Dear Colleagues,

This special issue gathers insightful review and new research papers on the principles and application of applied optical interferometry for precision measurements of all kinds. The scope encompasses both fundamental methods as well as applications ranging from interferometry for optics, industrial metrology, process control, surface analysis, new instrument design, advanced techniques, environmental sensing, “big science” and R&D. Of particular interest is interferometry for precision measurement, including but not limited to:

• High-speed stage positioning
• Large scale dimensional measurements
• Interferometric sensing of temperature, pressure, composition
• Surface structure, surface films and materials analysis
• Interferometric ellipsometry
• Semiconductor metrology, including super-resolution, overlay measurements, and interferometric scatterometry
• Physical optics modeling of surface interactions for interferometric applications
• Testing of optical components and systems
• Interferometry for aspheric and free-form optics
• Interference microscopy
• Space-based interferometry
• Calibration, certification and standardization of instruments that use interferometry
• “Instantaneous” and “dynamic” areal surface measurements
• Quantitate phase imaging using interference
• Imaging of life-science objects, including cells and tissue
• Digital holography and speckle techniques
• Phase estimation

Prof. Thierry Bosch
Dr. Peter de Groot
Guest Editors

Manuscript Submission Information

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