer (MVT) module after undergoing lightning impulse withstand tests. The device was designed to monitor the output voltage of a dedicated capacitive voltage divider (CVD) to facilitate a voltage sensor dedicated for 132-kV high voltage (HV) networks. Hard piezoelectric transducer (PZT) and fiber Bragg grating (FBG) technologies were combined in the module to serve as a voltage-to-strain-to-wavelength converter. The FBG peak wavelength shifts were calibrated against the input voltage to provide precise measurements of the network voltage. The module was subjected to lightning impulse withstand tests as per the requirements of the IEC 60044-7 and IEC 60060-1 standards, and the impact of the lightning impulses on the performance of the MVT module was evaluated based on the accuracy tests performed before and after the lightning impulse tests. The experimental results demonstrated that the MVT module successfully withstood the lightning impulse tests without any disruptive discharges or voltage collapses. The performance of the module was not affected by the lightning impulse tests within the practical constraints of the reference measuring equipment: its amplitude and phase errors remained within the original limits of ±0.1% and ±0.1° at 80–120% of the rated voltage, and below ±4% and ±2° at 2% of the rated voltage, respectively. Full article

This work presents wirelessly interrogated microelectromechanical system (MEMS) capacitive sensors for continuous intraocular pressure (IOP) monitoring. The sensor uses a passive inductor–capacitor (LC) tank circuit comprising a fixed, on-chip spiral inductor and a pressure-sensitive, variable-gap capacitor with parallel-plate membrane electrodes and side anchors. The membrane is designed with dimensions of 500 µm × 500 µm × 2 µm and a capacitive transducer gap of 2.5 µm. Applied pressure deflects the top membrane, producing a corresponding capacitance variation that changes the frequency and phase response of the LC tank circuit, enabling real-time and continuous IOP monitoring over a target detection range of 0–50 mmHg and beyond. Mutual inductive coupling between the sensor and the external readout coil is investigated as a reliable readout mechanism. Full article

Capacitive micromechanical ultrasonic transducers (CMUTs), as microelectromechanical systems (MEMS) devices, have broad application prospects in ultrasonic imaging and sensing. This study investigates the influence of surface acoustic waves (SAWs) using periodically arranged CMUTs as the fundamental unit cells. We first utilize finite element analysis (FEA) to calculate and analyze the band structure and bandgap characteristics of phononic crystals under infinite periodic conditions. Subsequently, for finite periodic structures in practical applications, acoustic transmission spectra were further simulated using FEA to verify the bandgap characteristics of the structure for SAWs. Accordingly, this paper leverages a deep learning framework based on a multilayer perceptron (MLP) architecture to achieve the inverse design and optimization of CMUT geometric parameters, tailored to specific target bandgap requirements. The results demonstrate that this approach can efficiently and accurately determine the optimal structural configurations, offering a robust and novel technical paradigm for the precise control of SAWs using CMUT-based periodic arrays. Full article

Lead zirconate titanate (PZT) is a widely used material for applications in microsensors, actuators, and transducers. Due to its high piezoelectric coefficient, large dielectric constant, and strong polarization capability near the morphotropic phase boundary (Zr/Ti ≈ 52/48), it is considered one of the most attractive materials for micro-electromechanical systems (MEMS). These advantageous material properties strongly depend on the PZT layer’s microstructure and crystallinity, which are primarily determined by the choice of seed layer, deposition conditions, and the post-deposition annealing treatment that promotes the formation of the PZT’s perovskite phase. In this contribution, sputter-deposited PZT thin films were crystallized by conventional furnace annealing (CFA) to evaluate the effect of heating/cooling rates (1 °C·min⁻¹–7 °C·min⁻¹) within a temperature range of 450 °C to 700 °C on structural, electrical, and ferroelectric properties, with consideration of the seed layer preparation. We characterized the materials’ properties by X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), and measurements of the ferroelectric hysteresis, capacitance, and leakage current. All samples annealed at temperatures of at least 500 °C fully crystallized into the perovskite phase, independently of the heating/cooling rate. The best ferroelectric performance was achieved at 550 °C with a 1 °C·min⁻¹ heating/cooling rate, yielding a saturation polarization of 82.8 µC·cm⁻² and a remnant polarization of 36.9 µC·cm⁻² under a maximum applied field of 300 kV·cm⁻¹. Full article

Acoustic emission (AE) monitoring in metal additive manufacturing (AM) requires compact sensors capable of high-frequency operation, broad bandwidth, and high sensitivity. However, increasing structural stiffness to achieve high resonance frequencies typically reduces electromechanical sensitivity. This work presents a finite element study of a coupled-resonator capacitive micromachined ultrasonic transducer (CMUT) designed to address this trade-off. The proposed architecture integrates three mechanically coupled silicon membranes with a stepped capacitive cavity that increases capacitance while preserving structural stiffness, enabling enhanced sensitivity without compromising high-frequency operation. COMSOL Multiphysics simulations were used to evaluate modal characteristics and frequency response under DC pre-stressed conditions. Modal coupling produced closely spaced resonances that broadened the effective bandwidth, while the stepped cavity significantly increased voltage output through improved electromechanical coupling. Compared to a single-resonator flat-cavity design, the coupled stepped-cavity configuration demonstrated nearly a threefold enhancement in output voltage while maintaining operation near 100 kHz. Additionally, adjusting the central resonator length enabled controlled frequency tuning for scalable array implementation. These results establish a proof of concept for a high-frequency, high-sensitivity micro-electro-mechanical systems (MEMS) CMUT architecture suitable for distributed AE monitoring in advanced manufacturing environments. Full article

