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Keywords = aluminum-doped indium tin oxide

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17 pages, 4214 KB  
Article
Resistive Switching Behavior of Sol–Gel-Processed ZnMgO/ZnO Bilayer in Optoelectronic Devices
by Hee Sung Shin, Dong Hyun Kim, Donggu Lee and Jaehoon Kim
Nanomaterials 2025, 15(17), 1353; https://doi.org/10.3390/nano15171353 - 3 Sep 2025
Cited by 1 | Viewed by 1936
Abstract
Sol–gel-processed zinc oxide (ZnO) and magnesium-doped zinc oxide (ZnMgO) are widely used in quantum dot light-emitting diodes (QLEDs) due to their excellent charge transport properties, ease of fabrication, and tunable film characteristics. In particular, the ZnMgO/ZnO bilayer structure has attracted considerable attention for [...] Read more.
Sol–gel-processed zinc oxide (ZnO) and magnesium-doped zinc oxide (ZnMgO) are widely used in quantum dot light-emitting diodes (QLEDs) due to their excellent charge transport properties, ease of fabrication, and tunable film characteristics. In particular, the ZnMgO/ZnO bilayer structure has attracted considerable attention for its dual functionality: defect passivation by ZnMgO and efficient charge transport by ZnO. However, while the effects of resistive switching (RS) in individual ZnO and ZnMgO layers on the aging behavior of QLEDs have been studied, the RS characteristics of sol–gel-processed ZnMgO/ZnO bilayers remain largely unexplored. In this study, we systematically analyzed RS properties of an indium tin oxide (ITO)/ZnMgO/ZnO/aluminum (Al) device, demonstrating superior performance compared to devices with single layers of either ZnMgO or ZnO. We also investigated the shelf-aging characteristics of RS devices with single and bilayer structures, finding that the bilayer structure exhibited the least variation over time, thereby confirming its enhanced uniformity and reliability. Furthermore, based on basic current–voltage measurements, we estimated accuracy variations in MNIST pattern recognition using a two-layer perceptron model. These results not only identify a promising RS device architecture based on the sol–gel process but also offer valuable insights into the aging behavior of QLEDs incorporating ZnMgO/ZnO bilayers, ITO, and Al electrodes. Full article
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24 pages, 1483 KB  
Review
Towards AZO Thin Films for Electronic and Optoelectronic Large-Scale Applications
by Elena Isabela Bancu, Valentin Ion, Stefan Antohe and Nicu Doinel Scarisoreanu
Crystals 2025, 15(8), 670; https://doi.org/10.3390/cryst15080670 - 23 Jul 2025
Cited by 12 | Viewed by 3925
Abstract
Transparent conductive oxides (TCOs) have become essential components in a broad range of modern devices, including smartphones, flat-panel displays, and photovoltaic cells. Currently, indium tin oxide (ITO) is used in approximately 90% of these devices. However, ITO prices continue to rise due to [...] Read more.
Transparent conductive oxides (TCOs) have become essential components in a broad range of modern devices, including smartphones, flat-panel displays, and photovoltaic cells. Currently, indium tin oxide (ITO) is used in approximately 90% of these devices. However, ITO prices continue to rise due to the limited supply of indium (In), making the development of alternative materials for TCOs indispensable. Therefore, this study highlights the latest advances in creating new, affordable materials, with a focus on aluminum-doped zinc oxide (AZO). Over the last few decades, this material has been widely studied to improve its physical properties, particularly its low electrical resistivity, which can affect the performance of various devices. Now, it is close to replacing ITO due to several advantages including cost-effectiveness, stability under hydrogen plasma, low processing temperatures, and lack of toxicity. Besides that, in comparison to other TCOs such as IZO, IGZO, or IZrO, AZO achieved a low electrical resistivity (10−5 ohm cm) while maintaining a high transparency across the visible spectrum (over 85%). Additionally, due to the increasing development of technologies utilizing such materials, it is essential to develop more effective techniques for producing TCOs on a larger scale. Additionally, due to the increasing development of technologies utilizing such materials, it is essential to develop more effective techniques for producing TCOs on a larger scale. This review emphasizes the potential of AZO as a cost-effective and scalable alternative to ITO, highlighting key advancements in deposition techniques such as pulsed laser deposition (PLD). Full article
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33 pages, 6495 KB  
Review
A Review of Transparent Conducting Films (TCFs): Prospective ITO and AZO Deposition Methods and Applications
by Jessica Patel, Razia Khan Sharme, Manuel A. Quijada and Mukti M. Rana
Nanomaterials 2024, 14(24), 2013; https://doi.org/10.3390/nano14242013 - 14 Dec 2024
Cited by 65 | Viewed by 8463
Abstract
This study offers a comprehensive summary of the current states as well as potential future directions of transparent conducting oxides (TCOs), particularly tin-doped indium oxide (ITO), the most readily accessible TCO on the market. Solar cells, flat panel displays (FPDs), liquid crystal displays [...] Read more.
