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Journal: AcousticsVolume: 4Number: 19
Article: Dual-Axis MEMS Resonant Scanner Using 128∘Y Lithium Niobate Thin-Film
- Authors:
- Yaoqing Lu1,2,3,†,
- Kangfu Liu1,2,3,*,† and
- Tao Wu1,2,3,4,*
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