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Nonlinear-Based MEMS Sensors and Active Switches for Gas and Acceleration Applications

Physical Sciences and Engineering Division, King Abdullah University of Science and Technology, Thuwal 23955-6900, Saudi Arabia
Presented at the 3rd International Electronic Conference on Sensors and Applications, 15–30 November 2016; Available online:
Proceedings 2017, 1(2), 43;
Published: 21 November 2016
PDF [114 KB, uploaded 28 June 2017]


In this talk, we demonstrate the realization of smart sensors and actuators through the exploitation of principles of nonlinear dynamics at the micro scale. Specifically, we demonstrate combining sensing and actuation into a single device through what is called smart switches triggered by the detection of a desirable physical quantity. The concept aims to reduce the complexity of systems that rely on controllers and complex algorithms to realize on-demand trigger actions. In the first part of the talk, we discuss the category of switches triggered by the detection of gas. Toward this, electrostatically microbeams resonators are fabricated, then coated with highly absorbent polymers (MOFs), and afterward are exposed to gases. Such devices can be useful for instant alarming of toxic gases. In the second part, we demonstrate switches triggered by shock and acceleration. The concept is demonstrated on a millimeter-scale capacitive sensor. The sensor is tested using acceleration generated from shakers. Such devices can be used for the deployment of airbags in automobiles.
Keywords: sensors; triggers; switches; resonators sensors; triggers; switches; resonators
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Younis, M.I. Nonlinear-Based MEMS Sensors and Active Switches for Gas and Acceleration Applications. Proceedings 2017, 1, 43.

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