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Journal: Proceedings, 2018
Volume: 2
Number: 875
875
Article: A Double-Ended Tuning Fork Based Resonant Pressure Micro-Sensor Relying on Electrostatic Excitation and Piezoresistive Detection
Authors: by Xiaoqing Shi, Yulan Lu, Bo Xie, Chao Xiang, Junbo Wang, Deyong Chen and Jian Chen
Link: https://www.mdpi.com/2504-3900/2/13/875

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