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Sensors 2017, 17(10), 2412;

A High-Temperature MEMS Surface Fence for Wall-Shear-Stress Measurement in Scramjet Flow

Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi’an 710072, China
Author to whom correspondence should be addressed.
Received: 5 September 2017 / Revised: 30 September 2017 / Accepted: 19 October 2017 / Published: 22 October 2017
(This article belongs to the Special Issue Sensors and Materials for Harsh Environments)
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A new variant of MEMS surface fence is proposed for shear-stress estimation under high-speed, high-temperature flow conditions. Investigation of high-temperature resistance including heat-resistant mechanism and process, in conjunction with high-temperature packaging design, enable the sensor to be used in environment up to 400 °C. The packaged sensor is calibrated over a range of ~65 Pa and then used to examine the development of the transient flow of the scramjet ignition process (Mach 2 airflow, stagnation pressure, and a temperature of 0.8 MPa and 950 K, respectively). The results show that the sensor is able to detect the transient flow conditions of the scramjet ignition process including shock impact, flow correction, steady state, and hydrogen off. View Full-Text
Keywords: surface fence; wall shear stress; scramjet flow; high temperature surface fence; wall shear stress; scramjet flow; high temperature

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Ma, C.; Ma, B.; Deng, J.; Yuan, W.; Zhou, Z.; Zhang, H. A High-Temperature MEMS Surface Fence for Wall-Shear-Stress Measurement in Scramjet Flow. Sensors 2017, 17, 2412.

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