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Journal: ChemistryVolume: 7Number: 147
Article: Temperature-Dependent Growth Mechanisms and Optical Properties of MgF2 Thin Films Synthesized by Plasma-Enhanced Atomic Layer Deposition
- Authors:
- Shui-Yang Lien1,*,
- Xiao Lin1 and
- Zhi-Xuan Zhang2,3
- et al.
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