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Keywords = MEM

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16 pages, 2971 KiB  
Article
Dissecting Organ-Specific Aroma-Active Volatile Profiles in Two Endemic Phoebe Species by Integrated GC-MS Metabolomics
by Ming Xu, Yu Chen and Guoming Wang
Metabolites 2025, 15(8), 526; https://doi.org/10.3390/metabo15080526 (registering DOI) - 3 Aug 2025
Abstract
Background: Phoebe zhennan and Phoebe chekiangensis are valuable evergreen trees recognized for their unique aromas and ecological significance, yet the organ-related distribution and functional implications of aroma-active volatiles remain insufficiently characterized. Methods: In this study, we applied an integrated GC-MS-based volatile metabolomics [...] Read more.
Background: Phoebe zhennan and Phoebe chekiangensis are valuable evergreen trees recognized for their unique aromas and ecological significance, yet the organ-related distribution and functional implications of aroma-active volatiles remain insufficiently characterized. Methods: In this study, we applied an integrated GC-MS-based volatile metabolomics approach combined with a relative odor activity value (rOAV) analysis to comprehensively profile and compare the volatile metabolite landscape in the seeds and leaves of both species. Results: In total, 1666 volatile compounds were putatively identified, of which 540 were inferred as key aroma-active contributors based on the rOAV analysis. A multivariate statistical analysis revealed clear tissue-related separation: the seeds were enriched in sweet, floral, and fruity volatiles, whereas the leaves contained higher levels of green leaf volatiles and terpenoids associated with ecological defense. KEGG pathway enrichment indicated that terpenoid backbone and phenylpropanoid biosynthesis pathways played major roles in shaping these divergent profiles. A Venn diagram analysis further uncovered core and unique volatiles underlying species and tissue specificity. Conclusions: These insights provide an integrated reference for understanding tissue-divergent volatile profiles in Phoebe species and offer a basis for fragrance-oriented selection, ecological trait evaluation, and the sustainable utilization of organ-related metabolic characteristics in breeding and conservation programs. Full article
(This article belongs to the Section Plant Metabolism)
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42 pages, 4490 KiB  
Review
Continuous Monitoring with AI-Enhanced BioMEMS Sensors: A Focus on Sustainable Energy Harvesting and Predictive Analytics
by Mingchen Cai, Hao Sun, Tianyue Yang, Hongxin Hu, Xubing Li and Yuan Jia
Micromachines 2025, 16(8), 902; https://doi.org/10.3390/mi16080902 (registering DOI) - 31 Jul 2025
Viewed by 247
Abstract
Continuous monitoring of environmental and physiological parameters is essential for early diagnostics, real-time decision making, and intelligent system adaptation. Recent advancements in bio-microelectromechanical systems (BioMEMS) sensors have significantly enhanced our ability to track key metrics in real time. However, continuous monitoring demands sustainable [...] Read more.
