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Journal: Proceedings, 2024
Volume: 97
Number: 139
139
Article: Biaxial Piezoelectrically Driven MEMS Mirror with Large Design Flexibility
Authors: by Lena Wysocki, Patrick Schütt, Jörg Albers, Gunnar Wille, Erdem Yarar, Paul Raschdorf, Lianzhi Wen and Shanshan Gu-Stoppel
Link: https://www.mdpi.com/2504-3900/97/1/139

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