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Journal: PhotonicsVolume: 11Number: 661
Article: Illumination Field Uniformity Correction by Novel Finger Arrays for Lithography Illumination System
  • Authors:
  • Shaoqin Luo1,
  • Junbo Liu2,3,* and
  • Chuan Jin2
  • et al.
Link: https://www.mdpi.com/2304-6732/11/7/661

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