This study offers a comprehensive summary of the current states as well as potential future directions of transparent conducting oxides (TCOs), particularly tin-doped indium oxide (ITO), the most readily accessible TCO on the market. Solar cells, flat panel displays (FPDs), liquid crystal displays (LCDs), antireflection (AR) coatings for airbus windows, photovoltaic and optoelectronic devices, transparent p–n junction diodes, etc. are a few of the best uses for this material. Other conductive metals that show a lot of promise as substitutes for traditional conductive materials include copper, zinc oxide, aluminum, silver, gold, and tin. These metals are also utilized in AR coatings. The optimal deposition techniques for creating ITO films under the current conditions have been determined to be DC (direct current) and RF (radio frequency) MS (magnetron sputtering) deposition, both with and without the introduction of Ar gas. When producing most types of AR coatings, it is necessary to obtain thicknesses of at least 100 nm and minimum resistivities on the order of 10−4 Ω cm. For AR coatings, issues related to less-conductive materials than ITO have been considered. Full article
(This article belongs to the Section Nanophotonics Materials and Devices)
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19 pages, 4418 KB  
Review
Progress in the Synthesis and Application of Transparent Conducting Film of AZO (ZnO:Al)
by Dingyi Zhang, Wenhe Yu, Lu Zhang and Xiangyang Hao
Materials 2023, 16(16), 5537; https://doi.org/10.3390/ma16165537 - 9 Aug 2023
Cited by 48 | Viewed by 6726
Abstract
Due to the excellent performance and low cost of the new aluminum-doped zinc oxide (AZO) film, it is expected to replace the mature indium-doped tin oxide (ITO) film. The research status and progress of AZO transparent conductive films are summarized in this review. [...] Read more.
Due to the excellent performance and low cost of the new aluminum-doped zinc oxide (AZO) film, it is expected to replace the mature indium-doped tin oxide (ITO) film. The research status and progress of AZO transparent conductive films are summarized in this review. Moreover, the structure, optoelectronic properties, and conductive mechanism of AZO thin films are also detailed. The thin films’ main preparation processes and the advantages and disadvantages of each process method are mainly discussed, and their application fields are expounded. AZO thin films with multicomponent composite structures are one of the promising development directions in transparent conductive oxide (TCO) thin films. The development of various preparation processes has promoted the production and application of thin films on a broad scale. Finally, some improvement schemes have been proposed to improve the comprehensive performance of the film. The industrialization prospects of the AZO film, as well as its great development potential in the digital world, are discussed. Full article
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12 pages, 4597 KB  
Article
Towards All-Non-Vacuum-Processed Photovoltaic Systems: A Water-Based Screen-Printed Cu(In,Ga)Se2 Photoabsorber with a 6.6% Efficiency
by Bruna F. Gonçalves, Viviana Sousa, José Virtuoso, Evgeny Modin, Oleg I. Lebedev, Gabriela Botelho, Sascha Sadewasser, Laura M. Salonen, Senentxu Lanceros-Méndez and Yury V. Kolen’ko
Nanomaterials 2023, 13(13), 1920; https://doi.org/10.3390/nano13131920 - 23 Jun 2023
Cited by 6 | Viewed by 2806
Abstract
During the last few decades, major advances have been made in photovoltaic systems based on Cu(In,Ga)Se2 chalcopyrite. However, the most efficient photovoltaic cells are processed under high-energy-demanding vacuum conditions. To lower the costs and facilitate high-throughput production, printing/coating processes are proving to [...] Read more.
