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Keywords = MIM waveguide

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14 pages, 3184 KB  
Article
Refractive Index Sensing Based on Fano Resonances of a Bus Metal–Insulator–Metal Waveguide with D-Shaped Resonant Cavity
by Yaner Qiu, Xuyan Chang, Dongqing Zhao and Zhidong Zhang
Micromachines 2026, 17(8), 946; https://doi.org/10.3390/mi17080946 - 8 Aug 2026
Viewed by 632
Abstract
A plasmonic waveguide coupling cavity structure is proposed, consisting of a bus metal–insulator–metal (MIM) waveguide-coupled single/double D-shaped resonant cavity. The transmission properties, magnetic field distribution, and refractive index sensing performance are simulated using the finite element method (FEM). A clear multi-Fano resonance phenomenon [...] Read more.
A plasmonic waveguide coupling cavity structure is proposed, consisting of a bus metal–insulator–metal (MIM) waveguide-coupled single/double D-shaped resonant cavity. The transmission properties, magnetic field distribution, and refractive index sensing performance are simulated using the finite element method (FEM). A clear multi-Fano resonance phenomenon is observed in the transmission spectra. The Fano resonances arise from the interaction between the discrete states of the D-shaped resonant cavity and the continuum state of the bus MIM waveguide. The influence of various structural parameters on the Fano resonance is investigated. Furthermore, the refractive index sensing properties based on the Fano resonance are studied by varying the refractive index of the insulator layer. Maximum sensitivities of 1130 nm/RIU and 1150 nm/RIU are achieved at the fourth Fano resonance dip for the single and double D-shaped resonator cavities, respectively. And a maximum figure of merit of 171 is achieved by the single D-shaped cavity structure. This research can provide new avenues for the design of high-sensitivity sensors as well as novel on-chip sensing structures. Full article
(This article belongs to the Special Issue Micro/Nano Optical Devices and Sensing Technology)
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21 pages, 28887 KB  
Article
Compact Wideband SIW Filters Based on Thin-Film Technology
by Luyao Tang, Wei Han, Qi Zhao, Hao Wei, Heng Wei and Yanbin Li
Electronics 2026, 15(8), 1594; https://doi.org/10.3390/electronics15081594 - 10 Apr 2026
Viewed by 615
Abstract
This study introduces two compact wideband substrate-integrated waveguide (SIW) filters fabricated using thin-film technology. The wideband bandpass response is achieved by incorporating interdigital capacitor (IDC) structures into a half-mode SIW (HMSIW) transmission line. An equivalent LC circuit model is formulated to analyze the [...] Read more.
This study introduces two compact wideband substrate-integrated waveguide (SIW) filters fabricated using thin-film technology. The wideband bandpass response is achieved by incorporating interdigital capacitor (IDC) structures into a half-mode SIW (HMSIW) transmission line. An equivalent LC circuit model is formulated to analyze the influence of IDC parameters on the generation of transmission zeros. For the first filter (BPF 1), a third-order IDC coupling configuration is employed, resulting in a 1 dB passband spanning 11 GHz to 18 GHz, a minimum insertion loss of 0.66 dB, three transmission zeros that enhance stopband performance, and a compact core dimension of 0.49λg×0.29λg. For further miniaturization, a modified HMSIW transmission line incorporating a metal-insulator-metal (MIM) capacitor at the equivalent magnetic wall is proposed. This design effectively reduces the transverse dimension of the waveguide while maintaining the original cutoff frequency. Utilizing this configuration, the second bandpass filter (BPF 2) was designed and fabricated employing double-layer ceramic thin-film technology. The resulting filter exhibits a 1 dB passband spanning 10 GHz to 18 GHz, a compact footprint measuring 0.44λg×0.23λg, a minimum insertion loss of 0.58 dB, and features three transmission zeros. The fabricated and measured results of both filters show good agreement with simulations. Compared with previously reported wideband SIW filters, the proposed designs demonstrate comprehensive advantages in fractional bandwidth, insertion loss, out-of-band suppression, and circuit size, providing effective filtering solutions for high-density integration of microwave and millimeter-wave RF systems. Full article
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12 pages, 3192 KB  
Article
Four-Stub Resonator-Coupled MIM Waveguide Sensor
by Jifan Yang, Shubin Yan, Zhenyang Xu, Yang Cui, Youbo Hu, Guang Liu, Dengchang Ma and Taiquan Wu
Sensors 2026, 26(6), 1779; https://doi.org/10.3390/s26061779 - 11 Mar 2026
Viewed by 696
Abstract
In this design, we propose a completely new sensor structure. It features a metal–insulator–metal (MIM) waveguide and a circular four-stub resonator (CFSR). Using the finite element method, we analyzed the performance of the sensor structure. We examined the impact of different parameters and [...] Read more.
