HfO2-Based Ferroelectric Thin Films and Devices

A special issue of Nanomaterials (ISSN 2079-4991). This special issue belongs to the section "Nanoelectronics, Nanosensors and Devices".

Deadline for manuscript submissions: 25 February 2027 | Viewed by 4243

Editors


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Guest Editor
School of Advanced Materials and Nanotechnology, Xidian University, Xi'an 710126, China
Interests: hafnium-oxide-based ferroelectrics; polar topological domain in ferroelectrics; electric control of magnetization swtiching in multiferroics
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Guest Editor
Department of Physics & Hefei National Research Center for Physical Sciences at the Microscale, University of Science and Technology of China, Hefei 230026, China
Interests: ferroelectric; ferromagnetic; multiferroic; complex oxides; memory; neuromorphic computing

Special Issue Information

Dear Colleagues,

Ferroelectric nanoscale materials have attracted substantial interest not only because of fundamental physical phenomena that are distinct from the bulk, including exotic topological domain configurations such as flux-closure domains, polar vortex, and polar skyrmions, but also due to their potential applications in reconfigurable ferroelectric memory devices. Notably, apart from the conventional perovskite-based ferroelectrics (e.g., BaTiO3, (Pb,Zr)TiO3), fluorite-structured HfO2-based ferroelectrics are becoming a hot research topic due to their excellent compatibility with complementary metal–oxide–semiconductor technology (CMOS), robust ferroelectricity at the nanoscale, and scalability for highly dense information storage, which are promising for next-generation ferroelectric devices, such as ferroelectric random-access memories (FeRAMs), ferroelectric field-effect transistors (FeFETs), neuromorphic devices, and so on.

The present Special Issue of Nanomaterials aims to present the current state-of-the-art in the use of HfO2-based ferroelectric thin films and devices, a field that has blossomed since 2011 with seminal discoveries of the first report of their ferroelectricity and recent advances in theoretical and experimental research, including the mechanism of stabilization of the metastable ferroelectric phase, wake-up effect, and ferroelectric fatigue, domains and domain dynamics, high-speed, high-reliability, high-density, and low-power ferroelectric memory devices, and so on. This Special Issue invites contributions from leading groups in the field, with the aim of providing a balanced view of the current state-of-the-art in this discipline.

The scope of this Special Issue is focused on ferroelectric nanoscale materials. Areas to be covered from the point of view of theoretical or experimental research may include, but are not limited to, the following:

(1) Fabrication and characterization of HfO2-based ferroelectric nanoscale materials;

(2) Novel topological domains in perovskite-based ferroelectric nanoscale materials;

(3) Stabilization of metastable HfO2-based ferroelectric phase;

(4) Mechanism of wake-up effect and fatigue (or endurance) in HfO2-based thin films;

(5) Domain structures and domain dynamics in HfO2-based thin films;

(6) Prototypical ferroelectric memory and novel logic devices.

Dr. Ren-Ci Peng
Prof. Dr. Shengchun Shen
Guest Editors

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Keywords

  • ferroelectric thin films
  • novel topological domains
  • HfO2-based ferroelectric
  • domain and domain dynamics
  • wake-up effect and fatigue
  • endurance
  • metastable ferroelectric phase
  • ferroelectric memory and logic devices

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Published Papers (4 papers)

