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Journal: ProcessesVolume: 13Number: 2902
Article: Radiation-Induced Degradation Mechanisms in Silicon MEMS Under Coupled Thermal and Mechanical Fields
  • Authors:
  • Xian Guo1,
  • Deshou Yang1 and
  • Jibiao Qiao2
  • et al.
Link: https://www.mdpi.com/2227-9717/13/9/2902

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