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Search Results (941)

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Keywords = Silicon Carbide (SiC)

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22 pages, 7820 KiB  
Article
A Junction Temperature Prediction Method Based on Multivariate Linear Regression Using Current Fall Characteristics of SiC MOSFETs
by Haihong Qin, Yang Zhang, Yu Zeng, Yuan Kang, Ziyue Zhu and Fan Wu
Sensors 2025, 25(15), 4828; https://doi.org/10.3390/s25154828 - 6 Aug 2025
Abstract
The junction temperature (Tj) is a key parameter reflecting the thermal behavior of Silicon carbide (SiC) MOSFETs and is essential for condition monitoring and reliability assessment in power electronic systems. However, the limited temperature sensitivity of switching characteristics makes it [...] Read more.
The junction temperature (Tj) is a key parameter reflecting the thermal behavior of Silicon carbide (SiC) MOSFETs and is essential for condition monitoring and reliability assessment in power electronic systems. However, the limited temperature sensitivity of switching characteristics makes it difficult for traditional single temperature-sensitive electrical parameters (TSEPs) to achieve accurate estimation. To address this challenge and enable practical thermal sensing applications, this study proposes an accurate, application-oriented Tj estimation method based on multivariate linear regression (MLR) using turn-off current fall time (tfi) and fall loss (Efi) as complementary TSEPs. First, the feasibility of using current fall time and current fall energy loss as TSEPs is demonstrated. Then, a coupled junction temperature prediction model is developed based on multivariate linear regression using tfi and Efi. The proposed method is experimentally validated through comparative analysis. Experimental results demonstrate that the proposed method achieves high prediction accuracy, highlighting its effectiveness and superiority in MLR approach based on the current fall phase characteristics of SiC MOSFETs. This method offers promising prospects for enhancing the condition monitoring, reliability assessment, and intelligent sensing capabilities of power electronics systems. Full article
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16 pages, 2036 KiB  
Article
Scalable Chemical Vapor Deposition of Silicon Carbide Thin Films for Photonic Integrated Circuit Applications
by Souryaya Dutta, Alex Kaloyeros, Animesh Nanaware and Spyros Gallis
Appl. Sci. 2025, 15(15), 8603; https://doi.org/10.3390/app15158603 - 2 Aug 2025
Viewed by 286
Abstract
Highly integrable silicon carbide (SiC) has emerged as a promising platform for photonic integrated circuits (PICs), offering a comprehensive set of material and optical properties that are ideal for the integration of nonlinear devices and solid-state quantum defects. However, despite significant progress in [...] Read more.
Highly integrable silicon carbide (SiC) has emerged as a promising platform for photonic integrated circuits (PICs), offering a comprehensive set of material and optical properties that are ideal for the integration of nonlinear devices and solid-state quantum defects. However, despite significant progress in nanofabrication technology, the development of SiC on an insulator (SiCOI)-based photonics faces challenges due to fabrication-induced material optical losses and complex processing steps. An alternative approach to mitigate these fabrication challenges is the direct deposition of amorphous SiC on an insulator (a-SiCOI). However, there is a lack of systematic studies aimed at producing high optical quality a-SiC thin films, and correspondingly, on evaluating and determining their optical properties in the telecom range. To this end, we have studied a single-source precursor, 1,3,5-trisilacyclohexane (TSCH, C3H12Si3), and chemical vapor deposition (CVD) processes for the deposition of SiC thin films in a low-temperature range (650–800 °C) on a multitude of different substrates. We have successfully demonstrated the fabrication of smooth, uniform, and stoichiometric a-SiCOI thin films of 20 nm to 600 nm with a highly controlled growth rate of ~0.5 Å/s and minimal surface roughness of ~5 Å. Spectroscopic ellipsometry and resonant micro-photoluminescence excitation spectroscopy and mapping reveal a high index of refraction (~2.7) and a minimal absorption coefficient (<200 cm−1) in the telecom C-band, demonstrating the high optical quality of the films. These findings establish a strong foundation for scalable production of high-quality a-SiCOI thin films, enabling their application in advanced chip-scale telecom PIC technologies. Full article
(This article belongs to the Section Materials Science and Engineering)
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12 pages, 8945 KiB  
Article
Effect of Si Addition on Microstructure and Mechanical Properties of SiC Ceramic Fabricated by Direct LPBF with CVI Technology
by Yipu Wang, Pei Wang, Liqun Li, Jian Zhang, Yulei Zhang, Jin Peng, Xingxing Wang, Nan Kang, Mohamed El Mansori and Konda Gokuldoss Prashanth
Appl. Sci. 2025, 15(15), 8585; https://doi.org/10.3390/app15158585 - 1 Aug 2025
Viewed by 172
Abstract
In this paper, SiC and Si/SiC ceramics were fabricated using direct laser powder bed fusion with chemical vapor infiltration. Their microstructure, mechanical properties and the impacts of silicon addition were analyzed. The incorporation of silicon led to an increase in the relative density [...] Read more.
