Search Results (16)

Conventional gas direction estimation methods that rely on concentration gradients or time-of-arrival differences typically require multiple spatially dispersed sensors, leading to increased system bulkiness and complexity. Furthermore, previous CMOS-based approaches that relied on gas diffusion struggled to achieve stable direction estimation in high-speed airflow environments. To address these challenges, we propose a streamlined method integrating a pillar onto a single CMOS gas-sensor array, eliminating additional MEMS fabrication. This approach exploits a fluid dynamic phenomenon where the pillar creates a distinct flow “shadow” pattern (a region of localized gas dilution) on the sensor surface. Experimental verification using ammonia gas confirmed that this “shadow” is clearly observable as a localized reduction in sensor output under high-speed turbulent flow. Crucially, the spatial position of this pattern correlates strongly with the direction of gas inflow. This study demonstrates the feasibility of gas direction estimation using a single chip, paving the way for high-precision detection in challenging, rapid-airflow environments. Full article

Building on our previous 310-h test of a larger MEMS sensor, this study develops and validates a miniaturized, lift-off-fabricated, and FPC-integrated three-in-one microsensor. In addition to extending the operation to 744 h, we introduce a wireless MQTT/Node-RED architecture to enable real-time IoT-level monitoring in factory HVAC ducts. The microsensor was fabricated using Micro-electro-mechanical systems (MEMS) technology and integrated with a flexible printed circuit (FPC) for improved mechanical compliance and ease of installation. To assess its durability and reliability, a 744-h long-term test was conducted in an industrial HVAC environment, where the performance of the microsensor was compared with that of two commercially available velocity sensors. The integrated sensor exhibited stable operation throughout the test and demonstrated effective measurement capabilities in the ranges of 10–40 °C for temperature, 60–90% RH for humidity, and 1.5–5.0 m/s for airflow velocity, with an overall accuracy of approximately ±3%. The results highlight the sensor’s potential for real-time environmental monitoring in factory HVAC systems, offering advantages in integration, adaptability, and cost-effectiveness compared to traditional single-function commercial sensors. Full article

This study presents the development and optimization of a flexible integrated three-in-one micro-sensor using Micro-Electro-Mechanical Systems (MEMS) technology. To enhance its reliability and performance, the Taguchi Method was employed to analyze and optimize key fabrication parameters, including the electrode area, electrode thickness, and protective layer thickness. An L4 orthogonal array design enabled efficient experimentation with minimal runs. Experimental results demonstrate that optimized parameter combinations significantly improve sensor linearity, sensitivity, and reproducibility. Comparative analysis with commercial sensors shows the superior reliability of the self-fabricated sensor, particularly in airflow velocity detection. The findings validate the use of the Taguchi Method for robust MEMS sensor design and highlight its potential for industrial heating, ventilation, and air conditioning (HVAC) applications. Full article

Currently, wearable sensors can measure vital sign frequencies, such as respiration rate, but they fall short of providing quantitative data, such as respiratory tidal volume. Meanwhile, the airflow at the mouth carries both the frequency and quantitative respiratory signals. In this study, we propose a method to calibrate a wearable piezoelectric thread sensor placed on the chest using mouth airflow for accurate quantitative respiration monitoring. Prior to human trials, we introduced an artificial ventilator as a test subject. To validate the proposed concept, we embedded a miniaturized tube airflow sensor at the ventilator’s outlet, which simulates human respiration, and attached a wearable piezoelectric thread to the piston, which moves periodically to mimic human chest movement. The integrated output readings from the wearable sensor aligned with the airflow rate measurements, demonstrating its ability to accurately monitor not only respiration rate but also quantitative metrics such as respiratory volume. Finally, tidal volume measurement was demonstrated using the wearable piezoelectric thread. Full article

