Search Results (111)

This paper presents the first demonstration and comparison of two identical oscillator circuits employing piezoelectric zinc oxide (ZnO) microelectromechanical systems (MEMS) resonators, implemented on conventional printed-circuit-board (PCB) and three-dimensional (3D)-printed acrylonitrile butadiene styrene (ABS) substrates. Both oscillators operate simultaneously at dual frequencies (260 MHz and 437 MHz) without the need for additional circuitry. The MEMS resonators, fabricated on silicon-on-insulator (SOI) wafers, exhibit high-quality factors (Q), ensuring superior phase noise performance. Experimental results indicate that the oscillator packaged using 3D-printed chip-carrier assembly achieves a 2–3 dB improvement in phase noise compared to the PCB-based oscillator, attributed to the ABS substrate’s lower dielectric loss and reduced parasitic effects at radio frequency (RF). Specifically, phase noise values between −84 and −77 dBc/Hz at 1 kHz offset and a noise floor of −163 dBc/Hz at far-from-carrier offset were achieved. Additionally, the 3D-printed ABS-based oscillator delivers notably higher output power (4.575 dBm at 260 MHz and 0.147 dBm at 437 MHz). To facilitate modular characterization, advanced packaging techniques leveraging precise 3D-printed encapsulation with sub-100 μm lateral interconnects were employed. These ensured robust packaging integrity without compromising oscillator performance. Furthermore, a comparison between two transistor technologies—a silicon germanium (SiGe) heterojunction bipolar transistor (HBT) and an enhancement-mode pseudomorphic high-electron-mobility transistor (E-pHEMT)—demonstrated that SiGe HBT transistors provide superior phase noise characteristics at close-to-carrier offset frequencies, with a significant 11 dB improvement observed at 1 kHz offset. These results highlight the promising potential of 3D-printed chip-carrier packaging techniques in high-performance MEMS oscillator applications. Full article

This work presents the theoretical design and finite element modeling of high-sensitivity microcantilevers for biosensing applications, integrating piezoelectric actuation with novel ultrananocrystalline diamond (UNCD) structures. Microcantilevers were designed based on projections to grow a multilayer metal/AlN/metal/UNCD stack on silicon substrates, optimized to detect adsorption of biomolecules on the surface of exposed UNCD microcantilevers at the picogram scale. A central design criterion was to match the microcantilever’s eigenfrequency with the resonant frequency of the AlN-based piezoelectric actuator, enabling efficient dynamic excitation. The beam length was tuned to ensure a ≥2 kHz resonant frequency shift upon adsorption of 1 pg of mass distributed on the exposed surface of a UNCD-based microcantilever. Subsequently, a Gaussian distribution mass function with a variance of 5 µm was implemented to evaluate the resonant frequency shift upon mass addition at a certain point on the microcantilever where a variation from 600 Hz to 100 Hz was observed when the mass distribution center was located at the tip of the microcantilever and the piezoelectric borderline, respectively. Both frequency and time domain analyses were performed to predict the resonance behavior, oscillation amplitude, and quality factor. To ensure the reliability of the simulations, the model was first validated using experimental results reported in the literature for an AlN/nanocrystalline diamond (NCD) microcantilever. The results confirmed that the AlN/UNCD architecture exhibits higher resonant frequencies and enhanced sensitivity compared to equivalent AlN/Si structures. The findings demonstrate that using a UNCD-based microcantilever not only improves biocompatibility but also significantly enhances the mechanical performance of the biosensor, offering a robust foundation for the development of next-generation MEMS-based biochemical detection platforms. The research reported here introduces a novel design methodology that integrates piezoelectric actuation with UNCD microcantilevers through eigenfrequency matching, enabling efficient picogram-scale mass detection. Unlike previous approaches, it combines actuator and cantilever optimization within a unified finite element framework, validated against experimental data published in the literature for similar piezo-actuated sensors using materials with inferior biocompatibility compared with the novel UNCD. The dual-domain simulation strategy offers accurate prediction of key performance metrics, establishing a robust and scalable path for next-generation MEMS biosensors. Full article

Microfluidic systems have become a hot topic in Micro-Electro-Mechanical System (MEMS) research, with micropumps serving as a key element due to their role in determining structural and flow dynamics within these systems. This study aims to analyze the influence of different structural obstacles within microfluidics on micropump efficiency and offer guidance for improving microfluidic system designs. In this context, a MEMS-based micropump valve structure was developed, and simulations were conducted to examine the effects of the valve on microfluidic oscillations. The research explored various configurations, including valve positions and quantities, yielding valuable insights for optimizing microfluidic transport mechanisms at the microscale. Full article