In this paper, SiC and Si/SiC ceramics were fabricated using direct laser powder bed fusion with chemical vapor infiltration. Their microstructure, mechanical properties and the impacts of silicon addition were analyzed. The incorporation of silicon led to an increase in the relative density of the silicon carbide ceramics from 76.4% to 78.3% and the compression strength increased from 39 ± 13 MPa to 90 ± 8 MPa after laser powder bed fusion with chemical vapor infiltration. The melting and re-solidification of silicon allows the silicon to encapsulate the silicon carbide grains, changing the microstructure and the failure mechanism of the silicon carbide ceramics, resulting in a small amount of silicon residue. In the LPBF-CVI SiC ceramic specimen, the LPBF-formed SiC exhibits a microhardness of 24.2 ± 1.0 GPa. In LPBF-CVI Si/SiC, the spherical dual-phase structure displays a moderately increased hardness (25.9 ± 4.4 GPa), and the CVI-formed SiC exhibits a hardness of 55.3 ± 9.3 GPa. Full article
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14 pages, 4080 KiB  
Article
High-Compressive-Strength Silicon Carbide Ceramics with Enhanced Mechanical Performance
by Zijun Qian, Kang Li, Yabin Zhou, Hao Xu, Haiyan Qian and Yihua Huang
Materials 2025, 18(15), 3598; https://doi.org/10.3390/ma18153598 - 31 Jul 2025
Viewed by 220
Abstract
This study demonstrates the successful fabrication of high-performance reaction-bonded silicon carbide (RBSC) ceramics through an optimized liquid silicon infiltration (LSI) process employing multi-modal SiC particle gradation and nano-carbon black (0.6 µm) additives. By engineering porous preforms with hierarchical SiC distributions and tailored carbon [...] Read more.
This study demonstrates the successful fabrication of high-performance reaction-bonded silicon carbide (RBSC) ceramics through an optimized liquid silicon infiltration (LSI) process employing multi-modal SiC particle gradation and nano-carbon black (0.6 µm) additives. By engineering porous preforms with hierarchical SiC distributions and tailored carbon sources, the resulting ceramics achieved a compressive strength of 2393 MPa and a flexural strength of 380 MPa, surpassing conventional RBSC systems. Microstructural analyses revealed homogeneous β-SiC formation and crack deflection mechanisms as key contributors to mechanical enhancement. Ultrafine SiC particles (0.5–2 µm) refined pore architectures and mediated capillary dynamics during infiltration, enabling nanoscale dispersion of residual silicon phases and minimizing interfacial defects. Compared to coarse-grained counterparts, the ultrafine SiC system exhibited a 23% increase in compressive strength, attributed to reduced sintering defects and enhanced load transfer efficiency. This work establishes a scalable strategy for designing RBSC ceramics for extreme mechanical environments, bridging material innovation with applications in high-stress structural components. Full article
(This article belongs to the Section Advanced and Functional Ceramics and Glasses)
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23 pages, 16399 KiB  
Article
Design and Implementation of a Full SiC-Based Phase-Shifted Full-Bridge DC-DC Converter with Nanocrystalline-Cored Magnetics for Railway Battery Charging Applications
by Fatih Enes Gocen, Salih Baris Ozturk, Mehmet Hakan Aksit, Gurkan Dugan, Benay Cakmak and Caner Demir
Energies 2025, 18(15), 3945; https://doi.org/10.3390/en18153945 - 24 Jul 2025
Viewed by 256
Abstract
This paper presents the design and implementation of a high-efficiency, full silicon carbide (SiC)-based center-tapped phase-shifted full-bridge (PSFB) converter for NiCd battery charging applications in railway systems. The converter utilizes SiC MOSFET modules on the primary side and SiC diodes on the secondary [...] Read more.