In this design, we propose a completely new sensor structure. It features a metal–insulator–metal (MIM) waveguide and a circular four-stub resonator (CFSR). Using the finite element method, we analyzed the performance of the sensor structure. We examined the impact of different parameters and structural variations on its performance. Ultimately, we determined the optimal performance parameters for the best configuration. The modified device demonstrated a sensitivity (S) of 2940 nm/RIU and a figure of merit (FOM) of 52.5. Furthermore, this sensor design demonstrates significant potential for temperature measurement applications, with a core parameter of 1.508 nm/°C. Full article
(This article belongs to the Section Intelligent Sensors)
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15 pages, 2965 KB  
Article
High-Sensitivity Plasmonic Temperature Sensor Based on a MIM Waveguide-Coupled TDSC Resonator
by Yuanyuan Gao, Shubin Yan, Hui Cai, Zhenyang Xu, Chen Chen, Guang Liu and Taiquan Wu
Micromachines 2026, 17(2), 198; https://doi.org/10.3390/mi17020198 - 1 Feb 2026
Cited by 1 | Viewed by 856
Abstract
This paper presents a nanoscale sensor based on a metal–insulator–metal (MIM) waveguide coupled with a composite resonant cavity, where the ring resonator is embedded with triangular, semicircular, and rectangular structural elements. The transmission characteristics and sensing performance of the structure were systematically analyzed [...] Read more.
This paper presents a nanoscale sensor based on a metal–insulator–metal (MIM) waveguide coupled with a composite resonant cavity, where the ring resonator is embedded with triangular, semicircular, and rectangular structural elements. The transmission characteristics and sensing performance of the structure were systematically analyzed using the finite element method. The results indicate that the interference between the continuous mode in the waveguide and the discrete mode in the resonant cavity generates a distinct asymmetric Fano resonance. The optimized sensor achieves a sensitivity of 2960 nm/RIU and a figure of merit (FOM) of 59.79. Experimental verification confirms that the structure exhibits high responsiveness in temperature sensing, providing an effective solution for integrated photonic devices. Full article
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21 pages, 5645 KB  
Article
Design of a Nano-Refractive Index Sensor Based on a MIM Waveguide Coupled with a Cat-Faced Resonator for Temperature Detection and Biosensing Applications
by Jianhong Zheng, Shubin Yan, Chen Chen, Kecheng Ding, Yang Cui and Taiquan Wu
Sensors 2026, 26(3), 826; https://doi.org/10.3390/s26030826 - 26 Jan 2026
Cited by 1 | Viewed by 797
Abstract
This study introduces an innovative sensor architecture predicated on surface plasmon polaritons (SPPs), comprising a metal–insulator–metal (MIM) waveguide in conjunction with a cat-faced circular split resonator (TCRSW). The efficacy of the proposed nanosensor was meticulously evaluated utilizing the finite element method (FEM). It [...] Read more.