MEMS resonators have attracted attention for their wide applications in highly accurate clock references, sensors, wireless communications, frequency control, etc. Most of the output frequencies of MEMS resonators require post-processing or calibration to be accurate enough. In this paper, a charge pump phase-locked loop-based frequency conditioning method for MEMS resonators is explored. An optimization scheme is proposed to enhance the frequency stability and signal quality of MEMS resonators. The experimental results show that the method significantly improves the resonator performance and achieves effective control of the resonant frequency. This research provides a new technical path for the design of high-performance MEMS oscillators, which has important theoretical significance and practical application value. Full article

This study presents a novel dual phase-locked loop two-dimensional synchronized motion modulation (TDSMM-DPLL) system designed to enhance the low-frequency detection capability of magnetoresistive (MR) sensors by effectively mitigating 1/f noise. The TDSMM-DPLL system integrates a comb-driven resonator and a piezoelectric cantilever beam resonator, achieving synchronized magnetic field modulation through a DPLL circuit that adjusts the resonant frequency of the comb-driven resonator to twice that of the cantilever beam resonator. Theoretical analysis and finite element simulations demonstrate a modulation efficiency of 38.98%, which is significantly higher than that of traditional one-dimensional modulation methods. Experimental validation confirms the system’s effectiveness, showing a 3.13-fold reduction in frequency Allan variance, decreasing from 217.32 ppb to 69.46 ppb, indicating substantial noise suppression. These results highlight the TDSMM-DPLL system’s potential to improve the performance of MR sensors in low-frequency applications, making it a promising solution for high-precision magnetic field detection. Full article

This article reports a 110.2 MHz ultra-low-power phase-locked loop (PLL) for MEMS timing/frequency reference oscillator applications. It utilizes a 6.89 MHz MEMS-based oscillator as an input reference. An ultra-low-power, high-resolution phase-frequency detector (PFD) is utilized to achieve low-noise performance. Eliminating the reset feedback path used in conventional PFDs leads to dead/blind zone-free phase characteristics, which are crucial for low-noise applications within a wide operating frequency range. The PFD operates up to 2.5 GHz and achieves a linear resolution of 100 ps input time difference ($\Delta t_{in}$), without the need for any additional calibration circuits. The linearity of the proposed PFD is tested over a phase difference corresponding to aa $\Delta t_{in}$ ranging from 100 ps to 50 ns. At a 1 V supply voltage, it shows an error of <±1.6% with a resolution of 100 ps and a frequency-normalized power consumption ($P_n$) of 0.106 pW/Hz. The PLL is designed and fabricated using a TSMC 65 nm CMOS process instrument and interfaced with the MEMS-based oscillator. The system reports phase noises of −106.21 dBc/Hz and −135.36 dBc/Hz at 1 kHz and 1 MHz offsets, respectively. It consumes 6.709 $\mathsf{\mu }$W at a 1 V supply and occupies an active CMOS area of 0.1095 mm². Full article

Vibration sensors are widely used in many fields like industry, agriculture, military, medicine, environment, etc. However, due to the speedy upgrading, most sensors composed of rigid or even toxic materials cause pollution to the environment and give rise to an increased amount of electronic waste. To meet the requirement of green electronics, biodegradable materials are advocated to be used to develop vibration sensors. Herein, a vibration sensor is reported based on a strategy of pencil-drawing graphite on paper. Specifically, a repeated pencil-drawing process is carried out on paper with a zigzag-shaped framework and parallel microgrooves, to form a graphite coating, thus serving as a functional conductive layer for electromechanical signal conversion. To enhance the sensor’s sensitivity to vibration, a mass is loaded in the center of the paper, so that higher oscillation amplitude could happen under vibrational excitation. In so doing, the paper-based sensor can respond to vibrations with a wide frequency range from 5 Hz to 1 kHz, and vibrations with a maximum acceleration of 10 g. The results demonstrate that the sensor can not only be utilized for monitoring vibrations generated by the knuckle-knocking of plastic plates or objects falling down but also can be used to detect vibration in areas such as the shield cut head to assess the working conditions of machinery. The paper-based MEMS vibration sensor exhibits merits like easy fabrication, low cost, and being environmentally friendly, which indicates its great application potential in vibration monitoring fields. Full article