Determination of airflow rates is an inevitable part of the energy-efficient control of ventilation systems. To achieve efficient control, the flowmeters used must be suitably accurate and create minimum disturbance to the airflow. In this study, we evaluate the quantitative performance characteristics of an innovative micro-electromechanical systems (MEMS) flowmeter, a so-called Elastic Filament Velocimetry (EFV), in ventilation ducts. Two versions of the EFV-sensor, i.e., an 11-nanoribbon and a 22-nanoribbon variety, were evaluated in laboratory studies. The results indicate that the 11-nanoribbon sensor is more suitable for air velocity measurements in ducts than the 22-nanoribbon sensor. The 11-nanoribbon sensor can measure air velocities from 0.3 m/s. The maximum variation of the sensor-output is 3% for velocities over 0.5 m/s. Calibration models have been developed for the 11-nanoribbon sensor. The error due to model calibration is lower than ±5% for velocities over 0.6 m/s. Moreover, laboratory studies were performed to investigate the airflow disturbance in a duct system due to the EFV sensor. The results were compared with the corresponding disturbance caused by two different types of self-averaging probes. At a bulk velocity of 3 m/s, the self-averaging probes introduced a greater pressure drop by at least 50% compared to the EFV-sensor. Full article

In this study, a tunable terahertz (THz) metamaterial using the micro-electro-mechanical system (MEMS) technique is proposed to demonstrate pressure sensing application. This MEMS-based tunable metamaterial (MTM) structure is composed of gold (Au) split-ring resonators (SRRs) on patterned silicon (Si) substrate with through Si via (TSV). SRR is designed as a cantilever on the TSV structure. When the airflow passes through the TSV from bottom to up and then bends the SRR cantilever, the SRR cantilever will bend upward. The electromagnetic responses of MTM show the tunability and polarization-dependent characteristics by bending the SRR cantilever. The resonances can both be blue-shifted from 0.721 THz to 0.796 THz with a tuning range of 0.075 THz in transverse magnetic (TM) mode and from 0.805 THz to 0.945 THz with a tuning range of 0.140 THz in transverse electric (TE) mode by changing the angle of SRR cantilever from 10° to 45°. These results provide the potential applications and possibilities of MTM design for use in pressure and flow rate sensors. Full article

A tube-integrated flow sensor is proposed in this study by integrating a micro-electro mechanical systems (MEMS) flow-sensing element and electrical wiring structure on the same copper on polyimide (COP) substrate. The substrate was rolled into a circular tube with the flow-sensing element installed at the center of the tube. The signal lines were simultaneously formed and connected to the Cu layer of the substrate during the fabrication of the sensing structure, thus simplifying the electrical connection process. Finally, by rolling the fabricated sensor substrate, the flow sensor device itself was transformed into a circular tube structure, which defined the airflow region. By implementing several slits on the substrate, the sensing element was successfully placed at the center of the tube where the flow velocity is maximum. Compared to the conventional sensor structure in which the sensor was placed on the inner wall surface of the tube, the sensitivity of the sensor was doubled. Full article

Detection and control of flow separation is a key to improving the efficiency of fluid machinery. In this study, we developed a flexible MEMS (microelectromechanical systems) sensor for measuring the wall shear stress and flow angle in subsonic airflow. The developed sensor is made of a flexible polyimide film and a microheater surrounded by three temperature sensor pairs. The sensor measures the wall shear stress from the heater output and the flow angle from the temperature gradient around the heater. The geometry and design of the heater and temperature sensors were determined based on numerical simulations. To evaluate the validity of the sensor, we conducted an experiment to measure the wall shear stress and the flow angle in a wind tunnel in different velocities ranging from 30 m/s to 170 m/s, equivalent to Mach numbers from 0.1 to 0.5. The heater output was proportional to one-third power of the wall shear stress. Additionally, the bridge output correlating the temperature difference between two opposing temperature sensors showed sinusoidal variation depending on the flow angle. Consequently, we have clarified that the developed sensor can measure both the wall shear stress and flow direction in subsonic flow. Full article