This study introduces an innovative sensor architecture predicated on surface plasmon polaritons (SPPs), comprising a metal–insulator–metal (MIM) waveguide in conjunction with a cat-faced circular split resonator (TCRSW). The efficacy of the proposed nanosensor was meticulously evaluated utilizing the finite element method (FEM). It was determined that the TCRSW configuration significantly impacts the sensor’s performance. By means of a comprehensive optimization of the structural parameters, the sensor attained an apex sensitivity of 3380 nm/RIU and a figure of merit (FOM) of 56.33 in its optimal configuration. Furthermore, the study comprehensively evaluated the sensor’s applicability for temperature sensing, demonstrating a measured temperature sensitivity of 1.673 nm/°C. Meanwhile, the application of the proposed structure in biosensing was comprehensively evaluated. When employed as a concentration sensor for detecting sodium and potassium ion solutions, the maximum achievable sensitivities reached 0.49 mg·d/L and 0.6375 mg·d/L, respectively, which highlights its significant potential not only for high-precision temperature monitoring but also for sensitive and reliable biosensing applications. Additionally, the proposed nanosensor holds considerable promise for applications in other nanophotonic fields. Full article
(This article belongs to the Section Nanosensors)
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17 pages, 9023 KB  
Article
Plasmonic Sensor Based on an MIM Waveguide Coupled with a Ring–Bridge–Rounded Square Resonator
by Weixin Liu, Shubin Yan, Zhenyang Xu, Yang Cui, Biyi Huang, Guang Liu, Di Zheng and Taiquan Wu
Photonics 2026, 13(1), 34; https://doi.org/10.3390/photonics13010034 - 30 Dec 2025
Cited by 1 | Viewed by 1533
Abstract
Fano resonance sensors based on metal–insulator–metal (MIM) waveguides often face the challenge of balancing high sensitivity (S) and a high figure of merit (FOM). In this work, a high-performance refractive index sensor is proposed, consisting of a straight MIM waveguide side-coupled to a [...] Read more.
Fano resonance sensors based on metal–insulator–metal (MIM) waveguides often face the challenge of balancing high sensitivity (S) and a high figure of merit (FOM). In this work, a high-performance refractive index sensor is proposed, consisting of a straight MIM waveguide side-coupled to a novel ring–bridge–rounded square (RBS) resonator. The transmission characteristics and the formation mechanism of Fano resonance are systematically analyzed using the finite element method (FEM). The results demonstrate that the synergistic introduction of rounded square units and an internal bridge structure significantly enhances electromagnetic field localization and optimizes the coupling strength. The optimized device achieves a remarkable refractive index sensitivity of 3268 nm/RIU (refractive index unit, RIU) and a high FOM of 55.4. Furthermore, by employing ethanol as the filling medium, the proposed configuration functions as a temperature sensor, exhibiting a high linear sensitivity of 1.644 nm/°C over the range of −70 °C to 70 °C. The proposed RBS resonator holds promise for compact and high-precision nanophotonic sensing applications. Full article
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15 pages, 3641 KB  
Article
Asymmetric Nano-Sensor Based on Inverted Trapezoidal U-Shaped Circular Cavity Structure
by Mengqi Zhao, Shubin Yan, Zhaokun Yan, Weijie Yang, Hongfu Chen, Guang Liu, Yang Cui and Taiquan Wu
Photonics 2025, 12(11), 1065; https://doi.org/10.3390/photonics12111065 - 28 Oct 2025
Viewed by 675
Abstract
This paper presents a novel asymmetric U-shaped refractive index sensor, which is based on a MIM waveguide and coupled with a U-shaped resonator, which integrates a ring, a circular cavity, and two rectangular cavities (URRCTR), in addition to an inverted rectangular nanostructure. The [...] Read more.
This paper presents a novel asymmetric U-shaped refractive index sensor, which is based on a MIM waveguide and coupled with a U-shaped resonator, which integrates a ring, a circular cavity, and two rectangular cavities (URRCTR), in addition to an inverted rectangular nanostructure. The efficiency of the proposed sensor was investigated and optimized through the FEM. Simulation results indicate that the interaction between the broadband mode supported by the inverted square-shaped structure on the primary waveguide and the confined narrowband mode of the URRCTR resonator generates a distinct asymmetric feature in the transmission profile, a characteristic indicative of Fano resonance. The geometric parameters of the structure are crucial for tuning the Fano resonance features. Through systematic optimization, the sensor achieves a sensitivity of 3480 nm/RIU and a figure of merit (FOM) of 55.23. Due to its high sensitivity, compact footprint, and favorable temperature-dependent properties, the presented sensor reveals considerable promise for various applications in integrated photonic sensing. Full article
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12 pages, 1810 KB  
Article
Nanoscale Temperature Sensor with Dual Circular and Square Structures Based on MIM Waveguides
by Shubin Yan, Hongfu Chen, Yuanyuan Gao, Weixin Liu, Xiaoran Yan, Aiwei Xu and Taiquan Wu
Photonics 2025, 12(6), 525; https://doi.org/10.3390/photonics12060525 - 22 May 2025
Cited by 2 | Viewed by 974
Abstract
This paper proposes a refractive index sensor with high sensitivity, which operates based on the Fano resonance phenomenon. The sensor is constructed using a metal–insulator–metal (MIM) waveguide integrated with a double square ring (DSR) configuration, enabling enhanced performance in refractive index detection. The [...] Read more.
