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In Situ X-ray Measurements to Follow the Crystallization of BaTiO3 Thin Films during RF-Magnetron Sputter Deposition
- Peter Walter,
- Markus Ilchen,
- JanTorben Roeh,
- Wiebke Ohm,
- Christian Bonar Zeuthen and
- Uwe Klemradt
Here, we report on adding an important dimension to the fundamental understanding of the evolution of the thin film micro structure evolution. Thin films have gained broad attention in their applications for electro-optical devices, solar-cell techno...