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Keywords = 3-way pneumatic valve

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22 pages, 5427 KiB  
Article
The Development and Nonlinear Adaptive Robust Control of the Air Chamber Pressure Regulation System of a Slurry Pressure Balance Shield Tunneling Machine
by Shuai Wang, Yakun Zhang, Guofang Gong and Huayong Yang
Machines 2024, 12(7), 457; https://doi.org/10.3390/machines12070457 - 4 Jul 2024
Viewed by 1176
Abstract
The rapid and accurate control of air chamber pressure in slurry pressure balance (SPB) shield tunneling machines is crucial for establishing the balance between slurry pressure and soil and water pressure, ensuring the stability of the support face. A novel air chamber pressure [...] Read more.
The rapid and accurate control of air chamber pressure in slurry pressure balance (SPB) shield tunneling machines is crucial for establishing the balance between slurry pressure and soil and water pressure, ensuring the stability of the support face. A novel air chamber pressure control method based on nonlinear adaptive robust control (ARC) and using a pneumatic proportional three-way pressure-reducing valve is proposed in this paper. Firstly, an electric proportional control system for the air chamber pressure is developed. Secondly, a nonlinear state space model for the air chamber pressure regulation process is established. Utilizing experimental data from the SPB shield tunneling machine test bench, nonlinear adaptive identification is conducted through the nonlinear recursive least square algorithm. The results demonstrate the model’s effectiveness and accuracy. Then, a nonlinear ARC for air chamber pressure is designed based on the backstepping method, and its Lyapunov stability is proved. Finally, the feasibility and effectiveness of the controller designed in this paper is verified through simulation and experiments. The results demonstrate that the developed control system can compensate for the nonlinearity and disturbance in the air chamber pressure regulation process. It can achieve good transient and steady-state performance and has good robustness against uncertainty. Full article
(This article belongs to the Section Automation and Control Systems)
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20 pages, 12792 KiB  
Article
Data-Monitoring Solution for Desalination Processes: Cooling Tower and Mechanical Vapor Compression Hybrid System
by Paula Hernández-Baño, Angel Molina-García and Francisco Vera-García
Sensors 2024, 24(9), 2909; https://doi.org/10.3390/s24092909 - 2 May 2024
Cited by 2 | Viewed by 1942
Abstract
The advancement of novel water treatment technologies requires the implementation of both accurate data measurement and recording processes. These procedures are essential for acquiring results and conducting thorough analyses to enhance operational efficiency. In addition, accurate sensor data facilitate precise control over chemical [...] Read more.
The advancement of novel water treatment technologies requires the implementation of both accurate data measurement and recording processes. These procedures are essential for acquiring results and conducting thorough analyses to enhance operational efficiency. In addition, accurate sensor data facilitate precise control over chemical treatment dosages, ensuring optimal water quality and corrosion inhibition while minimizing chemical usage and associated costs. Under this framework, this paper describes the sensoring and monitoring solution for a hybrid system based on a cooling tower (CT) connected to mechanical vapor compression (MVC) equipment for desalination and brine concentration purposes. Sensors connected to the data commercial logger solution, Almemo 2890-9, are also discussed in detail such as temperature, relative humidity, pressure, flow rate, etc. The monitoring system allows remote control of the MVC based on a server, GateManager, and TightVNC. In this way, the proposed solution provides remote access to the hybrid system, being able to visualize gathered data in real time. A case study located in Cartagena (Spain) is used to assess the proposed solution. Collected data from temperature transmitters, pneumatic valves, level sensors, and power demand are included and discussed in the paper. These variables allow a subsequent forecasting process to estimate brine concentration values. Different sample times are included in this paper to minimize the collected data from the hybrid system within suitable operation conditions. This solution is suitable to be applied to other desalination processes and locations. Full article
(This article belongs to the Special Issue Sensors in 2024)
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13 pages, 3153 KiB  
Article
3D-Printed Microfluidic One-Way Valves and Pumps
by Hunter Hinnen, Matthew Viglione, Troy R. Munro, Adam T. Woolley and Gregory P. Nordin
Micromachines 2023, 14(7), 1286; https://doi.org/10.3390/mi14071286 - 23 Jun 2023
Cited by 15 | Viewed by 4612
Abstract
New microfluidic lab-on-a-chip capabilities are enabled by broadening the toolkit of devices that can be created using microfabrication processes. For example, complex geometries made possible by 3D printing can be used to approach microfluidic design and application in new or enhanced ways. In [...] Read more.