This paper proposes a refractive index sensor with high sensitivity, which operates based on the Fano resonance phenomenon. The sensor is constructed using a metal–insulator–metal (MIM) waveguide integrated with a double square ring (DSR) configuration, enabling enhanced performance in refractive index detection. The propagation characteristics of the proposed structure are systematically investigated using the finite element method (FEM). Using a control variable method, this study systematically investigates the impact of refractive index changes and specific geometric parameters of the DSR structure on the sensor’s performance. Through the careful optimization of structural parameters, the sensor achieves a peak sensitivity (S) of 2700 nm/RIU along with a figure of merit (FOM) as high as 54. Owing to its simple configuration and high sensitivity, the proposed sensor holds significant potential for applications in temperature sensing and related fields. Full article
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10 pages, 5339 KB  
Article
Plasmonic Nanosensors Based on Highly Tunable Multiple Fano Resonances Induced in Metal–Insulator–Metal Waveguide Systems
by Ping Jiang and Yilin Wang
Nanomaterials 2025, 15(9), 686; https://doi.org/10.3390/nano15090686 - 30 Apr 2025
Cited by 8 | Viewed by 2248
Abstract
We designed and investigated a plasmonic nanosensor with ultra-high sensitivity and tunability, which is composed of a metal–insulator–metal (MIM) waveguide integrated with a side-coupled resonator (SR) and metal baffle. Its high performance is derived from Fano resonance, which is generated by the interaction [...] Read more.
We designed and investigated a plasmonic nanosensor with ultra-high sensitivity and tunability, which is composed of a metal–insulator–metal (MIM) waveguide integrated with a side-coupled resonator (SR) and metal baffle. Its high performance is derived from Fano resonance, which is generated by the interaction between the modes of the SR and the baffle, and it can be precisely tuned by adjusting the parameters of the SR. Further investigation based on the incorporation of a side-coupled rectangular-ring resonator (SRR) generates three distinct Fano resonances, and the Fano resonance can be accurately tuned by manipulating the parameters of the resonators within the system. Our proposed plasmonic system can serve as a highly sensitive refractive index nanosensor, achieving a sensitivity up to 1150 nm/RIU. The plasmonic structures featuring independently tunable triple Fano resonances open new avenues for applications in nanosensing, bandstop filtering, and slow-light devices. Full article
(This article belongs to the Special Issue Photonics and Plasmonics of Low-Dimensional Materials)
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14 pages, 968 KB  
Article
Fano Resonant Sensing in MIM Waveguide Structures Based on Multiple Circular Split-Ring Resonant Cavities
by Wenjing Wang, Shaoze Zhang and Huiliang Cao
Micromachines 2025, 16(2), 183; https://doi.org/10.3390/mi16020183 - 3 Feb 2025
Cited by 16 | Viewed by 2555
Abstract
In this work, a non-through metal–insulator–metal (MIM) waveguide capable of exciting three Fano resonances was designed and numerically studied using the finite element method. Fano resonances are achieved through the interaction between the modes of multiple circular split-ring resonator cavities and the waveguide. [...] Read more.
