Abstract
A new variant of MEMS surface fence is proposed for shear-stress estimation under high-speed, high-temperature flow conditions. Investigation of high-temperature resistance including heat-resistant mechanism and process, in conjunction with high-temperature packaging design, enable the sensor to be used in environment up to 400 °C. The packaged sensor is calibrated over a range of ~65 Pa and then used to examine the development of the transient flow of the scramjet ignition process (Mach 2 airflow, stagnation pressure, and a temperature of 0.8 MPa and 950 K, respectively). The results show that the sensor is able to detect the transient flow conditions of the scramjet ignition process including shock impact, flow correction, steady state, and hydrogen off.