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A Floating Gate Memory with U-Shape Recessed Channel for Neuromorphic Computing and MCU Applications
- Lu-Rong Gan,
- Ya-Rong Wang,
- Lin Chen,
- Hao Zhu and
- Qing-Qing Sun
We have simulated a U-shape recessed channel floating gate memory by Sentaurus TCAD tools. Since the floating gate (FG) is vertically placed between source (S) and drain (D), and control gate (CG) and HfO2 high-k dielectric extend above source and dr...