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Journal: Photonics, 2021
Volume: 8
Number: 271

Article: An Improved Large-Field Microscopic Speckle Interferometry System for Dynamic Displacement Measurement of MEMS
Authors: by Chenjia Gao, Zhan Gao, Yuhao Niu, Xu Wang, Jieming Zhao and Lin Deng
Link: https://www.mdpi.com/2304-6732/8/7/271

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