Sensors based on MEMS technology, in particular Inertial Measurement Units (IMUs), when installed on vehicles, provide a real-time full estimation of vehicles’ state vector (e.g., position, velocity, yaw angle, angular rate, acceleration), which is required for the planning and control of cars’ trajectories, as well as managing the in-car local navigation and positioning tasks. Moreover, data provided by the IMUs, integrated with the data of multiple inputs from other sensing systems (such as Lidar, cameras, and GPS) within the vehicle, and with the surrounding information exchanged in real time (vehicle to vehicle, vehicle to infrastructure, or vehicle to other entities), can be exploited to actualize the full implementation of “smart mobility” on a large scale. On the other hand, “smart mobility” (which is expected to improve road safety, reduce traffic congestion and environmental burden, and enhance the sustainability of mobility as a whole), to be safe and functional on a large scale, should be supported by highly accurate and trustworthy technologies based on precise and reliable sensors and systems. It is known that the accuracy and precision of data supplied by appropriately in-lab-calibrated IMUs (with respect to the primary or secondary standard in order to provide traceability to the International System of Units) allow guaranteeing high quality, reliable information managed by processing systems, since they are reproducible, repeatable, and traceable. In this work, the effective responsiveness and the related precision of digital IMUs, under sinusoidal linear and curvilinear motion conditions at 5 Hz, 10 Hz, and 20 Hz, are investigated on the basis of metrological approaches in laboratory standard conditions only. As a first step, in-lab calibrations allow one to reduce the variables of uncontrolled boundary conditions (e.g., occurring in vehicles in on-site tests) in order to identify the IMUs’ sensitivity in a stable and reproducible environment. For this purpose, a new calibration system, based on an oscillating rotating table was developed to reproduce the dynamic conditions of use in the field, and the results are compared with calibration data obtained on linear calibration benches. Full article

Microelectromechanical system (MEMS) cantilever resonators suffer from high motional impedance (R_m). This paper investigates the use of mechanically coupled multi-cantilever piezoelectric MEMS resonators in the resolution of this issue. A double-sided actuating design, which utilizes a resonator with a 2.5 μm thick AlN film as the passive layer, is employed to reduce R_m. The results of experimental and finite element analysis (FEA) show agreement regarding single- to sextuple-cantilever resonators. Compared with a standalone cantilever resonator, the multi-cantilever resonator significantly reduces R_m; meanwhile, the high quality factor (Q) and effective electromechanical coupling coefficient (Kt_eff²) are maintained. The 30 μm wide quadruple-cantilever resonator achieves a resonance frequency (f_s) of 55.8 kHz, a Q value of 10,300, and a series impedance (R_s) as low as 28.6 kΩ at a pressure of 0.02 Pa; meanwhile, the smaller size of this resonator compared to the existing multi-cantilever resonators is preserved. This represents a significant advancement in MEMS resonators for miniaturized ultra-low-power oscillator applications. Full article

We introduce a micro-electromechanical system (MEMS) energy harvester, designed for capturing flow energy. Moving beyond traditional vibration-based energy harvesting, our approach incorporates a cylindrical oscillator mounted on an MEMS chip, effectively harnessing wind energy through flow-induced vibration (FIV). A highlight of our research is the development of a comprehensive fabrication process, utilizing a 5.00 µm thick cantilever beam and piezoelectric film, optimized through advanced micromachining techniques. This process ensures the harvester’s alignment with theoretical predictions and enhances its operational efficiency. Our wind tunnel experiments confirmed the harvester’s capability to generate a notable electrical output, with a peak voltage of 2.56 mV at an 8.00 m/s wind speed. Furthermore, we observed a strong correlation between the experimentally measured voltage frequencies and the lift force frequency observed by CFD analysis, with dominant frequencies identified in the range of 830 Hz to 867 Hz, demonstrating the potential application in actual flow environments. By demonstrating the feasibility of efficient energy conversion from ambient wind, our research contributes to the development of sustainable energy solutions and low-power wireless electron devices. Full article

The present investigation focuses on the design and mathematical modeling of a microelectromechanical (MEMS) mode-localized based sensor/actuator system. This device incorporates a sensitive clamped–clamped shallow arch microbeam with an initial curvature shaped to resemble one of the first two symmetric and asymmetric modes of free oscillations of a clamped–clamped beam. The analysis reveals that with a suitable arrangement of the initial shape of the device flexible electrode and a proper tuning of the maximum initial rise and the actuating dc load enables the transition to display certain bistable behavior. This could be a better choice to build a device with a large stroke. Furthermore, the generated data showed the occurrence of mode-veering, indicating a coupling between the concerned symmetric and asymmetric modes of vibrations, and offering the possibility for such a device to be used as a mode-localized MEMS-based sensor utilizing veering and crossing phenomena. Indeed, where a certain energy is exchanged between symmetric and asymmetric modes of a microbeam, it can be utilized to serve as a foundation for the development of a new class of highly precise resonant sensors that can capture, with a certain level of precision, any of the sensed signal amplitudes. Full article