New microfluidic lab-on-a-chip capabilities are enabled by broadening the toolkit of devices that can be created using microfabrication processes. For example, complex geometries made possible by 3D printing can be used to approach microfluidic design and application in new or enhanced ways. In this paper, we demonstrate three distinct designs for microfluidic one-way (check) valves that can be fabricated using digital light processing stereolithography (DLP-SLA) with a poly(ethylene glycol) diacrylate (PEGDA) resin, each with an internal volume of 5–10 nL. By mapping flow rate to pressure in both the forward and reverse directions, we compare the different designs and their operating characteristics. We also demonstrate pumps for each one-way valve design comprised of two one-way valves with a membrane valve displacement chamber between them. An advantage of such pumps is that they require a single pneumatic input instead of three as for conventional 3D-printed pumps. We also characterize the achievable flow rate as a function of the pneumatic control signal period. We show that such pumps can be used to create a single-stage diffusion mixer with significantly reduced pneumatic drive complexity. Full article
(This article belongs to the Special Issue 3D Printing of MEMS Technology, Volume II)
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18 pages, 1962 KiB  
Article
Research on an Off-Chip Microvalve for Pneumatic Control in Microfluidic Chips
by Xuling Liu, Wensi Zuo, Huafeng Song, Tingdong Shang, Haiwei Dong, Liangwen Wang, Jinggan Shao and Songjing Li
Energies 2022, 15(21), 8094; https://doi.org/10.3390/en15218094 - 31 Oct 2022
Cited by 6 | Viewed by 3264
Abstract
A compact, rapid, and portable off-chip pneumatic control valve is significant for the miniaturization and integration of external pneumatic systems for microfluidic chips. In this work, an off-chip microvalve with a high-speed electromagnetic switch actuator and a polydimethylsiloxane (PDMS) material valve body has [...] Read more.
A compact, rapid, and portable off-chip pneumatic control valve is significant for the miniaturization and integration of external pneumatic systems for microfluidic chips. In this work, an off-chip microvalve with a high-speed electromagnetic switch actuator and a polydimethylsiloxane (PDMS) material valve body has been designed to be easily encapsulated, simulated using MATLAB/Simulink software, and tested in a micromixer. Multi-physical coupling mathematical models are developed based on the elastic deformation force of the valve membrane, the driving force of the valve core, and the fluid force in the microchannel. Two single microvalves are used to form a three-way microvalve, which can control the air pressure in a pneumatic microchannel on the microfluidic chip. The relationship between the flow–duty cycle, the flow–pressure difference of the single electromagnetic microvalve, and the load pressure of the three-way microvalve is simulated and analyzed. Sample mixing performance controlled by the proposed off-chip three-way microvalve was tested to evaluate the pneumatic control capability, and the results show that the undertaking can fully satisfy the needs of a pneumatic microfluidic chip for most applications. Full article
(This article belongs to the Special Issue New Insights of Intelligent and Integrated Fluid Power Systems)
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37 pages, 17587 KiB  
Article
Validation of a Simulink Model for Simulating the Two Typical Controlled Ventilation Modes of Intensive Care Units Mechanical Ventilators
by Paolo Tamburrano, Francesco Sciatti, Elia Distaso, Luigi Di Lorenzo and Riccardo Amirante
Appl. Sci. 2022, 12(4), 2057; https://doi.org/10.3390/app12042057 - 16 Feb 2022
Cited by 10 | Viewed by 7841
Abstract
Mechanical ventilators are vital components of critical care services for patients with severe acute respiratory failure. In particular, pressure- and volume-controlled mechanical ventilation systems are the typical modes used in intensive care units (ICUs) to ventilate patients who cannot breathe adequately on their [...] Read more.