During the last few decades, major advances have been made in photovoltaic systems based on Cu(In,Ga)Se2 chalcopyrite. However, the most efficient photovoltaic cells are processed under high-energy-demanding vacuum conditions. To lower the costs and facilitate high-throughput production, printing/coating processes are proving to be effective solutions. This work combined printing, coating, and chemical bath deposition processes of photoabsorber, buffer, and transparent conductive layers for the development of solution-processed photovoltaic systems. Using a sustainable approach, all inks were formulated using water and ethanol as solvents. Screen printing of the photoabsorber on fluorine-doped tin-oxide-coated glass followed by selenization, chemical bath deposition of the cadmium sulfide buffer, and final sputtering of the intrinsic zinc oxide and aluminum-doped zinc oxide top conductive layers delivered a 6.6% maximum efficiency solar cell, a record for screen-printed Cu(In,Ga)Se2 solar cells. On the other hand, the all-non-vacuum-processed device with spray-coated intrinsic zinc-oxide- and tin-doped indium oxide top conductive layers delivered a 2.2% efficiency. The given approaches represent relevant steps towards the fabrication of sustainable and efficient Cu(In,Ga)Se2 solar cells. Full article
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17 pages, 17661 KB  
Review
Recent Progress in Solution Processed Aluminum and co-Doped ZnO for Transparent Conductive Oxide Applications
by Mandeep Singh and Francesco Scotognella
Micromachines 2023, 14(3), 536; https://doi.org/10.3390/mi14030536 - 25 Feb 2023
Cited by 25 | Viewed by 5570
Abstract
With the continuous growth in the optoelectronic industry, the demand for novel and highly efficient materials is also growing. Specifically, the demand for the key component of several optoelectronic devices, i.e., transparent conducting oxides (TCOs), is receiving significant attention. The major reason behind [...] Read more.
With the continuous growth in the optoelectronic industry, the demand for novel and highly efficient materials is also growing. Specifically, the demand for the key component of several optoelectronic devices, i.e., transparent conducting oxides (TCOs), is receiving significant attention. The major reason behind this is the dependence of the current technology on only one material—indium tin oxide (ITO). Even though ITO still remains a highly efficient material, its high cost and the worldwide scarcity of indium creates an urgency for finding an alternative. In this regard, doped zinc oxide (ZnO), in particular, solution-processed aluminum doped ZnO (AZO), is emerging as a leading candidate to replace ITO due to its high abundant and exceptional physical/chemical properties. In this mini review, recent progress in the development of solution-processed AZO is presented. Beside the systematic review of the literature, the solution processable approaches used to synthesize AZO and the effect of aluminum doping content on the functional properties of AZO are also discussed. Moreover, the co-doping strategy (doping of aluminum with other elements) used to further improve the properties of AZO is also discussed and reviewed in this article. Full article
(This article belongs to the Special Issue Nanomaterials Photonics)
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14 pages, 5183 KB  
Article
Al-Doped ZnO Thin Films with 80% Average Transmittance and 32 Ohms per Square Sheet Resistance: A Genuine Alternative to Commercial High-Performance Indium Tin Oxide
by Ivan Ricardo Cisneros-Contreras, Geraldine López-Ganem, Oswaldo Sánchez-Dena, Yew Hoong Wong, Ana Laura Pérez-Martínez and Arturo Rodríguez-Gómez
Physics 2023, 5(1), 45-58; https://doi.org/10.3390/physics5010004 - 6 Jan 2023
Cited by 12 | Viewed by 6180
Abstract
In this study, a low-sophistication low-cost spray pyrolysis system built by undergraduate students is used to grow aluminum-doped zinc oxide thin films (ZnO:Al). The pyrolysis system was able to grow polycrystalline ZnO:Al with a hexagonal wurtzite structure preferentially oriented on the c-axis, corresponding [...] Read more.