This paper presents the design and implementation of a high-efficiency, full silicon carbide (SiC)-based center-tapped phase-shifted full-bridge (PSFB) converter for NiCd battery charging applications in railway systems. The converter utilizes SiC MOSFET modules on the primary side and SiC diodes on the secondary side, resulting in significant efficiency improvements due to the superior switching characteristics and high-temperature tolerance inherent in SiC devices. A nanocrystalline-cored center-tapped transformer is optimized to minimize voltage stress on the rectifier diodes. Additionally, the use of a nanocrystalline core provides high saturation flux density, low core loss, and excellent permeability, particularly at high frequencies, which significantly enhances system efficiency. The converter also compensates for temperature fluctuations during operation, enabling a wide and adjustable output voltage range according to the temperature differences. A prototype of the 10-kW, 50-kHz PSFB converter, operating with an input voltage range of 700–750 V and output voltage of 77–138 V, was developed and tested both through simulations and experimentally. The converter achieved a maximum efficiency of 97% and demonstrated a high power density of 2.23 kW/L, thereby validating the effectiveness of the proposed design for railway battery charging applications. Full article
(This article belongs to the Special Issue Advancements in Electromagnetic Technology for Electrical Engineering)
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18 pages, 5469 KiB  
Article
Site Application of Thermally Conductive Concrete Pavement: A Comparison of Its Thermal Effectiveness with Normal Concrete Pavement
by Joo-Young Kim and Jae-Suk Ryou
Materials 2025, 18(15), 3444; https://doi.org/10.3390/ma18153444 - 23 Jul 2025
Viewed by 289
Abstract
In this study, the thermal effectiveness of thermally conductive concrete pavements (TCPs) using silicon carbide (SiC) as a fine aggregate replacement was investigated, compared with that of ordinary Portland cement pavements (OPCPs). The most important purpose of this study is to improve the [...] Read more.
In this study, the thermal effectiveness of thermally conductive concrete pavements (TCPs) using silicon carbide (SiC) as a fine aggregate replacement was investigated, compared with that of ordinary Portland cement pavements (OPCPs). The most important purpose of this study is to improve the thermal performance of concrete pavement. Additionally, this study utilized improved thermal properties to enhance the efficiency of pavement heating to prevent icing and snow stacking. Both mixtures met the Korean standards for air content (4.5–6%) and slump (80–150 mm), demonstrating adequate workability. TCP exhibited a higher mechanical performance, with average compressive and flexural strengths of 42.88 MPa and 7.35 MPa, respectively, exceeding the required targets of a 30 MPa compressive strength and a 4.5 MPa flexural strength. The improved strength was mainly attributed to the filler effect and partly due to the van der Waals interactions of the SiC particles. Thermal conductivity tests showed a significant improvement in the TCP (3.20 W/mK), which was approximately twice that of OPCP (1.59 W/mK), indicating an enhanced heat transfer efficiency. In winter field tests, TCP effectively maintained high surface temperatures, overcoming heat loss and outperforming the OPCP. In the site experiment, thermal efficiency was clearly shown in the temperature at the center of the TCP, which was 3.5 °C higher than at the center of the OPCP at the coldest time. These improvements suggest that SiC-reinforced concrete pavements can be practically utilized for effective snow removal and ice mitigation in road systems. Full article
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23 pages, 6645 KiB  
Article
Encapsulation Process and Dynamic Characterization of SiC Half-Bridge Power Module: Electro-Thermal Co-Design and Experimental Validation
by Kaida Cai, Jing Xiao, Xingwei Su, Qiuhui Tang and Huayuan Deng
Micromachines 2025, 16(7), 824; https://doi.org/10.3390/mi16070824 - 19 Jul 2025
Viewed by 444
Abstract
Silicon carbide (SiC) half-bridge power modules are widely utilized in new energy power generation, electric vehicles, and industrial power supplies. To address the research gap in collaborative validation between electro-thermal coupling models and process reliability, this paper proposes a closed-loop methodology of “design-simulation-process-validation”. [...] Read more.