Mechanical ventilators are vital components of critical care services for patients with severe acute respiratory failure. In particular, pressure- and volume-controlled mechanical ventilation systems are the typical modes used in intensive care units (ICUs) to ventilate patients who cannot breathe adequately on their own. In this paper, a Simulink model is proposed to simulate these two typical modes employed in intensive care lung ventilators. Firstly, these two modes of ventilation are described in detail in the present paper. Secondly, the suggested Simulink model is analysed: it consists of using well-established subroutines already present in Simulink through the Simscape Fluids (gas) library, to simulate all the pneumatic components employed in some commercial ICU ventilators, such as pressure reducing valves, pressure relief valves, check valves, tanks, ON\OFF and proportional directional valves, etc. Finally, the simulation results of both modes in terms of pressure, tidal volume, and inspired/expired flow are compared with the real-life quantitative trends taken from previously recorded real-life experiments in order to validate the Simulink model. The accuracy of the model is high, as the numerical predictions are in good agreement with the real-life data, the percentage error being less than 10% in most comparisons. In this way, the model can easily be used by manufacturers and start-ups in order to produce new mechanical ventilators in the shortest time possible. Moreover, it can also be used by doctors and trainees to evaluate how the mechanical ventilator responds to different patients. Full article
(This article belongs to the Section Mechanical Engineering)
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13 pages, 10776 KiB  
Article
Position Control of a Pneumatic Drive Using a Fuzzy Controller with an Analytic Activation Function
by Željko Šitum and Danko Ćorić
Sensors 2022, 22(3), 1004; https://doi.org/10.3390/s22031004 - 27 Jan 2022
Cited by 10 | Viewed by 2951
Abstract
The fuzzy logic controller, which uses an analytic activation function for the defuzzification procedure, was applied to the position control of a servo pneumatic drive controlled by a proportional valve. The Gaussian shape of input fuzzy sets, with the possibility of their modification, [...] Read more.
The fuzzy logic controller, which uses an analytic activation function for the defuzzification procedure, was applied to the position control of a servo pneumatic drive controlled by a proportional valve. The Gaussian shape of input fuzzy sets, with the possibility of their modification, was used to fuzzify the input signal. The control signal was determined by introducing an analytic function instead of defining the fuzzy rule base. In this way, a conventional 2-D fuzzy rule table base is modified into 1-D fuzzy defuzzification based on an analytic function to calculate the controller output. In this control algorithm, the problem of conventional fuzzy logic control, in terms of the exponential growth in rules as the number of input variables increases, is eliminated. The synthesis controller procedure is adjusted to the flow rate characteristic of the proportional valve. The developed control algorithms are verified by computer simulation and by testing on a real pneumatic rodless cylindrical drive. Full article
(This article belongs to the Special Issue Advanced Sensor Modules for ISO/IEC Compliant Emerging Robots)
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17 pages, 64596 KiB  
Article
Development of a Novel Pneumatic Oscillator for the Tissue Paper Industry
by Michele Gabrio Antonelli, Pierluigi Beomonte Zobel, Massimiliano Centofanti and Stefano Colaiuda
Machines 2021, 9(11), 261; https://doi.org/10.3390/machines9110261 - 30 Oct 2021
Cited by 3 | Viewed by 2960
Abstract
The final quality of tissue paper depends on the parameters of the continuous transformation process and maintenance of rolls of a tissue paper machine. For a better quality, outer surfaces of the rolls must always be clean, and their roughness should be maintained [...] Read more.