In this study, a low-sophistication low-cost spray pyrolysis system built by undergraduate students is used to grow aluminum-doped zinc oxide thin films (ZnO:Al). The pyrolysis system was able to grow polycrystalline ZnO:Al with a hexagonal wurtzite structure preferentially oriented on the c-axis, corresponding to a hexagonal wurtzite structure, and exceptional reproducibility. The ZnO:Al films were studied as transparent conductive oxides (TCOs). Our best ZnO:Al TCO are found to exhibit an 80% average transmittance in the visible range of the electromagnetic spectrum, a sheet resistance of 32 Ω/□, and an optical bandgap of 3.38 eV. After an extensive optical and nanostructural characterization, we determined that the TCOs used are only 4% less efficient than the best ZnO:Al TCOs reported in the literature. This latter, without neglecting that literature-ZnO:Al TCOs, have been grown by sophisticated deposition techniques such as magnetron sputtering. Consequently, we estimate that our ZnO:Al TCOs can be considered an authentic alternative to high-performance aluminum-doped zinc oxide or indium tin oxide TCOs grown through more sophisticated equipment. Full article
(This article belongs to the Section Applied Physics)
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10 pages, 2213 KB  
Article
The Effect of Transparent Conducting Oxide Films on WO3-Based Electrochromic Devices with Conducting Polymer Electrolytes
by Benedict Wen-Cheun Au, Kah-Yoong Chan, Gregory Soon How Thien, Mian-En Yeoh, Mohd Zainizan Sahdan and Hanabe Chowdappa Ananda Murthy
Polymers 2023, 15(1), 238; https://doi.org/10.3390/polym15010238 - 3 Jan 2023
Cited by 12 | Viewed by 4486
Abstract
Over the past few decades, electrochromism has been a prominent topic in energy-saving applications, which is based on the mechanism of altering the optical transmittance of EC materials under the effect of a small applied voltage. Thus, tungsten oxide (WO3) is [...] Read more.
Over the past few decades, electrochromism has been a prominent topic in energy-saving applications, which is based on the mechanism of altering the optical transmittance of EC materials under the effect of a small applied voltage. Thus, tungsten oxide (WO3) is a significant chemical compound typically applied in electrochromic devices (ECDs) as it is responsible for the optical transmittance variation. In this work, the WO3 films were produced through a sol–gel spin-coating method. The effect of various transparent conducting oxides (TCOs, which are indium-doped tin oxide (ITO), fluorine-doped tin oxide (FTO) glass substrates, and aluminum-doped zinc oxide (AZO)) was investigated in the construction of ECDs. Based on a conducting polymer polypyrene carbonate electrolyte, ITO and aluminum-doped zinc oxide (AZO)-coated glasses were also examined as counter electrodes. The electrode combination employing FTO and ITO as the TCO and counter electrode, respectively, exhibited the most significant coloration efficiency of 72.53 cm2/C. It had coloring and bleaching transmittance of 14% and 56%, respectively, with a large optical modulation of 42%. In addition to that, ECDs with the AZO counter electrode have the advantage of lower intercalation charges compared to ITO and FTO. Hence, this research offers a new avenue for understanding the role of common TCO and counter electrodes in the development of WO3-based ECDs with conducting polymer electrolytes. Full article
(This article belongs to the Special Issue Advances in Polyelectrolytes)
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13 pages, 3793 KB  
Article
Comparative Study of Aluminum-Doped Zinc Oxide, Gallium-Doped Zinc Oxide and Indium-Doped Tin Oxide Thin Films Deposited by Radio Frequency Magnetron Sputtering
by Shadab Khan and Eugen Stamate
Nanomaterials 2022, 12(9), 1539; https://doi.org/10.3390/nano12091539 - 2 May 2022
Cited by 23 | Viewed by 4924
Abstract
A timely replacement of the rather expensive indium-doped tin oxide with aluminum-doped zinc oxide is hindered by the poor uniformity of electronic properties when deposited by magnetron sputtering. Recent results demonstrated the ability to improve the uniformity and to decrease the resistivity of [...] Read more.
