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Journal: Processes, 2025
Volume: 13
Number: 2902

Article: Radiation-Induced Degradation Mechanisms in Silicon MEMS Under Coupled Thermal and Mechanical Fields
Authors: by Xian Guo, Deshou Yang, Jibiao Qiao, Hui Zhang, Tong Ye and Ning Wei
Link: https://www.mdpi.com/2227-9717/13/9/2902

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