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Journal: ProceedingsVolume: 2Number: 875
Article: A Double-Ended Tuning Fork Based Resonant Pressure Micro-Sensor Relying on Electrostatic Excitation and Piezoresistive Detection
  • Authors:
  • Xiaoqing Shi1,2,
  • Yulan Lu1,2 and
  • Bo Xie1
  • et al.
Link: https://www.mdpi.com/2504-3900/2/13/875

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