A timely replacement of the rather expensive indium-doped tin oxide with aluminum-doped zinc oxide is hindered by the poor uniformity of electronic properties when deposited by magnetron sputtering. Recent results demonstrated the ability to improve the uniformity and to decrease the resistivity of aluminum-doped zinc oxide thin films by decreasing the energy of the oxygen-negative ions assisting in thin film growth by using a tuning electrode. In this context, a comparative study was designed to elucidate if the same phenomenology holds for gallium-doped zinc oxide and indium-doped tin oxide as well. The metal oxide thin films have been deposited in the same setup for similar discharge parameters, and their properties were measured with high spatial resolution and correlated with the erosion track on the target’s surface. Furthermore, the films were also subject to post annealing and degradation tests by wet etching. While the tuning electrode was able to reduce the self-bias for all three materials, only the doped zinc oxide films exhibited properties correlating with the erosion track. Full article
(This article belongs to the Special Issue Wide Band Gap Oxide Based Nanomaterials and Thin Films)
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8 pages, 2136 KB  
Article
Effect of Oxygen Flow Rate on Properties of Aluminum-Doped Indium-Saving Indium Tin Oxide (ITO) Thin Films Sputtered on Preheated Glass Substrates
by Svitlana Petrovska, Ruslan Sergiienko, Bogdan Ilkiv, Takashi Nakamura and Makoto Ohtsuka
Metals 2021, 11(10), 1604; https://doi.org/10.3390/met11101604 - 9 Oct 2021
Cited by 6 | Viewed by 2903
Abstract
Amorphous aluminum-doped indium tin oxide (ITO) thin films with a reduced indium oxide content of 50 mass% were manufactured by co-sputtering of ITO and Al2O3 targets in a mixed argon–oxygen atmosphere onto glass substrates preheated at 523 K. The oxygen [...] Read more.
Amorphous aluminum-doped indium tin oxide (ITO) thin films with a reduced indium oxide content of 50 mass% were manufactured by co-sputtering of ITO and Al2O3 targets in a mixed argon–oxygen atmosphere onto glass substrates preheated at 523 K. The oxygen gas flow rate and heat treatment temperature effects on the electrical, optical and structural properties of the films were studied. Thin films were characterized by means of a four-point probe, ultraviolet–visible-infrared (UV–Vis-IR) spectroscopy and X-ray diffraction. Transmittance of films and crystallization temperature increased as a result of doping of the ITO thin films by aluminum. The increase in oxygen flow rate led to an increase in transmittance and hindering of the crystallization of the aluminum-doped indium saving ITO thin films. It has been found that the film sputtered under optimal conditions showed a volume resistivity of 713 µΩ cm, mobility of 30.8 cm2/V·s, carrier concentration of 2.9 × 1020 cm−3 and transmittance of over 90% in the visible range. Full article
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12 pages, 1873 KB  
Article
Nanostructured Hybrid Metal Mesh as Transparent Conducting Electrodes: Selection Criteria Verification in Perovskite Solar Cells
by John Mohanraj, Chetan R. Singh, Tanaji P. Gujar, C. David Heinrich and Mukundan Thelakkat
Nanomaterials 2021, 11(7), 1783; https://doi.org/10.3390/nano11071783 - 9 Jul 2021
Cited by 9 | Viewed by 4679
Abstract
Nanostructured metal mesh structures demonstrating excellent conductivity and high transparency are one of the promising transparent conducting electrode (TCE) alternatives for indium tin oxide (ITO). Often, these metal nanostructures are to be employed as hybrids along with a conducting filler layer to collect [...] Read more.
Nanostructured metal mesh structures demonstrating excellent conductivity and high transparency are one of the promising transparent conducting electrode (TCE) alternatives for indium tin oxide (ITO). Often, these metal nanostructures are to be employed as hybrids along with a conducting filler layer to collect charge carriers from the network voids and to minimize current and voltage losses. The influence of filler layers on dictating the extent of such ohmic loss is complex. Here, we used a general numerical model to correlate the sheet resistance of the filler, lateral charge transport distance in network voids, metal mesh line width and ohmic losses in optoelectronic devices. To verify this correlation, we prepared gold or copper network electrodes with different line widths and different filler layers, and applied them as TCEs in perovskite solar cells. We show that the photovoltaic parameters scale with the hybrid metal network TCE properties and an Au-network or Cu-network with aluminum-doped zinc oxide (AZO) filler can replace ITO very well, validating our theoretical predictions. Thus, the proposed model could be employed to select an appropriate filler layer for a specific metal mesh electrode geometry and dimensions to overcome the possible ohmic losses in optoelectronic devices. Full article
(This article belongs to the Special Issue Nanomaterial Electrodes)
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13 pages, 38616 KB  
Article
Light-Emitting Biosilica by In Vivo Functionalization of Phaeodactylum tricornutum Diatom Microalgae with Organometallic Complexes
by Danilo Vona, Roberta Ragni, Emiliano Altamura, Paola Albanese, Maria Michela Giangregorio, Stefania Roberta Cicco and Gianluca Maria Farinola
Appl. Sci. 2021, 11(8), 3327; https://doi.org/10.3390/app11083327 - 7 Apr 2021
Cited by 19 | Viewed by 4100
Abstract
In vivo incorporation of a series of organometallic photoluminescent complexes in Phaeodactylum tricornutum diatom shells (frustules) is investigated as a biotechnological route to luminescent biosilica nanostructures. [Ir(ppy)2bpy]+[PF6], [(2,2′-bipyridine)bis(2-phenylpyridinato)iridium(III) hexafluorophosphate], [Ru(bpy)3]2+ 2[PF6 [...] Read more.