Continuous monitoring of environmental and physiological parameters is essential for early diagnostics, real-time decision making, and intelligent system adaptation. Recent advancements in bio-microelectromechanical systems (BioMEMS) sensors have significantly enhanced our ability to track key metrics in real time. However, continuous monitoring demands sustainable energy supply solutions, especially for on-site energy replenishment in areas with limited resources. Artificial intelligence (AI), particularly large language models, offers new avenues for interpreting the vast amounts of data generated by these sensors. Despite this potential, fully integrated systems that combine self-powered BioMEMS sensing with AI-based analytics remain in the early stages of development. This review first examines the evolution of BioMEMS sensors, focusing on advances in sensing materials, micro/nano-scale architectures, and fabrication techniques that enable high sensitivity, flexibility, and biocompatibility for continuous monitoring applications. We then examine recent advances in energy harvesting technologies, such as piezoelectric nanogenerators, triboelectric nanogenerators and moisture electricity generators, which enable self-powered BioMEMS sensors to operate continuously and reducereliance on traditional batteries. Finally, we discuss the role of AI in BioMEMS sensing, particularly in predictive analytics, to analyze continuous monitoring data, identify patterns, trends, and anomalies, and transform this data into actionable insights. This comprehensive analysis aims to provide a roadmap for future continuous BioMEMS sensing, revealing the potential unlocked by combining materials science, energy harvesting, and artificial intelligence. Full article
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15 pages, 5631 KiB  
Article
Design and Evaluation of a Capacitive Micromachined Ultrasonic Transducer(CMUT) Linear Array System for Thickness Measurement of Marine Structures Under Varying Environmental Conditions
by Changde He, Mengke Luo, Hanchi Chai, Hongliang Wang, Guojun Zhang, Renxin Wang, Jiangong Cui, Yuhua Yang, Wendong Zhang and Licheng Jia
Micromachines 2025, 16(8), 898; https://doi.org/10.3390/mi16080898 (registering DOI) - 31 Jul 2025
Viewed by 92
Abstract
This paper presents the design, fabrication, and experimental evaluation of a capacitive micromachined ultrasonic transducer (CMUT) linear array for non-contact thickness measurement of marine engineering structures. A 16-element CMUT array was fabricated using a silicon–silicon wafer bonding process, and encapsulated in polyurethane to [...] Read more.
This paper presents the design, fabrication, and experimental evaluation of a capacitive micromachined ultrasonic transducer (CMUT) linear array for non-contact thickness measurement of marine engineering structures. A 16-element CMUT array was fabricated using a silicon–silicon wafer bonding process, and encapsulated in polyurethane to ensure acoustic impedance matching and environmental protection in underwater conditions. The acoustic performance of the encapsulated CMUT was characterized using standard piezoelectric transducers as reference. The array achieved a transmitting sensitivity of 146.82 dB and a receiving sensitivity of −229.55 dB at 1 MHz. A complete thickness detection system was developed by integrating the CMUT array with a custom transceiver circuit and implementing a time-of-flight (ToF) measurement algorithm. To evaluate environmental robustness, systematic experiments were conducted under varying water temperatures and salinity levels. The results demonstrate that the absolute thickness measurement error remains within ±0.1 mm under all tested conditions, satisfying the accuracy requirements for marine structural health monitoring. The results validate the feasibility of CMUT-based systems for precise and stable thickness measurement in underwater environments, and support their application in non-destructive evaluation of marine infrastructure. Full article
(This article belongs to the Special Issue MEMS/NEMS Devices and Applications, 3rd Edition)
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21 pages, 5748 KiB  
Article
Potential and Challenges of a Targeted Membrane Pre-Fouling: Process Performance of Milk Protein Fractionation After the Application of a Transglutaminase Treatment of Casein Micelles
by Michael Reitmaier, Ulrich Kulozik and Petra Först
Foods 2025, 14(15), 2682; https://doi.org/10.3390/foods14152682 - 30 Jul 2025
Viewed by 160
Abstract
The covalent cross-linking of caseins by the enzyme transglutaminase (Tgase) stabilizes the structure of casein micelles. In our study, the effects of a pretreatment of skim milk (SM) by Tgase on milk protein fractionation by microfiltration were tested. Tgase was found to induce [...] Read more.