The rapid development of smart energy infrastructures and renewable energy systems requires advanced sensing solutions that provide high accuracy, expandability, and stability under real operating conditions. However, conventional gas monitoring systems are predominantly based on resistive or voltage-output sensors, which require complex analog front-end circuits and analog-to-digital conversion, leading to increased system complexity, cost, and susceptibility to electromagnetic interference. This paper tackles this limitation by proposing a frequency-domain sensing approach for multichannel monitoring of biogas plant parameters. The objective of this study is to develop and experimentally validate an extendable sensing architecture based on autogenerator microelectronic gas transducers with direct gas concentration–frequency conversion and FPGA-based digital acquisition. The proposed method is grounded in a physical–mathematical model of the space-charge capacitance of gas-sensitive semiconductor structures derived from Poisson’s equation, facilitating analytical formulation of conversion and sensitivity functions. A multichannel FPGA-based measurement system is implemented to process frequency signals without analog conditioning or ADC stages. Experimental validation was performed for CH₄ (0–85%), CO₂ (0–60%), H₂, NH₃, and H₂S (1–20,000 ppm). The results demonstrate measurement uncertainty within 0.25–0.5%, with sensitivity reaching 350–748 Hz/ppm for H₂, 455–750 Hz/ppm for NH₃, and 253–375 Hz/ppm for H₂S, while methane and carbon dioxide sensitivities reach up to 112 kHz/% and 98.7 kHz/%, respectively. Spectral analysis in the LTE-1800 band confirms improved noise immunity (up to 4.5×) and extended transmission capabilities. A 12-channel FPGA-based monitoring system (RDM-BP-1) with a 1 s sampling interval, IP67 protection, and wireless connectivity is developed and validated. The proposed architecture eliminates analog signal conditioning, reduces hardware complexity, and provides an easily expandable and reliable sensing solution for smart buildings, renewable energy systems, and cloud-integrated energy infrastructures. Full article

Continuous, non-invasive cardiopulmonary monitoring is receiving increasing attention as population aging and chronic diseases rise. Acoustic sensing provides diagnostically relevant information with relatively simple hardware. Yet, physiological body sounds span heterogeneous and partially overlapping spectra and are highly susceptible to environmental noise and motion artifacts, which limit conventional stethoscopes and fixed-frequency sensors. Frequency-Tunable Acoustic Sensors (FTAS) offer a promising route toward frequency-selective amplification and adaptive interference suppression by matching their resonance to target signals, thereby potentially supporting multi-site monitoring and personalized diagnostics on a single platform. This review starts with an overview of physiological sound generation and the evolution of auscultation, then surveys mainstream medical acoustic transducers (piezoelectric, capacitive microelectromechanical systems (MEMS), piezoresistive and triboelectric) and their limitations in frequency selectivity. Resonance-tuning strategies are classified into three paradigms: electrical tuning, material-based tuning, and geometric reconfiguration, and their tuning ranges, response characteristics, and representative implementations are comparatively discussed. Finally, this review discusses the potential translational value of FTAS in physiological acoustic signal monitoring, particularly in cardiovascular and respiratory assessment, and emphasizes the remaining challenges, including the trade-off between sensitivity and selectivity, as well as long-term biocompatibility. At the same time, this review highlights their development prospects in customizable acoustic sensing platforms. Full article

A capacitive micromachined ultrasonic transducer (CMUT) was engineered and functionalized with either zeolitic imidazolate framework-8 (ZIF-8) dispersed in an AZ1512HS photoresist matrix or with graphene oxide (GOx) to operate as a gravimetric sensor for organic vapors. The sensor response was investigated under controlled humidity conditions during pulsed exposure to acetone, ethyl methyl ketone, isopropanol, kerosene, and diesel vapors. The impedance of the device was monitored by observing and tracking the resonance frequency shift as well as the resistance maximum shift, giving us the possibility to track two response parameters simultaneously. Different combinations of shifts in the sensor resonance frequency and the resistance maximum values were observed for the ZIF-8 functionalized device when exposed to the selected vapors, ranging from 12.4 kHz for ethyl methyl ketone to 2.4 kHz for diesel, and from 580 Ω for acetone to 20 Ω for isopropanol. Sensors functionalized with GOx did not demonstrate any significant response to either ethyl methyl ketone or isopropanol in the frequency domain. GOx-functionalized sensors were used for relative humidity monitoring in test gases. Besides the conventional response of the produced gravimetric sensing system, we also observed a strong relationship between the humidity of the gas mixture and the strength of the interaction of target gases with the functional film of the sensor. The results highlight the multidimensional nature of the sensor response and demonstrate how humidity influences the interaction between vapor molecules and the functional coating. This paper focuses on the characterization of the coupled behavior of resonance frequency and resistance shifts under controlled operating conditions. The presented experimental setup provides a basis for future concentration-dependent investigations and functional material comparisons in CMUT-based gravimetric sensing systems and provides a necessary foundation for accurate interpretation of future concentration-resolved measurements. Full article

Capacitive micromachined ultrasonic transducers (CMUTs) have been developed over the past 30 years and achieved practical applications in both medical imaging and industrial non-destructive testing. This article presents the fundamental principles of CMUTs and surveys fabrication technologies, offering a comprehensive review of major advances and challenges in medical ultrasound and photoacoustic imaging applications. The article further reviews and analyzes three primary challenges currently confronting CMUTs in medical imaging applications: lower output acoustic pressure, dielectric charging effects, and the need for high bias voltage. It also presents and discusses a potential combined approach to comprehensively address these challenges, with the aim of enhancing CMUT performance and broadening clinical adoption. Full article