This paper presents an airflow vector sensor for drones. Drones are expected to play a role in various industrial fields. However, the further improvement of flight stability is a significant issue. In particular, compact drones are more affected by wind during flight. Thus, it is desirable to detect air current directly by an airflow sensor and feedback to the control. In the case of a drone in flight, the sensor should detect wind velocity and direction, particularly in the horizontal direction, for a sudden crosswind. In addition, the sensor must also be small, light, and highly sensitive. Here, we propose a compact spherical airflow sensor for drones. Three highly sensitive microelectromechanical system (MEMS) differential pressure (DP) sensor chips were built in the spherical housing as the sensor elements. The 2D wind direction and velocity can be measured from these sensor elements. The fabricated airflow sensor was attached to a small toy drone. It was demonstrated that the sensor provided an output corresponding to the wind velocity and direction when horizontal wind was applied via a fan while the drone was flying. The experimental results demonstrate that the proposed sensor will be helpful for directly measuring the air current for a drone in flight. Full article

A respiratory measurement system composed of pressure and airflow sensors was introduced to precisely control the respiratory condition during animal experiments. The flow sensor was a hot-wire thermal airflow meter with a directional detection and airflow temperature change compensation function based on MEMS technology, and the pressure sensor was a commercially available one also produced by MEMS. The artificial dead space in the system was minimized to the value of 0.11 mL by integrating the two sensors on the same plate (26.0 mm × 15.0 mm). A balloon made of a silicone resin with a hardness of A30 was utilized as the simulated lung system and applied to the elasticity evaluation of the respiratory system in a living rat. The inside of the respiratory system was normally pressurized without damage, and we confirmed that the developed system was able to evaluate the elasticity of the lung tissue in the rat by using the pressure value obtained at the quasi-static conditions in the case of the ventilation in the animal experiments. Full article

(1) The aim of the study was to investigate the spatial and temporal characteristics of the airflow created by two commercially available non-contact tonometers: the CorvisST and the Ocular Response Analyser (ORA). (2) The airflow pressure was measured using a microelectromechanical system (MEMS) pressure sensor to investigate the spatial and temporal distribution. The airflow from the CorvisST and Ocular Response Analyser were mapped to a 600 µm and a 1 mm resolution grid, respectively. (3) Central airflow pressure of the CorvisST (96.4 ± 1.4 mmHg) was higher than that of the Ocular Response Analyser (91.7 ± 0.7 mmHg). The duration of the air-puffs also differed, with the CorvisST showing a shorter duration (21.483 ± 0.2881 ms) than that of the ORA (23.061 ± 0.1872 ms). The rising edge of the CorvisST airflow pressure profile demonstrated a lower gradient (+8.94 mmHg/ms) compared to that of the Ocular Response Analyser (+11.00 mmHg/ms). Both had similar decay response edges: CorvisST −11.18 mmHg/ms, Ocular Response Analyser −11.65 mmHg/ms. (4) The study presents a valid method to investigate the physical dimensions of the airflow pressure of non-contact tonometers. Novel findings relating to the magnitude, duration and spatial characteristics of the respective airflow pressures are reported. It is anticipated that this information will better inform clinical studies and theoretical models relating to ocular biomechanics. Full article

In this paper, a Micro-Electro-Mechanical Systems (MEMS) calorimetric sensor with its measurement electronics is designed, fabricated, and tested. The idea is to apply a configurable voltage to the sensitive resistor and measure the current flowing through the heating resistor using a current mirror controlled by an analog feedback loop. In order to cancel the offset and errors of the amplifier, the constant temperature anemometer (CTA) circuit is periodically calibrated. This technique improves the accuracy of the measurement and allows high sensitivity and high bandwidth frequency. The CTA circuit is implemented in a CMOS FD-SOI 28 nm technology. The supply voltage is 1.2 V while the core area is 0.266 mm². Experimental results demonstrate the feasibility of the MEMS calorimetric sensor for measuring airflow rate. The developed MEMS calorimetric sensor shows a maximum normalized sensitivity of 117 mV/(m/s)/mW with respect to the input heating power and a wide dynamic flow range of 0–26 m/s. The high sensitivity and wide dynamic range achieved by our MEMS flow sensor enable its deployment as a promising sensing node for direct wall shear stress measurement applications. Full article