The covalent cross-linking of caseins by the enzyme transglutaminase (Tgase) stabilizes the structure of casein micelles. In our study, the effects of a pretreatment of skim milk (SM) by Tgase on milk protein fractionation by microfiltration were tested. Tgase was found to induce amount-dependent modifications of all milk proteins in SM and a reduction in deposit resistance for laboratory dead-end filtrations of up to 20%. This improvement in process performance could partially be confirmed in pilot-scale cross-flow filtrations of Tgase-pretreated SM and micellar casein solutions (MCC). These comparative trials with untreated retentates under a variation of ΔpTM (0.5–2 bar) at 10 and 50° revealed distinct differences in deposit behavior and achieved the reduction in deposit resistance in a range of 0–20%. The possibility of pre-fouling with enzymatically pretreated MCC prior to SM filtration was also investigated. Under different pre-fouling conditions, practical modes of retentate change, and pre-foulant compositions, a switch to untreated SM consistently resulted in an immediate and major increase in deposit resistance by 50–150%. This was partially related to the change in the ionic environment and the protein fraction. Nevertheless, our results underline the potential of Tgase pretreatment and pre-fouling approaches to alter filtration performance for different applications. Full article
(This article belongs to the Special Issue Membranes for Innovative Bio-Food Processing)
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16 pages, 2030 KiB  
Article
Study on Comb-Drive MEMS Acceleration Sensor Used for Medical Purposes: Monitoring of Balance Disorders
by Michał Szermer and Jacek Nazdrowicz
Electronics 2025, 14(15), 3033; https://doi.org/10.3390/electronics14153033 - 30 Jul 2025
Viewed by 219
Abstract
This article presents a comprehensive modeling and simulation framework for a capacitive MEMS accelerometer integrated with a sigma-delta analog-to-digital converter (ADC), with a focus on applications in wearable health and motion monitoring devices. The accelerometer used in the system is connected to a [...] Read more.
This article presents a comprehensive modeling and simulation framework for a capacitive MEMS accelerometer integrated with a sigma-delta analog-to-digital converter (ADC), with a focus on applications in wearable health and motion monitoring devices. The accelerometer used in the system is connected to a smartphone equipped with dedicated software and will be used to assess the risk of falling, which is crucial for patients with balance disorders. The authors designed the accelerometer with special attention paid to the specification required in a system, where the acceleration is ±2 g and the frequency is 100 Hz. They investigated the sensor’s behavior in the DC, AC, and time domains, capturing both the mechanical response of the proof mass and the resulting changes in output capacitance due to external acceleration. A key component of the simulation is the implementation of a second-order sigma-delta modulator designed to digitize the small capacitance variations generated by the sensor. The Simulink model includes the complete signal path from analog input to quantization, filtering, decimation, and digital-to-analog reconstruction. By combining MEMS+ modeling with MATLAB-based system-level simulations, the workflow offers a fast and flexible alternative to traditional finite element methods and facilitates early-stage design optimization for MEMS sensor systems intended for real-world deployment. Full article
(This article belongs to the Special Issue Wearable Sensors for Human Position, Attitude and Motion Tracking)
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19 pages, 5970 KiB  
Article
Interface Material Modification to Enhance the Performance of a Thin-Film Piezoelectric-on-Silicon (TPoS) MEMS Resonator by Localized Annealing Through Joule Heating
by Adnan Zaman, Ugur Guneroglu, Abdulrahman Alsolami, Liguan Li and Jing Wang
Micromachines 2025, 16(8), 885; https://doi.org/10.3390/mi16080885 - 29 Jul 2025
Viewed by 193
Abstract
This paper presents a novel approach employing localized annealing through Joule heating to enhance the performance of Thin-Film Piezoelectric-on-Silicon (TPoS) MEMS resonators that are crucial for applications in sensing, energy harvesting, frequency filtering, and timing control. Despite recent advancements, piezoelectric MEMS resonators still [...] Read more.
