Next Article in Journal
Control of Lateral Composition Distribution in Graded Films of Soluble Solid Systems A1−xBx by Partitioned Dual-Beam Pulsed Laser Deposition
Next Article in Special Issue
Special Issue: “Optical Thin Films and Structures: Design and Advanced Applications”
Previous Article in Journal
Polyethylene Glycol (PEG) Modified Porous Ca5(PO4)2SiO4 Bioceramics: Structural, Morphologic and Bioactivity Analysis
Previous Article in Special Issue
Amphiphilic Poly(vinyl Alcohol) Copolymers Designed for Optical Sensor Applications—Synthesis and Properties
Article

Atomic Layer-Deposited Al-Doped ZnO Thin Films for Display Applications

1
Institute of Solid State Physics, Bulgarian Academy of Sciences, 1784 Sofia, Bulgaria
2
Institute of Optical Materials and Technologies, Bulgarian Academy of Sciences, 1113 Sofia, Bulgaria
3
Department of Photonics, National Chiao Tung University, Hsinchu 30010, Taiwan
4
Department of Electrophysics, National Chiao Tung University, Hsinchu 30010, Taiwan
5
Faculty of Engineering, South-West University “Neofit Rilski”, 2700 Blagoevgrad, Bulgaria
*
Authors to whom correspondence should be addressed.
Coatings 2020, 10(6), 539; https://doi.org/10.3390/coatings10060539
Received: 30 April 2020 / Revised: 20 May 2020 / Accepted: 25 May 2020 / Published: 31 May 2020
(This article belongs to the Special Issue Optical Thin Films and Structures: Design and Advanced Applications)
The integration of high uniformity, conformal and compact transparent conductive layers into next generation indium tin oxide (ITO)-free optoelectronics, including wearable and bendable structures, is a huge challenge. In this study, we demonstrate the transparent and conductive functionality of aluminum-doped zinc oxide (AZO) thin films deposited on glass as well as on polyethylene terephthalate (PET) flexible substrates by using an atomic layer deposition (ALD) technique. AZO thin films possess high optical transmittance at visible and near-infrared spectral range and electrical properties competitive to commercial ITO layers. AZO layers deposited on flexible PET substrates demonstrate stable sheet resistance over 1000 bending cycles. Based on the performed optical and electrical characterizations, several applications of ALD AZO as transparent conductive layers are shown—AZO/glass-supported liquid crystal (LC) display and AZO/PET-based flexible polymer-dispersed liquid crystal (PDLC) devices. View Full-Text
Keywords: Al-doped ZnO; ALD technique; transparent conductive layers; LC display; flexible PDLC devices Al-doped ZnO; ALD technique; transparent conductive layers; LC display; flexible PDLC devices
Show Figures

Figure 1

MDPI and ACS Style

Dimitrov, D.; Tsai, C.-L.; Petrov, S.; Marinova, V.; Petrova, D.; Napoleonov, B.; Blagoev, B.; Strijkova, V.; Hsu, K.Y.; Lin, S.H. Atomic Layer-Deposited Al-Doped ZnO Thin Films for Display Applications. Coatings 2020, 10, 539. https://doi.org/10.3390/coatings10060539

AMA Style

Dimitrov D, Tsai C-L, Petrov S, Marinova V, Petrova D, Napoleonov B, Blagoev B, Strijkova V, Hsu KY, Lin SH. Atomic Layer-Deposited Al-Doped ZnO Thin Films for Display Applications. Coatings. 2020; 10(6):539. https://doi.org/10.3390/coatings10060539

Chicago/Turabian Style

Dimitrov, Dimitre, Che-Liang Tsai, Stefan Petrov, Vera Marinova, Dimitrina Petrova, Blagovest Napoleonov, Blagoy Blagoev, Velichka Strijkova, Ken Y. Hsu, and Shiuan H. Lin 2020. "Atomic Layer-Deposited Al-Doped ZnO Thin Films for Display Applications" Coatings 10, no. 6: 539. https://doi.org/10.3390/coatings10060539

Find Other Styles
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Article Access Map by Country/Region

1
Back to TopTop