The final quality of tissue paper depends on the parameters of the continuous transformation process and maintenance of rolls of a tissue paper machine. For a better quality, outer surfaces of the rolls must always be clean, and their roughness should be maintained in the same way. A Doctor Blade provides for such requirements. Our work is focused on the development of a pneumatic oscillator that moves a Doctor Blade in order to scrape the outer surfaces of the rolls. It is based on a low-friction double-effect cylinder with a through-rod. The integration of two limit switch valves, one for each head of the cylinder, and a smart pneumatic circuit to obtain a very low speed of the piston at constant load, represents the novelty of the proposed device. The piston of the cylinder allows for alternatively switching the limit switches that command the 5/2 air-operated pilot valve of the cylinder. The oscillator’s design, pneumatic circuit, and working principle are detailed. Experimental tests on the conceived limit switch and on the first prototype of the pneumatic oscillator validated the effectiveness of the proposed solution, the technical feasibility of the device, and the absence of stick-slip during the oscillatory motion at low speed. Full article
(This article belongs to the Special Issue Pneumatic Muscle Actuators)
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18 pages, 9484 KiB  
Article
Research on Drilling Rate Optimization of a UCS Identification System While Drilling for Coal Mine Roadway Roofs
by Guangdong Yu, Qian Hu, Xuewen Feng, Guoying Meng and Yifan Nie
Machines 2021, 9(10), 242; https://doi.org/10.3390/machines9100242 - 18 Oct 2021
Cited by 3 | Viewed by 2768
Abstract
In this paper, to identify the roof unconfined compressive strength (UCS) in the process of coal mine roadway support in real-time and optimize the real-time drilling speed while drilling, this paper proposes and establishes a drilling test method for assessing the uniaxial compressive [...] Read more.
In this paper, to identify the roof unconfined compressive strength (UCS) in the process of coal mine roadway support in real-time and optimize the real-time drilling speed while drilling, this paper proposes and establishes a drilling test method for assessing the uniaxial compressive strength (UCS) of a roof. This method can be used to optimize the speed of drilling. Moreover, a mathematical model of the power output is developed for a roof-strata identification system with a drilling test system. The results were as follows: (1) the system was able to identify the uniaxial compressive strength of roof rock; (2) the pressure of the drill leg of the pneumatic bolt did not match the output power of the pneumatic motor, the pneumatic motor could not reach the maximum power point, and the insufficient thrust of the pneumatic leg led to failure of the maximum output power of the pneumatic motor; (3) to increase the output power of the air motor and thus improve the drilling speed, we applied a booster valve for the system. The experimental results show that the power of the air motor has a linear relationship with drilling speed. In this way, the speed of the drill can be increased by increasing the motor power. Full article
(This article belongs to the Special Issue Dynamics and Diagnostics of Heavy-Duty Industrial Machines)
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10 pages, 3461 KiB  
Article
Negative Pressure Provides Simple and Stable Droplet Generation in a Flow-Focusing Microfluidic Device
by Nikita A. Filatov, Anatoly A. Evstrapov and Anton S. Bukatin
Micromachines 2021, 12(6), 662; https://doi.org/10.3390/mi12060662 - 5 Jun 2021
Cited by 18 | Viewed by 4732
Abstract
Droplet microfluidics is an extremely useful and powerful tool for industrial, environmental, and biotechnological applications, due to advantages such as the small volume of reagents required, ultrahigh-throughput, precise control, and independent manipulations of each droplet. For the generation of monodisperse water-in-oil droplets, usually [...] Read more.