This paper presents a novel approach employing localized annealing through Joule heating to enhance the performance of Thin-Film Piezoelectric-on-Silicon (TPoS) MEMS resonators that are crucial for applications in sensing, energy harvesting, frequency filtering, and timing control. Despite recent advancements, piezoelectric MEMS resonators still suffer from anchor-related energy losses and limited quality factors (Qs), posing significant challenges for high-performance applications. This study investigates interface modification to boost the quality factor (Q) and reduce the motional resistance, thus improving the electromechanical coupling coefficient and reducing insertion loss. To balance the trade-off between device miniaturization and performance, this work uniquely applies DC current-induced localized annealing to TPoS MEMS resonators, facilitating metal diffusion at the interface. This process results in the formation of platinum silicide, modifying the resonator’s stiffness and density, consequently enhancing the acoustic velocity and mitigating the side-supporting anchor-related energy dissipations. Experimental results demonstrate a Q-factor enhancement of over 300% (from 916 to 3632) and a reduction in insertion loss by more than 14 dB, underscoring the efficacy of this method for reducing anchor-related dissipations due to the highest annealing temperature at the anchors. The findings not only confirm the feasibility of Joule heating for interface modifications in MEMS resonators but also set a foundation for advancements of this post-fabrication thermal treatment technology. Full article
(This article belongs to the Special Issue MEMS Nano/Micro Fabrication, 2nd Edition)
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13 pages, 2153 KiB  
Article
Interaction of MG63 Human Osteosarcoma-Derived Cells on S53P4 Bioactive Glass: An In Vitro Study
by Valentin Schmidt, Beáta Polgár, Vanda Ágnes Nemes, Tímea Dergez, László Janovák, Péter Maróti, Szilárd Rendeki, Kinga Turzó and Balázs Patczai
J. Funct. Biomater. 2025, 16(8), 275; https://doi.org/10.3390/jfb16080275 - 29 Jul 2025
Viewed by 250
Abstract
Bioactive glass materials have been used for decades in orthopedic surgery, traumatology, and oral and maxillofacial surgery to repair bone defects. This study aimed to evaluate in vitro the survival and proliferation of MG63 human osteosarcoma-derived cells on S53P4 bioactive glass (BonAlive® [...] Read more.
Bioactive glass materials have been used for decades in orthopedic surgery, traumatology, and oral and maxillofacial surgery to repair bone defects. This study aimed to evaluate in vitro the survival and proliferation of MG63 human osteosarcoma-derived cells on S53P4 bioactive glass (BonAlive® granules). Microscopic visualization was performed to directly observe the interactions between the cells and the material. Osteoblast-like cells were examined on non-adherent test plates, on tissue culture (TC)-treated plates and on the surface of the bioglass to assess the differences. Cell survival and proliferation were monitored using a CCK-8 optical density assay. Comparing the mean OD of MG63 cells in MEM on TC-treated plates with cells on BG, we detected a significant difference (p < 0.05), over each time of observation. The sustained cell proliferation confirmed the non-cytotoxic property of the bioglass, as the cell number increased continuously at 48, 72, 96, and 168 h and even did not plateau after 168 h. Since the properties of bioglasses can vary significantly depending on their composition and environment, a thorough characterization of their biocompatibility is crucial to ensure their effective and appropriate application—for example, during hip and knee prosthesis insertion. Full article
(This article belongs to the Section Bone Biomaterials)
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18 pages, 2661 KiB  
Article
Resonator Width Optimization for Enhanced Performance and Bonding Reliability in Wideband RF MEMS Filter
by Gwanil Jeon, Minho Jeong, Shungmoon Lee, Youngjun Jo and Nam-Seog Kim
Micromachines 2025, 16(8), 878; https://doi.org/10.3390/mi16080878 - 29 Jul 2025
Viewed by 162
Abstract
This research investigates resonator width optimization for simultaneously enhancing electrical performance and mechanical reliability in wideband RF MEMS filters through systematic evaluation of three configurations: 0% (L1), 60% (L2), and 100% (L3) matching ratios between cap and bottom wafers using Au-Au thermocompression bonding. [...] Read more.
