Self-sustained feedback oscillators referenced to MEMS/NEMS resonators have the potential for a wide range of applications in timing and sensing systems. In this paper, we describe a real-time temperature compensation approach to improving the long-t...
This paper presents the design, fabrication, and electrical characterization of an electrostatically actuated and capacitive sensed 2-MHz plate resonator structure that exhibits a predicted mass sensitivity of ~250 pg·cm−2·Hz&minu...
This article presents a 6.89 MHz MEMS oscillator based on an ultra-low-power, low-noise, tunable gain/duty-cycle transimpedance amplifier (TIA) and a bulk Lamé-mode MEMS resonator that has a quality factor (Q) of 3.24 × 106. Self-cascoding and curren...
This paper presents a microelectromechanical system (MEMS)-based oscillator based on a Lamé-mode capacitive micromachined resonator and a fully differential high-gain transimpedance amplifier (TIA). The proposed TIA is designed using TSMC 65 n...
This article reports a 110.2 MHz ultra-low-power phase-locked loop (PLL) for MEMS timing/frequency reference oscillator applications. It utilizes a 6.89 MHz MEMS-based oscillator as an input reference. An ultra-low-power, high-resolution phase-freque...
This paper reports on the design, and implementation of piezoelectric-on-silicon MEMS resonators installed within a portable experimental setup for sensing nanoparticles in a laboratory environment. MEMS oscillators with a center frequency of approxi...
The operating frequency of a resonant oscillator is determined by the coupled behavior of the resonator, sustaining electronics, package, power supply, mounting conditions, and operating environment. Frequency stability is critical in sensor systems,...
The initial value problem for a model of magnetic Micro-Electro-Mechanical System (magMEMS) with current-carrying conductors is considered. The model equation is a conservative MEMS oscillator due to the presence of the singular term corresponding to...
Aiming at the development needs of low-frequency and high-sensitivity vector hydrophones, this paper has developed a micro-electro-mechanical system (MEMS) based co-oscillating electrochemical vector hydrophone. We obtained the optimized geometric pa...
The importance of micro-electromechanical systems (MEMS) for radio-frequency (RF) applications is rapidly growing. In RF mobile-communication systems, MEMS-based circuits enable a compact implementation, low power consumption and high RF performance,...
This study reports an oven-controlled microelectromechanical systems oscillator with integrated micro-evaporation trimming that achieves frequency stability over the industrial temperature range and permanent frequency trimming after vacuum packaging...
In this study, we investigate the damping phenomena acting on piezoelectrically driven MEMS oscillators. Three different geometrical shapes of MEMS oscillators are presented, including cantilevers, bending oscillators, and paddle oscillators. An anal...
This paper presents the first demonstration and comparison of two identical oscillator circuits employing piezoelectric zinc oxide (ZnO) microelectromechanical systems (MEMS) resonators, implemented on conventional printed-circuit-board (PCB) and thr...
This paper presents a MEMS (Micro-Electro-Mechanical System) Silicon Oscillating Accelerometer (SOA) with AC (alternating current) polarization to expand its bias-instability limited by the up-converted 1/f noise from front-end transimpedance amplifi...
Motivated by their functional conformity, micro-cantilever-based MEMS oscillators are investigated in this study as structure-integrable transducers for the acquisition of guided ultrasonic waves in fiber–metal laminates. While acceleration-sen...
The frequency of a nonlinear vibration system is nonlinearly related to its amplitude, and this relationship is critical in the design of a packaging system and a microelectromechanical system (MEMS). This paper proposes a straightforward frequency p...
This paper presents the design, fabrication, and characterization of an inductive complementary metal oxide semiconductor micro-electromechanical systems (CMOS-MEMS) accelerometer with on-chip digital output based on LC oscillators. While most MEMS a...
CMOS-MEMS resonators have become a promising solution thanks to their miniaturization and on-chip integration capabilities. However, using a CMOS technology to fabricate microelectromechanical system (MEMS) devices limits the electromechanical perfor...
Microelectromechanical systems (MEMS) microphone sensors have significantly improved in the past years, while the readout electronic is mainly implemented using switched-capacitor technology. The development of new battery powered “always-on&rd...
This paper reports a drive and detection method for Micro-Electro-Mechanical System (MEMS)-based Lorentz-force resonance magnetometers. Based on the proposed MEMS magnetometer, a drive and detection method was developed by using self-oscillation to a...
This article establishes a circuit model with which to analyze the difficulty of auto-gain control driving for low-Q micromechanical gyroscopes at room temperature and normal pressure. It also proposes a driving circuit based on frequency modulation...
Interface circuits for capacitive MEMS accelerometers are conventionally based on charge-based approaches. A promising alternative to these is provided by frequency-based readout techniques that have some unique advantages as well as a few challenges...
In this paper, a novel single-axis MEMS tilt sensor is presented. It contains a hexagonal proof mass, six micro-lever force amplifiers and three double-ended-tuning fork (DETF) resonant strain gauges. The proof mass is placed in the center with the m...
The oscillation of the sense mode of the micro-machined Coriolis vibratory gyroscope (MCVG) with high quality factor (Q) is analyzed in this study and the corresponding force feedback control scheme is presented to suppress this oscillation. The cont...