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Research

16 pages, 8922 KB  
Article
Thermally Stable HfO2-Based Ferroelectric Transistors for CMOS-Compatible Energy-Efficient Neuromorphic Integrated Circuits
by Fedor V. Tikhonenko, Mikhail Tarkov, Vladimir P. Popov, Andrey V. Miakonkikh and Konstantin V. Rudenko
Nanomaterials 2026, 16(15), 927; https://doi.org/10.3390/nano16150927 - 28 Jul 2026
Viewed by 413
Abstract
HfO2 based thin-film ferroelectrics are metastable at room temperature and transited to the dielectric monoclinic phase upon heating. The thermal stability of such ferroelectrics increases when thin-film oxides are buried (BOX) in silicon–ferroelectric–silicon (SFS) structures formed by SmartCut®, where thin [...] Read more.
HfO2 based thin-film ferroelectrics are metastable at room temperature and transited to the dielectric monoclinic phase upon heating. The thermal stability of such ferroelectrics increases when thin-film oxides are buried (BOX) in silicon–ferroelectric–silicon (SFS) structures formed by SmartCut®, where thin ferroelectric layers are stabilized by oxygen vacancies and tensile stresses in the BOX, which is similar to silicon-on-insulator (SOI) structures. The main characteristics of the ferroelectrics in MFS and SFS structures are residual polarization Pr and coercive field Ec, which are determined by the fraction of the metastable ferroelectric phases that are also stabilized due to the inserted Al impurity in HfO2:Al2O3 10:1 (HAO) and (HfO2:ZrO2):Al2O3 (1:1)5:1 (HZAO) nanolaminates. SFS structures and SFS CMOS ICs were tested after all thermal treatments at temperatures 900–1000 °C with tBOX = 10–20 nm (or equivalent oxide thickness EOT = 1–2 nm) in an industrial process as gate insulators for CMOS and dual-gate DG SFS transistors. Their characteristics simulated in TCAD Sentaurus and analytic models in LTspice are investigated for an analog content addressable memory (ACAM). Full article
(This article belongs to the Special Issue HfO2-Based Ferroelectric Thin Films and Devices)
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15 pages, 7129 KB  
Article
Design and Simulation of a Mass Sensor Using Nanoscale Hf0.5Zr0.5O2 Piezoelectric Membranes with Loading Platform
by Zhicong Li, Haoqi Lyu, Jiahui Xie, Wuhao Yang, Zhuohui Liu, Zhenxiang Qi, Kunfeng Wang, Chen Ge and Xudong Zou
Nanomaterials 2026, 16(14), 862; https://doi.org/10.3390/nano16140862 - 13 Jul 2026
Viewed by 885
Abstract
Resonant mass sensors based on micro/nanoelectromechanical systems (MEMS/NEMS) offer a promising approach for label-free gravimetric detection. However, practical applications often require not only high sensitivity but also improved loading repeatability and reduced dependence on mass loading position. In this work, a suspended resonant [...] Read more.
Resonant mass sensors based on micro/nanoelectromechanical systems (MEMS/NEMS) offer a promising approach for label-free gravimetric detection. However, practical applications often require not only high sensitivity but also improved loading repeatability and reduced dependence on mass loading position. In this work, a suspended resonant mass sensor based on a 10 nm-thick Hf0.5Zr0.5O2 (HZO) piezoelectric film is proposed. A central silicon loading platform is introduced to provide a mechanically robust and spatially uniform sensing region. A Kirchhoff plate model incorporating residual stress is established to analyze the effects of residual stress and platform geometry on the resonant characteristics. The device is fabricated by combining SOI micromachining with wet transfer of the ultrathin HZO film. Laser Doppler vibrometry measurements show a first-order resonant frequency of 1.303 MHz and a quality factor of 342, corresponding to an extracted residual stress of approximately 1.319 GPa. Finite element simulations calibrated by experimental parameters indicate a uniform first-mode displacement distribution and a linear frequency response to added mass from 0 to 1 ng. The obtained mass sensitivities are 150.7 Hz/pg and 166.8 Hz/pg from finite element and analytical models, respectively. The proposed structure provides a feasible route toward repeatable pg-level resonant mass sensing based on ultrathin piezoelectric films. Full article
(This article belongs to the Special Issue HfO2-Based Ferroelectric Thin Films and Devices)