This research investigates resonator width optimization for simultaneously enhancing electrical performance and mechanical reliability in wideband RF MEMS filters through systematic evaluation of three configurations: 0% (L1), 60% (L2), and 100% (L3) matching ratios between cap and bottom wafers using Au-Au thermocompression bonding. The study demonstrates that resonator width alignment significantly influences both electromagnetic field coupling and bonding interface integrity. The L3 configuration with complete width matching achieved optimal RF performance, demonstrating 3.34 dB insertion loss across 4.5 GHz bandwidth (25% fractional bandwidth), outperforming L2 (3.56 dB) and L1 (3.10 dB), while providing enhanced electromagnetic wave coupling and minimized contact resistance. Mechanical reliability testing revealed superior bonding strength for the L3 configuration, withstanding up to 7.14 Kgf in shear pull tests, significantly exceeding L1 (4.22 Kgf) and L2 (2.24 Kgf). SEM analysis confirmed uniform bonding interfaces with minimal void formation (~180 nm), while Q-factor measurements showed L3 achieved optimal loaded Q-factor (QL = 3.31) suitable for wideband operation. Comprehensive environmental testing, including thermal cycling (−50 °C to +145 °C) and humidity exposure per MIL-STD-810E standards, validated long-term stability across all configurations. This investigation establishes that complete resonator width matching between cap and bottom wafers optimizes both electromagnetic performance and mechanical bonding reliability, providing a validated framework for developing high-performance, reliable RF MEMS devices for next-generation communication, radar, and sensing applications. Full article
(This article belongs to the Special Issue CMOS-MEMS Fabrication Technologies and Devices, 2nd Edition)
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29 pages, 14906 KiB  
Article
Hydrothermal Engineering of Ferroelectric PZT Thin Films Tailoring Electrical and Ferroelectric Properties via TiO2 and SrTiO3 Interlayers for Advanced MEMS
by Chun-Lin Li and Guo-Hua Feng
Micromachines 2025, 16(8), 879; https://doi.org/10.3390/mi16080879 - 29 Jul 2025
Viewed by 180
Abstract
This work presents an innovative hydrothermal approach for fabricating flexible piezoelectric PZT thin films on 20 μm titanium foil substrates using TiO2 and SrTiO3 (STO) interlayers. Three heterostructures (Ti/PZT, Ti/TiO2/PZT, and Ti/TiO2/STO/PZT) were synthesized to enable low-temperature [...] Read more.
This work presents an innovative hydrothermal approach for fabricating flexible piezoelectric PZT thin films on 20 μm titanium foil substrates using TiO2 and SrTiO3 (STO) interlayers. Three heterostructures (Ti/PZT, Ti/TiO2/PZT, and Ti/TiO2/STO/PZT) were synthesized to enable low-temperature growth and improve ferroelectric performance for advanced flexible MEMS. Characterizations including XRD, PFM, and P–E loop analysis evaluated crystallinity, piezoelectric coefficient d33, and polarization behavior. The results demonstrate that the multilayered Ti/TiO2/STO/PZT structure significantly enhances performance. XRD confirmed the STO buffer layer effectively reduces lattice mismatch with PZT to ~0.76%, promoting stable morphotropic phase boundary (MPB) composition formation. This optimized film exhibited superior piezoelectric and ferroelectric properties, with a high d33 of 113.42 pm/V, representing an ~8.65% increase over unbuffered Ti/PZT samples, and displayed more uniform domain behavior in PFM imaging. Impedance spectroscopy showed the lowest minimum impedance of 8.96 Ω at 10.19 MHz, indicating strong electromechanical coupling. Furthermore, I–V measurements demonstrated significantly suppressed leakage currents in the STO-buffered samples, with current levels ranging from 10−12 A to 10−9 A over ±3 V. This structure also showed excellent fatigue endurance through one million electrical cycles, confirming its mechanical and electrical stability. These findings highlight the potential of this hydrothermally engineered flexible heterostructure for high-performance actuators and sensors in advanced MEMS applications. Full article
(This article belongs to the Special Issue Manufacturing and Application of Advanced Thin-Film-Based Device)
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14 pages, 966 KiB  
Article
Investigation of the Thermal Conductance of MEMS Contact Switches
by Zhiqiang Chen and Zhongbin Xie
Micromachines 2025, 16(8), 872; https://doi.org/10.3390/mi16080872 - 28 Jul 2025
Viewed by 231
Abstract
Microelectromechanical system (MEMS) devices are specialized electronic devices that integrate the benefits of both mechanical and electrical structures. However, the contact behavior between the interfaces of these structures can significantly impact the performance of MEMS devices, particularly when the surface roughness approaches the [...] Read more.