The driven damped pendulum is a foundational model in nonlinear dynamics, with applications ranging from Josephson junctions to MEMS oscillators. Conventional dimensionless treatments obscure the common physical origin of damping and driving in the i...
This paper addresses indirect sensing in resonant, oscillating, and periodically forced sensors, where the physical measurand is not directly available as a static output but is encoded in the dynamic response of the device. The sensor and its excita...
Numerical prediction of high-order nonlinear oscillators using conventional physics-informed neural networks (PINNs) is severely hampered by spectral bias, which prioritizes low-frequency components and leads to significant errors in capturing multi-...
This study presents a novel dual phase-locked loop two-dimensional synchronized motion modulation (TDSMM-DPLL) system designed to enhance the low-frequency detection capability of magnetoresistive (MR) sensors by effectively mitigating 1/f noise. The...
We present a 5.41 MHz square-extensional (SE) mode resonator in closed-loop oscillation for resonant mass sensing in the liquid phase. The resonator has been fabricated in piezoelectric thin film aluminum nitride (AlN) on silicon (Si). The strain pro...
Lorentz-force Microelectromechanical Systems (MEMS) magnetometers have been proposed as a replacement for magnetometers currently used in consumer electronics market. Being MEMS devices, they can be manufactured in the same die as accelerometers and...
This paper investigates the resonant behaviour of silicon-based micro-oscillators with a length of 3600 µm, a width of 1800 µm and a thickness of 10 µm over a wide range of ambient gas (N2) pressures, extending over six orders of magnitude from 10−3...
This study presents the design and fabrication of a capacitive micro humidity sensor integrated with a five-stage ring oscillator circuit on chip using the complimentary metal oxide semiconductor (CMOS) process. The area of the humidity sensor chip i...
Reliable operation of a miniaturized mechanical system requires that nanomechanical motion be transduced into electrical signals (and vice versa) with high fidelity and in a robust manner. Progress in transducer technologies is expected to impact num...
In this study, we fabricated a wireless micro FET (field effect transistor) pressure sensor based on the commercial CMOS (complementary metal oxide semiconductor) process and a post-process. The wireless micro pressure sensor is composed of a FET pre...
The study investigates a capacitive micro pressure sensor integrated with a ring oscillator circuit on a chip. The integrated capacitive pressure sensor is fabricated using the commercial CMOS (complementary metal oxide semiconductor) process and a p...
In this work we present how to describe mechanical impedance of a photon force (PF) MEMS sensor dedicated to structures’ optomechanical studies. An actuating force (photon force) is caused by the reflection and absorption of the electromagnetic radia...
Micro- and nano-mechanical systems may take advantage from using materials having multiple functional characteristics. VO2 is a compound characterised by a solid state phase transition (SSPT) just above room temperature, consisting in a concurrent me...
In this paper, the basic concepts of the equivalent model, vibration modes, and conduction mechanisms of MEMS resonators are described. By reviewing the existing representative results, the performance parameters and key technologies, such as quality...
Force measurement is a science discipline that experiences significant progress with the introduction of new materials and evaluation methods. Many different sensor types, working on different principles, have been developed and reviewed and have fou...
Microresonators have a variety of scientific and industrial applications. The measurement methods based on the natural frequency shift of a resonator have been studied for a wide range of applications, including the detection of the microscopic mass...
Recently, consumer applications have dramatically created the demand for low-cost and compact gyroscopes. Therefore, on the basis of microelectromechanical systems (MEMS) technology, many gyroscopes have been developed and successfully commercialized...
The influence of the driving electrode positions on the dynamic response of polysilicon MEMS resonators used in biosensing applications is studied as a function of the operating conditions (vacuum versus free-air operating mode). The scope of this re...
In this paper we present a novel approach to achieve indirect quasistatic deflection of 2D MEMS scanning micromirrors by solely resonant excitation utilizing gyroscopic effects. Therefore the micromirror is set to oscillate in its mirror plane additi...
Over the last two decades, piezoelectric resonant sensors based on micro-electromechanical systems (MEMS) technologies have been extensively studied as such sensors offer several unique benefits, such as small form factor, high sensitivity, low noise...
MEMS resonators have attracted attention for their wide applications in highly accurate clock references, sensors, wireless communications, frequency control, etc. Most of the output frequencies of MEMS resonators require post-processing or calibrati...
This paper reports a novel 3D-printed MEMS resonant magnetometer with optical readout which features a mechanical conversion of a vertical oscillation into a horizontal one. This demonstrates the advantages of 3D-printing technology in terms of rapid...
We present a displacement-sensitive sensor comprising a microelectromechanical (MEMS) chip and organic optoelectronic components capable of measuring the heart and respiration rate on humans. The MEMS sensor relies on the inertial deflection of a sma...
In this study, a multi-function microelectromechanical system (MEMS) was integrated with a MEMS oscillator, using the resonant frequency oscillation characteristics of the oscillator to provide the Lorentz current of the magnetometer to enhance a lar...
Time and frequency metrology depends on stable oscillators in both radio-frequency and optical domains. With the increased complexity of the highly precise oscillators also came the demand for delivering the oscillators’ harmonic signals betwee...
Micro-electro-mechanical system (MEMS) mirrors are widely used for optical modulation, attenuation, steering, switching and tracking. In most cases, MEMS mirrors are packaged in air, resulting in overshoot and ringing upon actuation. In this paper, a...
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