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Journal: Ceramics, 2025
Volume: 8
Number: 42
Article:
Synthesis Conditions and Properties of SiAlCN Coatings Obtained by Reactive Evaporation of Al in a Hollow Cathode Arc Discharge in Hexamethyldisilazane Vapors
Authors:
by
Andrey Menshakov, Yulia Bryuhanova, Ivan Zhidkov, Daniil Emlin and Polina Skorynina
Link:
https://www.mdpi.com/2571-6131/8/2/42
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