Microelectromechanical system (MEMS) devices are specialized electronic devices that integrate the benefits of both mechanical and electrical structures. However, the contact behavior between the interfaces of these structures can significantly impact the performance of MEMS devices, particularly when the surface roughness approaches the characteristic size of the devices. In such cases, the contact between the interfaces is not a perfect face-to-face interaction but occurs through point-to-point contact. As a result, the contact area changes with varying contact pressures and surface roughness, influencing the thermal and electrical performance. By integrating the CMY model with finite element simulations, we systematically explored the thermal conductance regulation mechanism of MEMS contact switches. We analyzed the effects of the contact pressure, micro-hardness, surface roughness, and other parameters on thermal conductance, providing essential theoretical support for enhancing reliability and optimizing thermal management in MEMS contact switches. We examined the thermal contact, gap, and joint conductance of an MEMS switch under different contact pressures, micro-hardness values, and surface roughness levels using the CMY model. Our findings show that both the thermal contact and gap conductance increase with higher contact pressure. For a fixed contact pressure, the thermal contact conductance decreases with rising micro-hardness and root mean square (RMS) surface roughness but increases with a higher mean asperity slope. Notably, the thermal gap conductance is considerably lower than the thermal contact conductance. Full article
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28 pages, 2976 KiB  
Review
Catalytic Combustion Hydrogen Sensors for Vehicles: Hydrogen-Sensitive Performance Optimization Strategies and Key Technical Challenges
by Biyi Huang, Yi Wang, Chao Wang, Lijian Wang and Shubin Yan
Processes 2025, 13(8), 2384; https://doi.org/10.3390/pr13082384 - 27 Jul 2025
Viewed by 350
Abstract
As an efficient and low-carbon renewable energy source, hydrogen plays a strategic role in the global energy transition, particularly in the transportation sector. However, the flammable and explosive nature of hydrogen makes leakage risks in enclosed environments a core challenge for the safe [...] Read more.
As an efficient and low-carbon renewable energy source, hydrogen plays a strategic role in the global energy transition, particularly in the transportation sector. However, the flammable and explosive nature of hydrogen makes leakage risks in enclosed environments a core challenge for the safe promotion of hydrogen fuel cell vehicles. Catalytic combustion sensors are ideal choices due to their high sensitivity and long lifespan. Nevertheless, they face technical bottlenecks under vehicle operational conditions, such as high-power consumption caused by elevated working temperatures, slow response rates, weak anti-interference capabilities, and catalyst poisoning. This paper systematically reviews the research status of catalytic combustion hydrogen sensors for vehicle applications, summarizes technical difficulties and development strategies from the perspectives of hydrogen-sensitive material design and integration processes, and provides theoretical references and technical guidance for the development of catalytic combustion hydrogen sensors suitable for vehicle use. Full article
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24 pages, 74760 KiB  
Article
The Application of Mobile Devices for Measuring Accelerations in Rail Vehicles: Methodology and Field Research Outcomes in Tramway Transport
by Michał Urbaniak, Jakub Myrcik, Martyna Juda and Jan Mandrysz
Sensors 2025, 25(15), 4635; https://doi.org/10.3390/s25154635 - 26 Jul 2025
Viewed by 395
Abstract
Unbalanced accelerations occurring during tram travel have a significant impact on passenger comfort and safety, as well as on the rate of wear and tear on infrastructure and rolling stock. Ideally, these dynamic forces should be monitored continuously in real-time; however, traditional systems [...] Read more.