Droplet microfluidics is an extremely useful and powerful tool for industrial, environmental, and biotechnological applications, due to advantages such as the small volume of reagents required, ultrahigh-throughput, precise control, and independent manipulations of each droplet. For the generation of monodisperse water-in-oil droplets, usually T-junction and flow-focusing microfluidic devices connected to syringe pumps or pressure controllers are used. Here, we investigated droplet-generation regimes in a flow-focusing microfluidic device induced by the negative pressure in the outlet reservoir, generated by a low-cost mini diaphragm vacuum pump. During the study, we compared two ways of adjusting the negative pressure using a compact electro-pneumatic regulator and a manual airflow control valve. The results showed that both types of regulators are suitable for the stable generation of monodisperse droplets for at least 4 h, with variations in diameter less than 1 µm. Droplet diameters at high levels of negative pressure were mainly determined by the hydrodynamic resistances of the inlet microchannels, although the absolute pressure value defined the generation frequency; however, the electro-pneumatic regulator is preferable and convenient for the accurate control of the pressure by an external electric signal, providing more stable pressure, and a wide range of droplet diameters and generation frequencies. The method of droplet generation suggested here is a simple, stable, reliable, and portable way of high-throughput production of relatively large volumes of monodisperse emulsions for biomedical applications. Full article
(This article belongs to the Special Issue Microfluids in Microchannels)
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14 pages, 23920 KiB  
Article
Experimental Study of a New Pneumatic Actuating System Using Exhaust Recycling
by Qihui Yu, Jianwei Zhai, Qiancheng Wang, Xuxiao Zhang and Xin Tan
Sustainability 2021, 13(4), 1645; https://doi.org/10.3390/su13041645 - 4 Feb 2021
Cited by 8 | Viewed by 6802
Abstract
Pneumatic actuating systems are an important power system in industrial applications. Due to exhaust loss, however, pneumatic actuating systems have suffered from a low utilization of compressed air. To recycle the exhaust energy, a novel pneumatic circuit was proposed to realize energy savings [...] Read more.
Pneumatic actuating systems are an important power system in industrial applications. Due to exhaust loss, however, pneumatic actuating systems have suffered from a low utilization of compressed air. To recycle the exhaust energy, a novel pneumatic circuit was proposed to realize energy savings through recycling exhaust energy. The circuit consisted of three two-position three-way switch valves, which were used to control the exhaust flows into a gas tank or the ambient environment. This paper introduced the energy recovery configuration and working principles and built a mathematical model of its working process. Then, the mathematical model was verified by experiments. Finally, through experiments in which the air supply pressure, the critical pressure and the volume of the gas tank were regulated, the energy recovery characteristics of the pneumatic actuating system were obtained. Using the new circuit, the experimental results showed that the energy recovery efficiency exceeded 23%. When the air supply pressure was set to 5 bar, 6 bar, and 7 bar, the time required for pneumatic actuation to complete the three working cycles were 5.2 s, 5.3 s, and 5.9 s, respectively. When the critical pressure was set to 0 bar, 0.5 bar, 1 bar, and 1.5 bar, the times for pneumatic actuation to complete the three working cycles were 4.9 s, 5.1 s, 5.2 s, and 5.3 s, respectively. When the volume of the gas tank was set to 2 L, 3 L, 4 L, and 5 L, the number of working cycles was 3, 4, 5, and 6, respectively. This paper provides a new method of cylinder exhaust recycling and lays a good foundation for pneumatic energy savings. Full article
(This article belongs to the Section Energy Sustainability)
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17 pages, 11132 KiB  
Article
A Prosthetic Socket with Active Volume Compensation for Amputated Lower Limb
by Ji-Hyeon Seo, Hyuk-Jin Lee, Dong-Wook Seo, Dong-Kyu Lee, Oh-Won Kwon, Moon-Kyu Kwak and Kang-Ho Lee
Sensors 2021, 21(2), 407; https://doi.org/10.3390/s21020407 - 8 Jan 2021
Cited by 14 | Viewed by 10484
Abstract
Typically, the actual volume of the residual limb changes over time. This causes the prosthesis to not fit, and then pain and skin disease. In this study, a prosthetic socket was developed to compensate for the volume change of the residual limb. Using [...] Read more.