In this work, a non-through metal–insulator–metal (MIM) waveguide capable of exciting three Fano resonances was designed and numerically studied using the finite element method. Fano resonances are achieved through the interaction between the modes of multiple circular split-ring resonator cavities and the waveguide. The effect of coupling between different resonators on the Fano resonance peaks is investigated. Independent tuning of the Fano resonance wavelength and transmission rate is accomplished by modifying the structural rotation angle and geometric parameters. After optimizing these parameters, the structure achieves an optimal refractive index sensitivity of 946.88 nm/RIU and a figure of merit of 99.17. The proposed structure holds potential for guiding the design of nanosensors. Full article
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11 pages, 6470 KB  
Article
Multi-Structure-Based Refractive Index Sensor and Its Application in Temperature Sensing
by Zhaokun Yan, Shubin Yan, Ziheng Xu, Changxing Chen, Yuhao Cao, Xiaoran Yan, Chong Wang and Taiquan Wu
Sensors 2025, 25(2), 412; https://doi.org/10.3390/s25020412 - 12 Jan 2025
Cited by 14 | Viewed by 2378
Abstract
In this paper, a new sensor structure is designed, which consists of a metal–insulator–metal (MIM) waveguide and a circular protrusion and a rectangular triangular cavity (CPRTC). The characterization of nanoscale sensors is considered using an approximate numerical method (finite element method). The simulation [...] Read more.
In this paper, a new sensor structure is designed, which consists of a metal–insulator–metal (MIM) waveguide and a circular protrusion and a rectangular triangular cavity (CPRTC). The characterization of nanoscale sensors is considered using an approximate numerical method (finite element method). The simulation results show that the sharp asymmetric resonance generated by the interaction between the discrete narrow-band mode and the continuous wideband mode is called Fano resonance. The performance of the sensor is considerably influenced by CPRTC. The sensor structure has attained a sensitivity of 3060 nm/RIU and a figure of merit (FOM) of 53.68. In addition, the application of this structure to temperature sensors is also investigated; its sensitivity is 1.493 nm/°C. The structure also has potential for other nanosensors. Full article
(This article belongs to the Section Nanosensors)
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11 pages, 19799 KB  
Article
Miniaturized Hybrid Filter Using Capacitive-Loaded QMSIW and Stripline Resonators
by Luyao Tang, Wei Han, Hao Wei and Yanbin Li
Electronics 2024, 13(24), 5016; https://doi.org/10.3390/electronics13245016 - 20 Dec 2024
Cited by 2 | Viewed by 5197
Abstract
In this paper, a compact capacitive-loaded quarter-mode substrate integrated waveguide (CL-QMSIW) resonator is proposed and analyzed. This resonator is created by loading a metal–insulator–metal (MIM) capacitor inside the QMSIW resonator. A miniaturized hybrid bandpass filter with deep stopband suppression is designed based on [...] Read more.
In this paper, a compact capacitive-loaded quarter-mode substrate integrated waveguide (CL-QMSIW) resonator is proposed and analyzed. This resonator is created by loading a metal–insulator–metal (MIM) capacitor inside the QMSIW resonator. A miniaturized hybrid bandpass filter with deep stopband suppression is designed based on the CL-QMSIW resonator and the stripline resonator. The filter generates a transmission zero (TZ) that can be adjusted flexibly through cross-coupling in its lower stopband, which significantly enhances the filter’s selectivity. To verify the correctness of the proposed filter, a third-order filter was created and produced, utilizing the low-temperature co-fired ceramics (LTCC) technique. The measurement outcomes align with the results from the electromagnetic simulations. The filter is characterized by a center frequency of 7 GHz, while the core size is only 0.33λg×0.17λg, and the lowest insertion loss (IL) within the band is 1.4 dB, achieving a TZ at 5.1 GHz. The proposed filter features a compact dimension, excellent selectivity, and low insertion loss. Full article
(This article belongs to the Special Issue Microwave Devices and Their Applications)
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28 pages, 3787 KB  
Review
Plasmonic Sensors Based on a Metal–Insulator–Metal Waveguide—What Do We Know So Far?
by Muhammad A. Butt
Sensors 2024, 24(22), 7158; https://doi.org/10.3390/s24227158 - 7 Nov 2024
Cited by 31 | Viewed by 8727
Abstract
Metal–insulator–metal (MIM) waveguide-based plasmonic sensors are significantly important in the domain of advanced sensing technologies due to their exceptional ability to guide and confine light at subwavelength scales. These sensors exploit the unique properties of surface plasmon polaritons (SPPs) that propagate along the [...] Read more.
