Kornev, R.; Mochalov, G.; Maleev, N.; Romanov, S.; Kornev, K.; Kalinina, A.
Method for Removing Impurities by Treating Silicon Tetrachloride with Hydrogen Plasma. Inorganics 2025, 13, 80.
https://doi.org/10.3390/inorganics13030080
AMA Style
Kornev R, Mochalov G, Maleev N, Romanov S, Kornev K, Kalinina A.
Method for Removing Impurities by Treating Silicon Tetrachloride with Hydrogen Plasma. Inorganics. 2025; 13(3):80.
https://doi.org/10.3390/inorganics13030080
Chicago/Turabian Style
Kornev, Roman, Georgy Mochalov, Nikita Maleev, Sergei Romanov, Konstantin Kornev, and Alexandra Kalinina.
2025. "Method for Removing Impurities by Treating Silicon Tetrachloride with Hydrogen Plasma" Inorganics 13, no. 3: 80.
https://doi.org/10.3390/inorganics13030080
APA Style
Kornev, R., Mochalov, G., Maleev, N., Romanov, S., Kornev, K., & Kalinina, A.
(2025). Method for Removing Impurities by Treating Silicon Tetrachloride with Hydrogen Plasma. Inorganics, 13(3), 80.
https://doi.org/10.3390/inorganics13030080