In vivo incorporation of a series of organometallic photoluminescent complexes in Phaeodactylum tricornutum diatom shells (frustules) is investigated as a biotechnological route to luminescent biosilica nanostructures. [Ir(ppy)2bpy]+[PF6], [(2,2′-bipyridine)bis(2-phenylpyridinato)iridium(III) hexafluorophosphate], [Ru(bpy)3]2+ 2[PF6], [tris(2,2′-bipyridine)ruthenium(II) hexafluorophosphate], AlQ3 (tris-(8-hydroxyquinoline)aluminum), and ZnQ2 (bis-8-hydroxyquinoline-zinc) are used as model complexes to explore the potentiality and generality of the investigated process. The luminescent complexes are added to the diatom culture, and the resulting luminescent silica nanostructures are isolated by an acid-oxidative treatment that removes the organic cell matter without altering both frustule morphology and photoluminescence of incorporated emitters. Results show that, except for ZnQ2, the protocol successfully leads to the incorporation of complexes into the biosilica. The spontaneous self-adhering ability of both bare and doped Phaeodactylum tricornutum cells on conductive indium tin oxide (ITO)-coated glass slides is observed, which can be exploited to generate dielectric biofilms of living microorganisms with luminescent silica shells. In general, this protocol can be envisaged as a profitable route to new functional nanostructured materials for photonics, sensing, or biomedicine via in vivo chemical modification of diatom frustules with organometallic emitters. Full article
(This article belongs to the Special Issue New Frontiers in Diatom Nanotechnology)
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28 pages, 7376 KB  
Review
Plasma Synthesis of Advanced Metal Oxide Nanoparticles and Their Applications as Transparent Conducting Oxide Thin Films
by Hong Yong Sohn and Arun Murali
Molecules 2021, 26(5), 1456; https://doi.org/10.3390/molecules26051456 - 7 Mar 2021
Cited by 29 | Viewed by 5725
Abstract
This article reviews and summarizes work recently performed in this laboratory on the synthesis of advanced transparent conducting oxide nanopowders by the use of plasma. The nanopowders thus synthesized include indium tin oxide (ITO), zinc oxide (ZnO) and tin-doped zinc oxide (TZO), aluminum-doped [...] Read more.