Metal–insulator–metal (MIM) waveguide-based plasmonic sensors are significantly important in the domain of advanced sensing technologies due to their exceptional ability to guide and confine light at subwavelength scales. These sensors exploit the unique properties of surface plasmon polaritons (SPPs) that propagate along the metal–insulator interface, facilitating strong field confinement and enhanced light–matter interactions. In this review, several critical aspects of MIM waveguide-based plasmonic sensors are thoroughly examined, including sensor designs, material choices, fabrication methods, and diverse applications. Notably, there exists a substantial gap between the numerical data and the experimental verification of these devices, largely due to the insufficient attention given to the hybrid integration of plasmonic components. This disconnect underscores the need for more focused research on seamless integration techniques. Additionally, innovative light-coupling mechanisms are suggested that could pave the way for the practical realization of these highly promising plasmonic sensors. Full article
(This article belongs to the Special Issue Waveguide-Based Sensors and Applications)
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12 pages, 7395 KB  
Article
Multi-Cavity Nanorefractive Index Sensor Based on MIM Waveguide
by Weijie Yang, Shubin Yan, Ziheng Xu, Changxin Chen, Jin Wang, Xiaoran Yan, Shuwen Chang, Chong Wang and Taiquan Wu
Nanomaterials 2024, 14(21), 1719; https://doi.org/10.3390/nano14211719 - 28 Oct 2024
Cited by 10 | Viewed by 1986
Abstract
Within this manuscript, we provide a novel Fano resonance-driven micro-nanosensor. Its primary structural components are a metal-insulator-metal (MIM) waveguide, a shield with three disks, and a T-shaped cavity (STDTC). The finite element approach was used to study the gadget in theory. It is [...] Read more.
Within this manuscript, we provide a novel Fano resonance-driven micro-nanosensor. Its primary structural components are a metal-insulator-metal (MIM) waveguide, a shield with three disks, and a T-shaped cavity (STDTC). The finite element approach was used to study the gadget in theory. It is found that the adjustment of the structure and the change of the dimensions are closely related to the sensitivity (S) and the quality factor (FOM). Different model structural parameters affect the Fano resonance, which in turn changes the transmission characteristics of the resonator. Through in-depth experimental analysis and selection of appropriate parameters, the sensor sensitivity finally reaches 3020 nm/RIU and the quality factor reaches 51.89. Furthermore, the installation of this microrefractive index sensor allows for the quick and sensitive measurement of glucose levels. It is a positive contribution to the field of optical devices and micro-nano sensors and meets the demand for efficient detection when applied in medical and environmental scenarios. Full article
(This article belongs to the Section Nanoelectronics, Nanosensors and Devices)
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13 pages, 4279 KB  
Article
Highly Sensitive Plasmon Refractive Index Sensor Based on MIM Waveguide
by Wen Jiang, Shubin Yan, Xiaoran Yan, Aiwei Xu, Guang Liu, Chong Wang, Lei Li, Xiangyang Mu and Guowang Gao
Micromachines 2024, 15(8), 987; https://doi.org/10.3390/mi15080987 - 30 Jul 2024
Cited by 15 | Viewed by 2586
Abstract
This paper introduces a novel plasmon refractive index nanosensor structure based on Fano resonance. The structure comprises a metal–insulator–metal (MIM) waveguide with an inverted rectangular cavity and a circle minus a small internal circle plus a rectangular cavity (CMSICPRC). This study employs the [...] Read more.
This paper introduces a novel plasmon refractive index nanosensor structure based on Fano resonance. The structure comprises a metal–insulator–metal (MIM) waveguide with an inverted rectangular cavity and a circle minus a small internal circle plus a rectangular cavity (CMSICPRC). This study employs the finite element method (FEM) to analyze the sensing characteristics of the structure. The results demonstrate that the geometrical parameters of specific structures exert a considerable influence on the sensing characteristics. Simulated experimental data show that the maximum sensitivity of this structure is 3240 nm/RIU, with a figure of merit (FOM) of 52.25. Additionally, the sensor can be used in biology, for example, to detect the concentration of hemoglobin in blood. The sensitivity of the sensor in this application, according to our calculations, can be 0.82 nm∙g/L. Full article
(This article belongs to the Special Issue Advances in Photodetecting Materials, Devices and Applications)
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