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Smart Sensors Based on Microelectronics and MEMS Technologies
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Smart Sensors Based on Microelectronics and MEMS Technologies

A special issue of Sensors (ISSN 1424-8220). This special issue belongs to the section "Electronic Sensors".

Deadline for manuscript submissions: closed (30 November 2023) | Viewed by 7711

Special Issue Editor

Prof. Dr. Càndid Reig

E-Mail Website
Guest Editor
Department of Electronic Engineering, University of Valencia, 46100 Burjassot, Spain
Interests: GMR based-sensors; vision sensors; CMOS interfaces; printed antennas; magnetoresistance sensors; analog microelectronics
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

The number of currently available technologies for developing sensors is huge. Focusing on solid-state sensors, microelectronics, and microelectromechanical systems (MEMS) technologies are the most widely utilized because of their inherent capability of integration with associated integrated circuits. Such an advantadge is crucial not only for IoT applications, but also for smart sensors, which are quite demanding nowadays.

In this Special Issue, the current state of the art of smart sensors based on microelectronics and/or MEMS technologies will be analyzed. Physical, chemical, and biochemical smart sensors are of interest, but the issue is not restricted to them. Non-standard approaches such as the use of organic materials or flexible substrates are also considered. Their design, modelling, simulation, manufacturing, and applications are invited topics in this issue.  

Both review articles and original research articles related to the use of microelectronics and MEMS technologies for the development of smart sensors are solicited. Such works should highlight the particular capabilities and characteristics (resolution, repeatability, reliability, selectivity, power consumption, miniaturization…) of those sensors that can only be obtained using other approaches.

Prof. Dr. Càndid Reig
Guest Editor

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Sensors is an international peer-reviewed open access semimonthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Published Papers (1 paper)

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Review

29 pages, 5513 KiB  
Review
Piezoelectric Micromachined Ultrasonic Transducers (PMUTs): Performance Metrics, Advancements, and Applications
by Yumna Birjis, Siddharth Swaminathan, Haleh Nazemi, Gian Carlo Antony Raj, Pavithra Munirathinam, Aya Abu-Libdeh and Arezoo Emadi
Sensors 2022, 22(23), 9151; https://doi.org/10.3390/s22239151 - 25 Nov 2022
Cited by 12 | Viewed by 7108
Abstract
With the development of technology, systems gravitate towards increasing in their complexity, miniaturization, and level of automation. Amongst these systems, ultrasonic devices have adhered to this trend of advancement. Ultrasonic systems require transducers to generate and sense ultrasonic signals. These transducers heavily impact [...] Read more.
With the development of technology, systems gravitate towards increasing in their complexity, miniaturization, and level of automation. Amongst these systems, ultrasonic devices have adhered to this trend of advancement. Ultrasonic systems require transducers to generate and sense ultrasonic signals. These transducers heavily impact the system’s performance. Advancements in microelectromechanical systems have led to the development of micromachined ultrasonic transducers (MUTs), which are utilized in miniaturized ultrasound systems. Piezoelectric micromachined ultrasonic transducers (PMUTs) exhibit higher capacitance and lower electrical impedance, which enhances the transducer’s sensitivity by minimizing the effect of parasitic capacitance and facilitating their integration with low-voltage electronics. PMUTs utilize high-yield batch microfabrication with the use of thin piezoelectric films. The deposition of thin piezoelectric material compatible with complementary metal-oxide semiconductors (CMOS) has opened novel avenues for the development of miniaturized compact systems with the same substrate for application and control electronics. PMUTs offer a wide variety of applications, including medical imaging, fingerprint sensing, range-finding, energy harvesting, and intrabody and underwater communication links. This paper reviews the current research and recent advancements on PMUTs and their applications. This paper investigates in detail the important transduction metrics and critical design parameters for high-performance PMUTs. Piezoelectric materials and microfabrication processes utilized to manufacture PMUTs are discussed. Promising PMUT applications and outlook on future advancements are presented. Full article
(This article belongs to the Special Issue Smart Sensors Based on Microelectronics and MEMS Technologies)
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