Silicon carbide (SiC) half-bridge power modules are widely utilized in new energy power generation, electric vehicles, and industrial power supplies. To address the research gap in collaborative validation between electro-thermal coupling models and process reliability, this paper proposes a closed-loop methodology of “design-simulation-process-validation”. This approach integrates in-depth electro-thermal simulation (LTspice XVII/COMSOL Multiphysics 6.3) with micro/nano-packaging processes (sintering/bonding). Firstly, a multifunctional double-pulse test board was designed for the dynamic characterization of SiC devices. LTspice simulations revealed the switching characteristics under an 800 V operating condition. Subsequently, a thermal simulation model was constructed in COMSOL to quantify the module junction temperature gradient (25 °C → 80 °C). Key process parameters affecting reliability were then quantified, including conductive adhesive sintering (S820-F680, 39.3 W/m·K), high-temperature baking at 175 °C, and aluminum wire bonding (15 mil wire diameter and 500 mW ultrasonic power/500 g bonding force). Finally, a double-pulse dynamic test platform was established to capture switching transient characteristics. Experimental results demonstrated the following: (1) The packaged module successfully passed the 800 V high-voltage validation. Measured drain current (4.62 A) exhibited an error of <0.65% compared to the simulated value (4.65 A). (2) The simulated junction temperature (80 °C) was significantly below the safety threshold (175 °C). (3) Microscopic examination using a Leica IVesta 3 microscope (55× magnification) confirmed the absence of voids at the sintering and bonding interfaces. (4) Frequency-dependent dynamic characterization revealed a 6 nH parasitic inductance via Ansys Q3D 2025 R1 simulation, with experimental validation at 8.3 nH through double-pulse testing. Thermal evaluations up to 200 kHz indicated 109 °C peak temperature (below 175 °C datasheet limit) and low switching losses. This work provides a critical process benchmark for the micro/nano-manufacturing of high-density SiC modules. Full article
(This article belongs to the Special Issue Recent Advances in Micro/Nanofabrication, 2nd Edition)
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18 pages, 7056 KiB  
Article
Control of the SiC Polytypes in SiC Bonded Diamond Materials
by Mathias Herrmann, Jesus Andres Quintana Freire, Björn Matthey, Steffen Kunze and Sören Höhn
Ceramics 2025, 8(3), 90; https://doi.org/10.3390/ceramics8030090 - 18 Jul 2025
Viewed by 236
Abstract
Silicon carbide-bonded diamond materials produced by pressureless reaction infiltration of diamond preforms have high wear resistance and thermal conductivity, making them ideal for a range of industrial applications. During infiltration, the Si is typically converted to cubic β-SiC. The aim of the work [...] Read more.
Silicon carbide-bonded diamond materials produced by pressureless reaction infiltration of diamond preforms have high wear resistance and thermal conductivity, making them ideal for a range of industrial applications. During infiltration, the Si is typically converted to cubic β-SiC. The aim of the work was to investigate the extent to which the formation of hexagonal α-SiC can be achieved by adding α-SiC or AlN nuclei to the preform. Detailed microstructural investigations using XRD, high-resolution FE-SEM, and EBSD analyses show that both AlN and SiC serve as nuclei for α-SiC. Regardless of this, a large proportion of β-SiC forms on the surface of the diamonds. However, the added nuclei change the structure of the SiC framework that forms. Full article
(This article belongs to the Special Issue Advances in Ceramics, 3rd Edition)
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24 pages, 6475 KiB  
Review
Short-Circuit Detection and Protection Strategies for GaN E-HEMTs in High-Power Applications: A Review
by Haitz Gezala Rodero, David Garrido Díez, Iosu Aizpuru Larrañaga and Igor Baraia-Etxaburu
Electronics 2025, 14(14), 2875; https://doi.org/10.3390/electronics14142875 - 18 Jul 2025
Viewed by 402
Abstract
Gallium nitride (GaN) enhancement-mode high-electron-mobility transistors ( E-HEMTs) deliver superior performance compared to traditional silicon (Si) and silicon carbide (SiC) counterparts. Their faster switching speeds, lower on-state resistances, and higher operating frequencies enable more efficient and compact power converters. However, their integration into [...] Read more.