Typically, the actual volume of the residual limb changes over time. This causes the prosthesis to not fit, and then pain and skin disease. In this study, a prosthetic socket was developed to compensate for the volume change of the residual limb. Using an inflatable air bladder, the proposed socket monitors the pressure in the socket and keeps the pressure distribution uniform and constant while walking. The socket has three air bladders on anterior and posterior tibia areas, a latching type 3-way pneumatic valve and a portable control device. In the paper, the mechanical properties of the air bladder were investigated, and the electromagnetic analysis was performed to design the pneumatic valve. The controller is based on a hysteresis control algorithm with a closed loop, which keeps the pressure in the socket close to the initial set point over a long period of time. In experiments, the proposed prosthesis was tested through the gait simulator that can imitate a human’s gait cycle. The active volume compensation of the socket was successfully verified during repetitive gait cycle using the weight loads of 50, 70, and 90 kg and the residual limb model with a variety of volumes. It was confirmed that the pressure of the residual limb recovered to the initial state through the active control. The pressure inside the socket had a steady state error of less than 0.75% even if the volume of the residual limb was changed from −7% to +7%. Full article
(This article belongs to the Special Issue Intelligent Systems and Sensors for Robotics)
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22 pages, 4229 KiB  
Article
Heterogenic Autotuner for Electro-Pneumatic Single-Action Actuators
by Michał Bartyś
Energies 2020, 13(18), 4604; https://doi.org/10.3390/en13184604 - 4 Sep 2020
Cited by 1 | Viewed by 2657
Abstract
The main concept is to design the novel autotuner in a way that it will introduce benefits that arise from the effect of the fusion of the quantitative and qualitative knowledge gained from identification experiments, long-time expertise, and theoretical findings. The novelty of [...] Read more.
The main concept is to design the novel autotuner in a way that it will introduce benefits that arise from the effect of the fusion of the quantitative and qualitative knowledge gained from identification experiments, long-time expertise, and theoretical findings. The novelty of this approach is in the manner in which the expert heuristic knowledge is used for the development of an easy-to-use and time-efficient tuning process. In the proposed approach, the positioner simply learns, mimics, and follows up the tuning process that is performed by an experienced human operator. The major strength of this approach is that all parameters of positioner PID controller can be estimated by only identifying one single parameter that is the effective time constant of the pneumatic actuator. The elaborated autotuning algorithm is experimentally examined with different commercially available pneumatic actuators and control valves. The obtained results demonstrate that the proposed autotuning approach exhibits good performance, usability, and robustness. This should be considered as particularly relevant in the processes of installing, commissioning, and servicing single-action final control elements. Full article
(This article belongs to the Special Issue Heuristic Optimization Techniques Applied to Power Systems)
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14 pages, 11283 KiB  
Article
Development of a Four-Way Pinch-Type Servo Valve for Pneumatic Actuator
by Kotaro Tadano, Yasumasa Ishida and Hisami Takeishi
Appl. Sci. 2020, 10(3), 1066; https://doi.org/10.3390/app10031066 - 5 Feb 2020
Cited by 5 | Viewed by 4676
Abstract
Pneumatic servo valves are key components of pneumatic servo systems. Multi-degree-of-freedom systems, such as robot systems, utilize many servo valves to control their actuators. However, conventional servo valves always consume air due to leakage even when the pneumatic actuator is not moving. Hence, [...] Read more.