This research explores a new ATE (Automatic Testing Equipment) method for Micro Electro Mechanical Systems (MEMS) devices. In this method, microscale aerodynamic drag force is generated on a movable part of a MEMS sensor from a micronozzle hole located a specific distance above the chip that will result in a measurable change in output. This approach has the potential to be generalized for the characterization of every MEMS device in mass production lines to test the functionality of devices rapidly and characterize important mechanical properties. The most important testing properties include the simultaneous application of controllable and non-invasive manipulative force, a single handler for multi-sensor, and non-contact characterization, which are relatively difficult to find with other contemporary approaches. Here we propose a custom-made sensing platform consisting of a microcantilever array interconnected to a data acquisition device to read the capacitive effects of each cantilever’s deflection caused by air drag force. This platform allows us to empirically prove the functionality and applicability of the proposed characterization method using airflow force stimuli. The results, stimulatingly, exhibited that air force from a hole of 5 µm radii located 25 µm above a 200 × 200 µm² surface could be focused on a circular spot with radii of approximately 5 µm with surface sweep accuracy of <8 µm. This micro-size airflow jet can be specifically designed to apply airflow force on the MEMS movable component surface. Furthermore, it was shown that the generated air force range could be controlled from 20 nN to 60 nN, approximately, with a linear dependency on airflow ranging from 5 m/s to 20 m/s, which is from a 5 µm radius microhole air jet placed 400 µm above the chip. In this case-study chip, for a microcantilever with a length of 400 µm, the capacitance curve increased linearly from 28.2 pF to 30.5 pF with airflow variation from 5 m/s to 21 m/s from a hole. The resultant curve is representative of a standard curve for testing of the further similar die. Based on these results, this paper paves the way towards the development of a new non-contact, non-invasive, easy-to-operate, reliable, and relatively cheap air-based method for characterizing and testing MEMS sensors. Full article

Evolving over millions of years, hair-like natural flow sensors called cilia, which are found in fish, crickets, spiders, and inner ear cochlea, have achieved high resolution and sensitivity in flow sensing. In the pursuit of achieving such exceptional flow sensing performance in artificial sensors, researchers in the past have attempted to mimic the material, morphological, and functional properties of biological cilia sensors, to develop MEMS-based artificial cilia flow sensors. However, the fabrication of bio-inspired artificial cilia sensors involves complex and cumbersome micromachining techniques that lay constraints on the choice of materials, and prolongs the time taken to research, design, and fabricate new and novel designs, subsequently increasing the time-to-market. In this work, we establish a novel process flow for fabricating inexpensive, yet highly sensitive, cilia-inspired flow sensors. The artificial cilia flow sensor presented here, features a cilia-inspired high-aspect-ratio titanium pillar on an electrospun carbon nanofiber (CNF) sensing membrane. Tip displacement response calibration experiments conducted on the artificial cilia flow sensor demonstrated a lower detection threshold of 50 µm. Furthermore, flow calibration experiments conducted on the sensor revealed a steady-state airflow sensitivity of 6.16 mV/(m s⁻¹) and an oscillatory flow sensitivity of 26 mV/(m s⁻¹), with a lower detection threshold limit of 12.1 mm/s in the case of oscillatory flows. The flow sensing calibration experiments establish the feasibility of the proposed method for developing inexpensive, yet sensitive, flow sensors; which will be useful for applications involving precise flow monitoring in microfluidic devices, precise air/oxygen intake monitoring for hypoxic patients, and other biomedical devices tailored for intravenous drip/urine flow monitoring. In addition, this work also establishes the applicability of CNFs as novel sensing elements in MEMS devices and flexible sensors. Full article

A new variant of MEMS surface fence is proposed for shear-stress estimation under high-speed, high-temperature flow conditions. Investigation of high-temperature resistance including heat-resistant mechanism and process, in conjunction with high-temperature packaging design, enable the sensor to be used in environment up to 400 °C. The packaged sensor is calibrated over a range of ~65 Pa and then used to examine the development of the transient flow of the scramjet ignition process (Mach 2 airflow, stagnation pressure, and a temperature of 0.8 MPa and 950 K, respectively). The results show that the sensor is able to detect the transient flow conditions of the scramjet ignition process including shock impact, flow correction, steady state, and hydrogen off. Full article