Next Article in Journal
Study on the Synergistic Enhancement of Crude Oil Recovery by Bacillus Co-Culture Systems
Previous Article in Journal
Current Processing Technologies and Challenges in Hybrid Meat Production
Previous Article in Special Issue
A Low-Code Visual Framework for Deep Learning-Based Remaining Useful Life Prediction
 
 
Search for Articles:
Title / Keyword
Author / Affiliation / Email
Journal
Article Type
 
 
Advanced Search
 
Section
Special Issue
Volume
Issue
Number
Page
 
Journals
Processes
Volume 13
Issue 9
10.3390/pr13092852
processes-logo
Submit to this Journal Review for this Journal Propose a Special Issue
► Article Menu

Article Menu

share Share announcement Help format_quote Cite question_answer Discuss in SciProfiles
first_page
settings
Order Article Reprints
Font Type:
Arial Georgia Verdana
Font Size:
Aa Aa Aa
Line Spacing:
Column Width:
Background:
This is an early access version, the complete PDF, HTML, and XML versions will be available soon.
Article

Enhancing the Reliability and Durability of Micro-Sensors Using the Taguchi Method

by
Chi-Yuan Lee
*,
Jiann-Shing Shieh
,
Guan-Quan Huang
,
Chen-Kai Liu
,
Najsm Cox
and
Chia-Hao Chou
Department of Mechanical Engineering, Yuan Ze Fuel Cell Center, Yuan Ze University, Taoyuan 32003, Taiwan
*
Author to whom correspondence should be addressed.
Processes 2025, 13(9), 2852; https://doi.org/10.3390/pr13092852
Submission received: 6 August 2025 / Revised: 29 August 2025 / Accepted: 3 September 2025 / Published: 5 September 2025
(This article belongs to the Special Issue Application of Artificial Intelligence in Industrial Process Modelling and Optimization (2nd Edition))
Versions Notes

Abstract

This study presents the development and optimization of a flexible integrated three-in-one micro-sensor using Micro-Electro-Mechanical Systems (MEMS) technology. To enhance its reliability and performance, the Taguchi Method was employed to analyze and optimize key fabrication parameters, including the electrode area, electrode thickness, and protective layer thickness. An L4 orthogonal array design enabled efficient experimentation with minimal runs. Experimental results demonstrate that optimized parameter combinations significantly improve sensor linearity, sensitivity, and reproducibility. Comparative analysis with commercial sensors shows the superior reliability of the self-fabricated sensor, particularly in airflow velocity detection. The findings validate the use of the Taguchi Method for robust MEMS sensor design and highlight its potential for industrial heating, ventilation, and air conditioning (HVAC) applications.
Keywords: Taguchi Method; MEMS; reliability; durability Taguchi Method; MEMS; reliability; durability

Share and Cite

MDPI and ACS Style

Lee, C.-Y.; Shieh, J.-S.; Huang, G.-Q.; Liu, C.-K.; Cox, N.; Chou, C.-H. Enhancing the Reliability and Durability of Micro-Sensors Using the Taguchi Method. Processes 2025, 13, 2852. https://doi.org/10.3390/pr13092852

AMA Style

Lee C-Y, Shieh J-S, Huang G-Q, Liu C-K, Cox N, Chou C-H. Enhancing the Reliability and Durability of Micro-Sensors Using the Taguchi Method. Processes. 2025; 13(9):2852. https://doi.org/10.3390/pr13092852

Chicago/Turabian Style

Lee, Chi-Yuan, Jiann-Shing Shieh, Guan-Quan Huang, Chen-Kai Liu, Najsm Cox, and Chia-Hao Chou. 2025. "Enhancing the Reliability and Durability of Micro-Sensors Using the Taguchi Method" Processes 13, no. 9: 2852. https://doi.org/10.3390/pr13092852

APA Style

Lee, C.-Y., Shieh, J.-S., Huang, G.-Q., Liu, C.-K., Cox, N., & Chou, C.-H. (2025). Enhancing the Reliability and Durability of Micro-Sensors Using the Taguchi Method. Processes, 13(9), 2852. https://doi.org/10.3390/pr13092852

Note that from the first issue of 2016, this journal uses article numbers instead of page numbers. See further details here.

Article Metrics

Back to TopTop