Pneumatic servo valves are key components of pneumatic servo systems. Multi-degree-of-freedom systems, such as robot systems, utilize many servo valves to control their actuators. However, conventional servo valves always consume air due to leakage even when the pneumatic actuator is not moving. Hence, the consumption flow rate of the entire system corresponds to a heavy load on the air compressor. Reduction in the leakage of servo valves contributes to lower requirements for the air compressor and saves energy. In this study, we develop a four-way pinch- type pneumatic servo valve that controls flow rates by pinching air tubes to realize a leak-free servo valve. A cam to control the aperture of the flow channel is newly designed, and a control system is established. Measurement results indicate high linearity in static flow characteristics and high dynamic characteristics corresponding to 30 Hz. We experimentally confirm a good position tracking property in the position control of a pneumatic cylinder by using the developed valve. Finally, evaluation results of air consumption in a robotic control application indicate that the developed valve contributes to a significant reduction in air consumption compared to that of a conventional spool-type valve. Full article
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21 pages, 6547 KiB  
Article
High-Precision Solvent Vapor Annealing for Block Copolymer Thin Films
by Gunnar Nelson, Chloe S. Drapes, Meagan A. Grant, Ryan Gnabasik, Jeffrey Wong and Andrew Baruth
Micromachines 2018, 9(6), 271; https://doi.org/10.3390/mi9060271 - 29 May 2018
Cited by 17 | Viewed by 6728
Abstract
Despite its efficacy in producing well-ordered, periodic nanostructures, the intricate role multiple parameters play in solvent vapor annealing has not been fully established. In solvent vapor annealing a thin polymer film is exposed to a vapor of solvent(s) thus forming a swollen and [...] Read more.
Despite its efficacy in producing well-ordered, periodic nanostructures, the intricate role multiple parameters play in solvent vapor annealing has not been fully established. In solvent vapor annealing a thin polymer film is exposed to a vapor of solvent(s) thus forming a swollen and mobile layer to direct the self-assembly process at the nanoscale. Recent developments in both theory and experiments have directly identified critical parameters that govern this process, but controlling them in any systematic way has proven non-trivial. These identified parameters include vapor pressure, solvent concentration in the film, and the solvent evaporation rate. To explore their role, a purpose-built solvent vapor annealing chamber was designed and constructed. The all-metal chamber is designed to be inert to solvent exposure. Computer-controlled, pneumatically actuated valves allow for precision timing in the introduction and withdrawal of solvent vapor from the film. The mass flow controller-regulated inlet, chamber pressure gauges, in situ spectral reflectance-based thickness monitoring, and low flow micrometer relief valve give real-time monitoring and control during the annealing and evaporation phases with unprecedented precision and accuracy. The reliable and repeatable alignment of polylactide cylinders formed from polystyrene-b-polylactide, where cylinders stand perpendicular to the substrate and span the thickness of the film, provides one illustrative example. Full article
(This article belongs to the Special Issue Self-Assembly of Polymers)
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9 pages, 2077 KiB  
Article
Rounding of Negative Dry Film Resist by Diffusive Backside Exposure Creating Rounded Channels for Pneumatic Membrane Valves
by Philipp Frank, Sebastian Haefner, Georgi Paschew and Andreas Richter
Micromachines 2015, 6(11), 1588-1596; https://doi.org/10.3390/mi6111442 - 28 Oct 2015
Cited by 6 | Viewed by 7200
Abstract
Processing of dry film resist is an easy, low-cost, and fast way to fabricate microfluidic structures. Currently, common processes are limited to creating solely rectangular channels. However, it has shown that rounded channels are necessary to ensure proper closing of pneumatic membrane valves [...] Read more.
Processing of dry film resist is an easy, low-cost, and fast way to fabricate microfluidic structures. Currently, common processes are limited to creating solely rectangular channels. However, it has shown that rounded channels are necessary to ensure proper closing of pneumatic membrane valves for microfluidic devices. Here, we introduce a modification to the standard lithography process, in order to create rounded channels for microfluidic structures. Therefore, a diffuser element was inserted into in the optical path between the light source and glass substrate, which is then exposed through the backside, hence altering the exposure to the dry resist spatially. Characterization of the process was carried out with different exposure times, features sizes, and substrate thickness. The process modification is almost effortless and can be integrated in any lithography process. Full article
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