Recent Advances in MEMS/NEMS Actuators and Sensors: From Theory to Application

A special issue of Actuators (ISSN 2076-0825). This special issue belongs to the section "Miniaturized and Micro Actuators".

Deadline for manuscript submissions: 15 March 2026 | Viewed by 76

Special Issue Editors

Device Technology Research Institute National Institute of Advanced Industrial Science and Technology (AIST) Namiki 1-2-1, Tsukuba, Ibaraki, Japan
Interests: MEMS sensors; micro and nano fabrication; sensor system integration
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Guest Editor
1. State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi’an Jiaotong University, Xi’an 710049, China
2. School of Instrument Science and Techonology, Xi’an Jiaotong University, Xi’an 710049, China
Interests: MEMS and micro-nano technologies; IoT; nanoimprint lithography

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Guest Editor
1. State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi’an Jiaotong University, Xi’an 710049, China
2. School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China
Interests: MEMS sensors; micro-manufacturing technologies; the first principles calculation

Special Issue Information

Dear Colleagues,

The rapid advancement of AI technology presents both promising opportunities and notable challenges for MEMS/NEMS, particularly in the integration of AI-enabled actuators and sensors and the expansion of their practical applications. This Special Issue is dedicated to showcasing cutting-edge research in MEMS/NEMS, encompassing both theoretical insights and technological innovations.

We welcome both original research articles and review papers that address state-of-the-art topics—though not limited to those listed below—provided they align with the journal’s aims and scope.

This Special Issue will also feature selected contributions from JCK MEMS/NEMS 2025, an annual East Asian forum that emphasizes international collaboration to address environmental and social challenges across East Asian economies. These contributions will highlight recent progress in micro/nano sensors, actuators, and related technologies.

  • System integration and applications;
  • Micro and nano fabrication including 3D printing;
  • Micro and nano electronics including flexible electronics;
  • Micro and nano sensors & actuators;
  • Micro and nano systems;
  • Networked microsystems and IoT technologies;
  • Materials and device characterization;
  • Integration and packaging technologies;
  • Modeling and simulation of manufacturing process;
  • Others​.

Dr. Jian Lu
Prof. Dr. Ryutaro Maeda
Dr. Chen Wu
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Actuators is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2400 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • micro and nano sensors & actuators
  • micro and nano systems
  • micro and nano fabrication
  • micro and nano electronics

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Published Papers

This special issue is now open for submission.
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