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10 pages, 12369 KB  
Article
Stress Engineering in the Optimization of Next-Generation Hafnium-Based Ferroelectric Memory
by Zhenhai Li, Ruihong Yuan, Xingcan Guo, Yiqun Hu, Yongkai Liu, Jiajie Yu, Kangli Xu, Qingxuan Li, Tianyu Wang, Qingqing Sun, David Wei Zhang and Lin Chen
Nanomaterials 2026, 16(9), 516; https://doi.org/10.3390/nano16090516 - 25 Apr 2026
Viewed by 1296
Abstract
Hafnium oxide thin films have been extensively investigated for high-speed and low-power memory applications. Herein, we investigated the influence of oxygen vacancies and external stress on the ferroelectric characteristics of Al-doped HfO2 (HfAlO). Compared with HfAlO with 14% oxygen vacancies, films with [...] Read more.
Hafnium oxide thin films have been extensively investigated for high-speed and low-power memory applications. Herein, we investigated the influence of oxygen vacancies and external stress on the ferroelectric characteristics of Al-doped HfO2 (HfAlO). Compared with HfAlO with 14% oxygen vacancies, films with 21% oxygen vacancies could lower the polarization switching barrier and increase the fraction of the ferroelectric phase. Furthermore, significant external stress promotes ferroelectric phase formation, thereby enhancing ferroelectric characteristics. The remanent polarization achieved with W electrodes (2Pr = 38 µC/cm2) is about 18 times that of Au electrodes, owing to the lower thermal expansion coefficient of W electrodes. Density functional theory calculations and finite element analysis provide theoretical insights corroborating the experimental results, helping to pave the way for developing hafnium-based materials for next-generation in-memory computing applications. Full article
(This article belongs to the Special Issue HfO2-Based Ferroelectric Thin Films and Devices)
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13 pages, 2463 KB  
Article
Phase Transitions and Switching Dynamics of Topological Domains in Hafnium Oxide-Based Cylindrical Ferroelectrics from Three-Dimensional Phase Field Simulation
by Pengying Chang, Hanxiao Zhang, Mengyao Xie, Huan Zhang and Yiyang Xie
Nanomaterials 2025, 15(24), 1901; https://doi.org/10.3390/nano15241901 - 18 Dec 2025
Viewed by 899
Abstract
The phase transitions and switching dynamics of topological polar textures in hafnium oxide (HfO2)-based cylindrical-shell ferroelectrics are studied using a three-dimensional (3D) phase field model based on the self-consistent solution of the time-dependent Ginzburg–Landau model and Poisson equation. The comprehensive interplays [...] Read more.
The phase transitions and switching dynamics of topological polar textures in hafnium oxide (HfO2)-based cylindrical-shell ferroelectrics are studied using a three-dimensional (3D) phase field model based on the self-consistent solution of the time-dependent Ginzburg–Landau model and Poisson equation. The comprehensive interplays of bulk free energy, gradient energy, depolarization energy, and elastic energy are taken into account. When a cylindrical ferroelectric device is biased under the in-plane radial electric field, there is a size-controlled phase transition between the ferroelectric (FE), antiferroelectric (AFE), and paraelectric (PE) phases, depending on ferroelectric film thickness and cylindrical shell radius. For in-plane polarization textures at the equilibriums, the FE phase has a Néel-like texture with a center-type four-quad domain, the AFE phase has a monodomain texture, and the PE phase has a Bloch-like texture with a vortex four-quad domain. These polarization domain textures are resultant from energy competition and topologically protected by the geometrical confinement. The polarization dynamics from polar states towards equilibriums are analyzed considering the separated contributions of x- and y-components of polarizations that are driven by x-y in-plane electric fields. The emergent topological domains and phase transitions provide guidelines for geometrical engineering of a novel nano-structured ferroelectric device that is different from the planar one, offering new possibilities for multi-functional high-density ferroelectric memory. Full article
(This article belongs to the Special Issue HfO2-Based Ferroelectric Thin Films and Devices)
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