Gallium nitride (GaN) enhancement-mode high-electron-mobility transistors ( E-HEMTs) deliver superior performance compared to traditional silicon (Si) and silicon carbide (SiC) counterparts. Their faster switching speeds, lower on-state resistances, and higher operating frequencies enable more efficient and compact power converters. However, their integration into high-power applications is limited by critical reliability concerns, particularly regarding their short-circuit (SC) withstand capability and overvoltage (OV) resilience. GaN devices typically exhibit SC withstand times of only a few hundred nanoseconds, needing ultrafast protection circuits, which conventional desaturation (DESAT) methods cannot adequately provide. Furthermore, their high switching transients increase the risk of false activation events. The lack of avalanche capability and the dynamic nature of GaN breakdown voltage exacerbate issues related to OV stress during fault conditions. Although SC-related behaviour in GaN devices has been previously studied, a focused and comprehensive review of protection strategies tailored to GaN technology remains lacking. This paper fills that gap by providing an in-depth analysis of SC and OV failure phenomena, coupled with a critical evaluation of current and next-generation protection schemes suitable for GaN-based high-power converters. Full article
(This article belongs to the Special Issue Advances in Semiconductor GaN and Applications)
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14 pages, 5155 KiB  
Article
Erosion of AISI 4340 and AISI 8620 Steels with High Ductility Caused by SiC Particles
by Juan R. Laguna-Camacho, Ezequiel A. Gallardo-Hernández, Manuel Vite-Torres, Celia M. Calderón-Ramón, Víctor Velázquez-Martínez, Silvia M. Sánchez-Yáñez and Karla I. Zermeño-De Lojo
Metals 2025, 15(7), 800; https://doi.org/10.3390/met15070800 - 16 Jul 2025
Viewed by 241
Abstract
In this study, solid particle erosion tests were conducted to evaluate the resistance of AISI 4340 (EN24) and 8620 alloy steels against silicon carbide (SiC). These steels were selected due to their high hardness, yield strength (σy), ultimate tensile strength (σ [...] Read more.
In this study, solid particle erosion tests were conducted to evaluate the resistance of AISI 4340 (EN24) and 8620 alloy steels against silicon carbide (SiC). These steels were selected due to their high hardness, yield strength (σy), ultimate tensile strength (σuts) and elongation (%), which are significant parameters, influencing wear resistance. An erosion rig based on the ASTM G76-95 standard was used to perform the testing. Tests were carried out using different impact angles, 30°, 45°, 60° and 90°, with a particle velocity of 24 ± 2 m/s. The abrasive flow rate was 0.7 ± 0.5 g/min and the temperature was between 35 °C and 40 °C. Characterization techniques such as SEM were employed to identify the chemical composition of AISI 4340 and AISI 8620 steels and optical microscopy to determine the morphology of SiC abrasive particles. In addition, the SiC particle size was between 350 and 450 µm; it was determined by the particle size distribution technique. SEM micrographs were obtained to classify the wear mechanisms, characterized by micro-cutting, micro-ploughing, grooves, pitting actions and embedded particles on the surface at 30° and 90°. The results showed that AISI 8620 steel exhibited higher erosion resistance than AISI 4340 steel. Finally, AFM was used to evaluate the roughness variations before and after erosion tests, specifically in the central zone of the wear scars at 30° and 90° for both materials. Full article
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12 pages, 3006 KiB  
Article
A Comparative Study on Synthesizing SiC via Carbonization of Si (001) and Si (111) Substrates by Chemical Vapor Deposition
by Teodor Milenov, Ivalina Avramova, Vladimir Mehandziev, Ivan Zahariev, Georgi Avdeev, Daniela Karashanova, Biliana Georgieva, Blagoy Blagoev, Kiril Kirilov, Peter Rafailov, Stefan Kolev, Dimitar Dimov, Desislava Karaivanova, Dobromir Kalchevski, Dimitar Trifonov, Ivan Grozev and Valentin Popov
Materials 2025, 18(14), 3239; https://doi.org/10.3390/ma18143239 - 9 Jul 2025
Viewed by 271
Abstract
This work presents a comparative analysis of the results of silicon carbide synthesis through the carbonization of Si (001) and Si (111) substrates in the temperature range 1130–1140 °C. The synthesis involved chemical vapor deposition utilizing thermally stimulated methane reduction in a hydrogen [...] Read more.