Unbalanced accelerations occurring during tram travel have a significant impact on passenger comfort and safety, as well as on the rate of wear and tear on infrastructure and rolling stock. Ideally, these dynamic forces should be monitored continuously in real-time; however, traditional systems require high-precision accelerometers and proprietary software—investments often beyond the reach of municipally funded tram operators. To this end, as part of the research project “Accelerometer Measurements in Rail Passenger Transport Vehicles”, pilot measurement campaigns were conducted in Poland on tram lines in Gdańsk, Toruń, Bydgoszcz, and Olsztyn. Off-the-shelf smartphones equipped with MEMS accelerometers and GPS modules, running the Physics Toolbox Sensor Suite Pro app, were used. Although the research employs widely known methods, this paper addresses part of the gap in affordable real-time monitoring by demonstrating that, in the future, equipment equipped solely with consumer-grade MEMS accelerometers can deliver sufficiently accurate data in applications where high precision is not critical. This paper presents an analysis of a subset of results from the Gdańsk tram network. Lateral (x) and vertical (z) accelerations were recorded at three fixed points inside two tram models (Pesa 128NG Jazz Duo and Düwag N8C), while longitudinal accelerations were deliberately omitted at this stage due to their strong dependence on driver behavior. Raw data were exported as CSV files, processed and analyzed in R version 4.2.2, and then mapped spatially using ArcGIS cartograms. Vehicle speed was calculated both via the haversine formula—accounting for Earth’s curvature—and via a Cartesian approximation. Over the ~7 km route, both methods yielded virtually identical results, validating the simpler approach for short distances. Acceleration histograms approximated Gaussian distributions, with most values between 0.05 and 0.15 m/s2, and extreme values approaching 1 m/s2. The results demonstrate that low-cost mobile devices, after future calibration against certified accelerometers, can provide sufficiently rich data for ride-comfort assessment and show promise for cost-effective condition monitoring of both track and rolling stock. Future work will focus on optimizing the app’s data collection pipeline, refining standard-based analysis algorithms, and validating smartphone measurements against benchmark sensors. Full article
(This article belongs to the Collection Sensors and Actuators for Intelligent Vehicles)
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12 pages, 5844 KiB  
Article
Through Silicon MEMS Inspection with a Near-Infrared Laser Scanning Setup
by Manuel J. L. F. Rodrigues, Inês S. Garcia, Joana D. Santos, Filipa C. Mota, Filipe S. Alves and Diogo E. Aguiam
Sensors 2025, 25(15), 4627; https://doi.org/10.3390/s25154627 - 25 Jul 2025
Viewed by 219
Abstract
The inspection of encapsulated MEMS devices typically relies on destructive methods which compromise the structural integrity of samples. In this work, we present the concept and preliminary experimental validation of a laser scanning setup to non-destructively inspect silicon-encapsulated microstructures by measuring small variations [...] Read more.
The inspection of encapsulated MEMS devices typically relies on destructive methods which compromise the structural integrity of samples. In this work, we present the concept and preliminary experimental validation of a laser scanning setup to non-destructively inspect silicon-encapsulated microstructures by measuring small variations of transmitted light intensity in the near-infrared spectrum. This method does not require any particular sample preparation or damage, and it is based on the higher degree of transparency of silicon in the near-infrared and the transmission contrast resulting from the Fresnel reflections observed at the interfaces between the different materials of the MEMS device layers. We characterise the small feature resolving performance of the laser scanning setup using standard targets, and experimentally demonstrate the inspection of a MEMS latching device enclosed within silicon covers, comparing the contrast measurements with theoretical predictions. Full article
(This article belongs to the Special Issue Optical Sensors for Industry Applications)
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23 pages, 3210 KiB  
Article
Design and Optimization of Intelligent High-Altitude Operation Safety System Based on Sensor Fusion
by Bohan Liu, Tao Gong, Tianhua Lei, Yuxin Zhu, Yijun Huang, Kai Tang and Qingsong Zhou
Sensors 2025, 25(15), 4626; https://doi.org/10.3390/s25154626 - 25 Jul 2025
Viewed by 214
Abstract
In the field of high-altitude operations, the frequent occurrence of fall accidents is usually closely related to safety measures such as the incorrect use of safety locks and the wrong installation of safety belts. At present, the manual inspection method cannot achieve real-time [...] Read more.
