Optical Metrology with Deep Learning

Dear Colleagues,

Optical metrology utilizes the fundamental properties of light as standards or information carriers to realize high accuracy and non-contact measurements. Traditional optical metrology generally retrieves measurement results from temporal varying intensity signals or images based on physical models. However, due to the lack of straight forward models, error and/or noise accumulation and the ill-posed inverse problems, challenges appear, and new approaches have been introduced to optical metrology. Deep learning (DL) adopting deep neural network (DNN) is an active branch of artificial intelligence and has been applied to various engineering including optical metrology. It has succeeded in pre-processing including image enhancement and denoising, data analyses including phase retrieval, phase unwrapping, error compensation, and postprocessing including three-dimensional reconstruction et al.

This Special Issue on “Optical Metrology with Deep Learning” will welcome basic, methodological and applied cutting-edge research contributions, as regular and review papers, dealing with:

• Introduction and validation of new DL method or DNN to traditional optical metrology;
• Development or comparison research of current DL methods in optical metrology;
• Physics-informed DL methods for optical metrology;
• Metrology system design with DL guidance;
• Measurement data generation or acquisition for DNN training;
• Improvement of the generalization ability of DNNs in optical metrology;
• Interpretation of the DL method and traceability analysis of the results;
• Uncertainty estimation for measurements with DL methods.

Dr. Yao Hu
Guest Editor

Manuscript Submission Information

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• optical metrology
• physics-informed deep learning
• metrology system design
• deep neural network training
• generalization ability of deep learning
• interpretation of deep learning
• uncertainty estimation