This article reviews and summarizes work recently performed in this laboratory on the synthesis of advanced transparent conducting oxide nanopowders by the use of plasma. The nanopowders thus synthesized include indium tin oxide (ITO), zinc oxide (ZnO) and tin-doped zinc oxide (TZO), aluminum-doped zinc oxide (AZO), and indium-doped zinc oxide (IZO). These oxides have excellent transparent conducting properties, among other useful characteristics. ZnO and TZO also has photocatalytic properties. The synthesis of these materials started with the selection of the suitable precursors, which were injected into a non-transferred thermal plasma and vaporized followed by vapor-phase reactions to form nanosized oxide particles. The products were analyzed by the use of various advanced instrumental analysis techniques, and their useful properties were tested by different appropriate methods. The thermal plasma process showed a considerable potential as an efficient technique for synthesizing oxide nanopowders. This process is also suitable for large scale production of nano-sized powders owing to the availability of high temperatures for volatilizing reactants rapidly, followed by vapor phase reactions and rapid quenching to yield nano-sized powder. Full article
(This article belongs to the Special Issue Inorganic Nanochemistry)
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12 pages, 2003 KB  
Article
Atomic Layer-Deposited Al-Doped ZnO Thin Films for Display Applications
by Dimitre Dimitrov, Che-Liang Tsai, Stefan Petrov, Vera Marinova, Dimitrina Petrova, Blagovest Napoleonov, Blagoy Blagoev, Velichka Strijkova, Ken Yuh Hsu and Shiuan Huei Lin
Coatings 2020, 10(6), 539; https://doi.org/10.3390/coatings10060539 - 31 May 2020
Cited by 56 | Viewed by 7411
Abstract
The integration of high uniformity, conformal and compact transparent conductive layers into next generation indium tin oxide (ITO)-free optoelectronics, including wearable and bendable structures, is a huge challenge. In this study, we demonstrate the transparent and conductive functionality of aluminum-doped zinc oxide (AZO) [...] Read more.
The integration of high uniformity, conformal and compact transparent conductive layers into next generation indium tin oxide (ITO)-free optoelectronics, including wearable and bendable structures, is a huge challenge. In this study, we demonstrate the transparent and conductive functionality of aluminum-doped zinc oxide (AZO) thin films deposited on glass as well as on polyethylene terephthalate (PET) flexible substrates by using an atomic layer deposition (ALD) technique. AZO thin films possess high optical transmittance at visible and near-infrared spectral range and electrical properties competitive to commercial ITO layers. AZO layers deposited on flexible PET substrates demonstrate stable sheet resistance over 1000 bending cycles. Based on the performed optical and electrical characterizations, several applications of ALD AZO as transparent conductive layers are shown—AZO/glass-supported liquid crystal (LC) display and AZO/PET-based flexible polymer-dispersed liquid crystal (PDLC) devices. Full article
(This article belongs to the Special Issue Optical Thin Films and Structures: Design and Advanced Applications)
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7 pages, 1706 KB  
Article
Effect of Nitrogen Flow in Hydrogen/Nitrogen Plasma Annealing on Aluminum-Doped Zinc Oxide/Tin-Doped Indium Oxide Bilayer Films Applied in Low Emissivity Glass
by Shang-Chou Chang and Huang-Tian Chan
Crystals 2019, 9(6), 310; https://doi.org/10.3390/cryst9060310 - 17 Jun 2019
Cited by 8 | Viewed by 4565
Abstract
Low emissivity glass (low-e glass), which is often used in energy-saving buildings, has high thermal resistance and visible light transmission. Heavily doped wide band gap semiconductors like aluminum-doped zinc oxide (AZO) and tin-doped indium oxide (ITO) have these properties, especially after certain treatment. [...] Read more.
Low emissivity glass (low-e glass), which is often used in energy-saving buildings, has high thermal resistance and visible light transmission. Heavily doped wide band gap semiconductors like aluminum-doped zinc oxide (AZO) and tin-doped indium oxide (ITO) have these properties, especially after certain treatment. In our experiments, in-line sputtered AZO and ITO bilayer (AZO/ITO) films on glass substrates were prepared first. The deposition of AZO/ITO films was following by annealing in hydrogen/nitrogen (H2/N2) plasma with different N2 flows. The structure and optical and electrical properties of AZO/ITO films were surveyed. Experiment results indicated that N2 flow in H2/N2 plasma annealing of AZO/ITO films slightly modified the structure and electrical properties of AZO/ITO films. The X-ray diffraction peak corresponding to zinc oxide (002) crystal plane slightly shifted to a higher angle and its full width at half maximum decreased as the N2 flow increased. The electrical resistivity and the emissivity reduced for the plasma annealed AZO/ITO films when the N2 flow was raised. The optimum H2/N2 gas flow was 100/100 for plasma annealed AZO/ITO films in this work for low emissivity application. The emissivity and average visible transmittance for H2/N2 = 100/100 plasma annealed AZO/ITO were 0.07 and 80%, respectively, lying in the range of commercially used low emissivity glass. Full article
(This article belongs to the Special Issue Functional Oxide Based Thin-Film Materials)
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