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Journal: ProcessesVolume: 13Number: 4
Article: Research on the Production of Hydrogen Fluoride from Silicon Tetrafluoride Using 2.45 GHz Microwave Plasma
  • Authors:
  • Songlin Liu1,
  • Lianjun Shi1 and
  • Guilan Liu1,*
  • et al.
Link: https://www.mdpi.com/2227-9717/13/1/4

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