Synchronization in microstructures is a widely explored domain due to its diverse dynamic traits and promising practical applications. Within synchronization analysis, the synchronization bandwidth serves as a pivotal metric. While current research predominantly focuses on symmetric evaluations of synchronization bandwidth, the investigation into potential asymmetries within nonlinear oscillators remains unexplored, carrying implications for sensor application performance. This paper conducts a comprehensive exploration employing straight and arch beams capable of demonstrating linear, hardening, and softening characteristics to thoroughly scrutinize potential asymmetry within the synchronization region. Through the introduction of weak harmonic forces to induce synchronization within the oscillator, we observe distinct asymmetry within its synchronization range. Additionally, we present a robust theoretical model capable of fully capturing the linear, hardening, and softening traits of resonators synchronized to external perturbation. Further investigation into the effects of feedback strength and phase delay on synchronization region asymmetry, conducted through analytical and experimental approaches, reveals a consistent alignment between theoretical predictions and experimental outcomes. These findings hold promise in providing crucial technical insights to enhance resonator performance and broaden the application landscape of MEMS (Micro-Electro-Mechanical Systems) technology. Full article

MEMS (micro-electro-mechanical system) gyroscopes and accelerometers are used in several applications. They are very popular due to their small size, low price, and accessibility. The design of MEMS accelerometers enables the measurement of vibrations, with frequencies from tenths of hertz to even 1 kHz. MEMS gyroscopes can be applied to measure angular rates, and indirectly also angular oscillations with frequencies similar to accelerometers. Despite significant stochastic errors, MEMS sensors are used not only in popular domestic appliances (e.g., smartphones) but also in safety-critical units, such as aeronautical attitude and heading reference systems (AHRSs). In engineering, methods of stochastic properties analysis are important tools for sensor selection, verification, and the design of measurement algorithms. In this article, three methods used for the analysis of stochastic properties of sensors are presented and comparative analyses are shown. The applied measurement frequencies (1 kHz) were much higher than those typically found in MEMS sensor applications. Additionally, an exemplary analysis of temperature drift frequency, as well as the possibility for the synthesis of complementary filter parameters with the use of the described methods, is shown. Assessment of the stochastic properties of MEMS accelerometers and gyroscopes was performed under both constant and variable temperature conditions (during warm-up after switching on) with the use of classic methods, such as power spectral density (PSD) and Allan variance (AV), as well as the less known but very promising generalized method of wavelet moments (GMWM). Full article

This paper presents a compact Micro-Electro-Mechanical System (MEMS) microphone digital readout system. The system is characterized by a low-dropout regulator (LDO) and a pre-amplifier and programmable-gain amplifier (PPA)-less voltage controlled oscillator (VCO)-based $\Delta$$\Sigma$ modulation technique, which improve compactness and design scalability. Specifically, to improve signal accuracy and maintain loop stability without a gain-tuning range trade-off, an active low pass filter (ALPF) and a current mode feed-forward path (CMFFP) are incorporated in a VCO-based delta-sigma modulation loop. By means of VCOs and SCG phase variation robustness and current source array feedback (CSAFB), the system achieves a high power supply rejection ratio (PSRR) and gain tuning without the need to design an extra regulator and PPA. The design was fabricated using a 180 nm Bipolar-CMOS-DMOS (BCD) process and measured at a 1.2 V supply voltage. According to the measurement results, the signal-to-noise and distortion ratio (SNDR) achieves 62 dB@1 kHz with 40 dB gain and a 10 kHz bandwidth. Furthermore, PSRR@1 kHz is below −55 dB, and power dissipation is within 57 µW. Full article

Time and frequency metrology depends on stable oscillators in both radio-frequency and optical domains. With the increased complexity of the highly precise oscillators also came the demand for delivering the oscillators’ harmonic signals between delocalized sites for comparison, aggregation, or other purposes. Besides the traditional optical fiber networks, free-space optical links present an alternative tool for disseminating stable sources’ output. We present a pilot experiment of phase-coherent optical frequency transfer using a free-space optical link testbed. The experiment performed on a 30 m long link demonstrates the phase-noise parameters in a free-space optical channel under atmospheric turbulence conditions, and it studies the impact of active MEMS mirror stabilization of the received optical wave positioning on the resulting transfer’s performance. Our results indicate that a well-configured MEMS mirror beam stabilization significantly enhances fractional frequency stability, achieving the−14th-order level for integration times over 30 s. Full article