This work presents a comparative analysis of the results of silicon carbide synthesis through the carbonization of Si (001) and Si (111) substrates in the temperature range 1130–1140 °C. The synthesis involved chemical vapor deposition utilizing thermally stimulated methane reduction in a hydrogen gas stream. The experiments employed an Oxford Nanofab Plasmalab System 100 apparatus on substrates from which the native oxide was removed according to established protocols. To minimize random experimental variations (e.g., deviations from set parameters), short synthesis durations of 3 and 5 min were analyzed. The resultant thin films underwent evaluations through several techniques, including X-ray photoelectron spectroscopy, X-ray diffractometry, optical emission spectroscopy with glow discharge, and transmission electron microscopy. A comparison and analysis were conducted between the results from both substrate orientations. Full article
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12 pages, 7213 KiB  
Article
Planar Wide-Angle Imaging System with a Single-Layer SiC Metalens
by Yiyang Liu, Qiangbo Zhang, Changwei Zhang, Mengguang Wang and Zhenrong Zheng
Nanomaterials 2025, 15(13), 1046; https://doi.org/10.3390/nano15131046 - 5 Jul 2025
Viewed by 418
Abstract
Optical systems with wide field-of-view (FOV) imaging capabilities are crucial for applications ranging from biomedical diagnostics to remote sensing, yet conventional wide-angle optics face integration challenges in compact platforms. Here, we present the design and experimental demonstration of a single-layer silicon carbide (SiC) [...] Read more.
Optical systems with wide field-of-view (FOV) imaging capabilities are crucial for applications ranging from biomedical diagnostics to remote sensing, yet conventional wide-angle optics face integration challenges in compact platforms. Here, we present the design and experimental demonstration of a single-layer silicon carbide (SiC) metalens achieving a 90° total FOV, whose planar structure and small footprint address the challenges. This design is driven by a gradient-based numerical optimization strategy, Gradient-Optimized Phase Profile Shaping (GOPP), which optimizes the phase profile to accommodate the angle-dependent requirements. Combined with a front aperture, the GOPP-generated phase profile enables off-axis aberration control within a planar structure. Operating at 803 nm with a focal length of 1 mm (NA = 0.25), the fabricated metalens demonstrated focusing capabilities across the wide FOV, enabling effective wide-angle imaging. This work demonstrates the feasibility of using numerical optimization to realize single-layer metalens with challenging wide FOV capabilities, offering a promising route towards highly compact imagers for applications such as endoscopy and dermoscopy. Full article
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15 pages, 10531 KiB  
Article
Sensorless Dual TSEP (Vth, Rdson) Implementation for Junction Temperature Measurement in Parallelized SiC MOSFETs
by Louis Alauzet, Patrick Tounsi and Jean-Pierre Fradin
Energies 2025, 18(13), 3470; https://doi.org/10.3390/en18133470 - 1 Jul 2025
Viewed by 347
Abstract
This article presents a method for detecting the temperature distribution of two parallelized Silicon Carbide (SiC) MOSFETs. Two thermally sensitive electrical parameters (TSEPs), namely the on-state resistance (Rdson) and the threshold voltage (Vth), [...] Read more.
This article presents a method for detecting the temperature distribution of two parallelized Silicon Carbide (SiC) MOSFETs. Two thermally sensitive electrical parameters (TSEPs), namely the on-state resistance (Rdson) and the threshold voltage (Vth), are introduced. A comparison of the temperatures interpolated by Vth and Rdson shows disparity, enabling the detection of individual junction temperatures. Vth instability and its measurement are discussed for SiC devices. Experimental results show that, depending on the instability of the Vth and the sensitivity of the two TSEPs at certain temperatures, a combination of different TSEPs could be a solution for extracting the maximum junction temperature of parallelized devices. Full article
(This article belongs to the Special Issue Advances in Thermal Management and Reliability of Electronic Systems)
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24 pages, 7077 KiB  
Article
Manufacturing Process of Stealth Unmanned Aerial Vehicle Exhaust Nozzles Based on Carbon Fiber-Reinforced Silicon Carbide Matrix Composites
by Byeong-Joo Kim, Jae Won Kim, Man Young Lee, Jong Kyoo Park, Nam Choon Cho and Cheul Woo Baek
Aerospace 2025, 12(7), 600; https://doi.org/10.3390/aerospace12070600 - 1 Jul 2025
Viewed by 418
Abstract
This study presents the development of a manufacturing process for a double-serpentine (DS) exhaust nozzle for unmanned aerial vehicles (UAVs) based on carbon fiber-reinforced silicon carbide matrix composites (C/SiCs). The DS nozzle is designed to reduce infrared emissions from hot exhaust plumes, a [...] Read more.