In the field of high-altitude operations, the frequent occurrence of fall accidents is usually closely related to safety measures such as the incorrect use of safety locks and the wrong installation of safety belts. At present, the manual inspection method cannot achieve real-time monitoring of the safety status of the operators and is prone to serious consequences due to human negligence. This paper designs a new type of high-altitude operation safety device based on the STM32F103 microcontroller. This device integrates ultra-wideband (UWB) ranging technology, thin-film piezoresistive stress sensors, Beidou positioning, intelligent voice alarm, and intelligent safety lock. By fusing five modes, it realizes the functions of safety status detection and precise positioning. It can provide precise geographical coordinate positioning and vertical ground distance for the workers, ensuring the safety and standardization of the operation process. This safety device adopts multi-modal fusion high-altitude operation safety monitoring technology. The UWB module adopts a bidirectional ranging algorithm to achieve centimeter-level ranging accuracy. It can accurately determine dangerous heights of 2 m or more even in non-line-of-sight environments. The vertical ranging upper limit can reach 50 m, which can meet the maintenance height requirements of most transmission and distribution line towers. It uses a silicon carbide MEMS piezoresistive sensor innovatively, which is sensitive to stress detection and resistant to high temperatures and radiation. It builds a Beidou and Bluetooth cooperative positioning system, which can achieve centimeter-level positioning accuracy and an identification accuracy rate of over 99%. It can maintain meter-level positioning accuracy of geographical coordinates in complex environments. The development of this safety device can build a comprehensive and intelligent safety protection barrier for workers engaged in high-altitude operations. Full article
(This article belongs to the Section Electronic Sensors)
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15 pages, 6406 KiB  
Communication
Design and Static Analysis of MEMS-Actuated Silicon Nitride Waveguide Optical Switch
by Yan Xu, Tsen-Hwang Andrew Lin and Peiguang Yan
Micromachines 2025, 16(8), 854; https://doi.org/10.3390/mi16080854 - 25 Jul 2025
Viewed by 322
Abstract
This article aims to utilize a microelectromechanical system (MEMS) to modulate coupling behavior of silicon nitride (Si3N4) waveguides to perform an optical switch based on a directional coupling (DC) mechanism. There are two states of the switch. First state, [...] Read more.
This article aims to utilize a microelectromechanical system (MEMS) to modulate coupling behavior of silicon nitride (Si3N4) waveguides to perform an optical switch based on a directional coupling (DC) mechanism. There are two states of the switch. First state, a Si3N4 wire is initially positioned up suspended in the air. In the second state, this wire will be moved down to be placed between two arms of the DC waveguides, changing the coupling behavior to achieve bar and cross states of the optical switch function. In the future, the MEMS will be used to move this wire down. In this work, we present simulations of the two static states to optimize the DC structure parameters. Based on the simulated results, the device size is 8.8 μm × 55 μm. The insertion loss is calculated to be approximately 0.24 dB and 0.33 dB, the extinction ratio is approximately 24.70 dB and 25.46 dB, and the crosstalk is approximately −24.60 dB and −25.56 dB, respectively. In the C band of optical communication, the insertion loss ranges from 0.18 dB to 0.47 dB. As such, this device will exhibit excellent optical switch performance and provide advantages in many integrated optics-related optical systems applications. Furthermore, it can be used in optical communications, data centers, LiDAR, and so on, enhancing important reference value for such applications. Full article
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