This study presents the development of a manufacturing process for a double-serpentine (DS) exhaust nozzle for unmanned aerial vehicles (UAVs) based on carbon fiber-reinforced silicon carbide matrix composites (C/SiCs). The DS nozzle is designed to reduce infrared emissions from hot exhaust plumes, a critical factor in enhancing stealth performance during UAV operations. The proposed nozzle structure was fabricated using a multilayer configuration consisting of an inner C/SiC layer for thermal and oxidation resistance, a silica–phenolic insulation layer to suppress heat transfer, and an outer carbon fiber-reinforced polymer matrix composite (CFRPMC) for mechanical reinforcement. The C/SiC layer was produced by liquid silicon infiltration, preceded by pyrolysis and densification of a phenolic-based CFRPMC preform. The final nozzle was assembled through precision machining and bonding of segmented components, followed by lamination of the insulation and outer layers. Mechanical and thermal property tests confirmed the structural integrity and performance under high-temperature conditions. Additionally, oxidation and ablation tests demonstrated the excellent durability of the developed C/SiC. The results indicate that the developed process is suitable for producing large-scale, complex-shaped, high-temperature composite structures for stealth UAV applications. Full article
(This article belongs to the Section Aeronautics)
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17 pages, 4643 KiB  
Article
Semiconductor Wafer Flatness and Thickness Measurement Using Frequency Scanning Interferometry Technology
by Weisheng Cheng, Zexiao Li, Xuanzong Wu, Shuangxiong Yin, Bo Zhang and Xiaodong Zhang
Photonics 2025, 12(7), 663; https://doi.org/10.3390/photonics12070663 - 30 Jun 2025
Viewed by 452
Abstract
Silicon (Si) and silicon carbide (SiC) are second- and third-generation semiconductor materials with excellent properties that are particularly suitable for applications in scenarios such as high temperature, high voltage, and high frequency. Si/SiC wafers face warpage and bending problems during production, which can [...] Read more.
Silicon (Si) and silicon carbide (SiC) are second- and third-generation semiconductor materials with excellent properties that are particularly suitable for applications in scenarios such as high temperature, high voltage, and high frequency. Si/SiC wafers face warpage and bending problems during production, which can seriously affect subsequent processing. Fast, accurate, and comprehensive detection of thickness, thickness variation, and flatness (including bow and warpage) of SiC and Si wafers is an industry-recognized challenge. Frequency scanning interferometry (FSI) can synchronize the upper and lower surfaces and thickness information of transparent parallel thin wafers, but it is still affected by multiple interfacial harmonic reflections, reflectivity asymmetry, and phase modulation uncertainty when measuring SiC thin wafers, which leads to thickness calculation errors and face reconstruction deviations. To this end, this paper proposes a high-precision facet reconstruction method for SiC/Si structures, which combines harmonic spectral domain decomposition, refractive index gradient constraints, and partitioning optimization strategy, and introduces interferometric signal “oversampling” and weighted fusion of multiple sets of data to effectively suppress higher-order harmonic interferences, and to enhance the accuracy of phase resolution. The multi-layer iterative optimization model further enhances the measurement accuracy and robustness of the system. The flatness measurement system constructed based on this method can realize the simultaneous acquisition of three-dimensional top and bottom surfaces on 6-inch Si/SiC wafers, and accurately reconstruct the key parameters, such as flatness, warpage, and thickness variation (TTV). A comparison with the Corning Tropel FlatMaster commercial system shows that this method has high consistency and good applicability. Full article
(This article belongs to the Special Issue Emerging Topics in Freeform Optics)
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