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Journal: Processes, 2025
Volume: 13
Number: 4
Article:
Research on the Production of Hydrogen Fluoride from Silicon Tetrafluoride Using 2.45 GHz Microwave Plasma
Authors:
by
Songlin Liu, Lianjun Shi, Guilan Liu, Wei Xiao and Huacheng Zhu
Link:
https://www.mdpi.com/2227-9717/13/1/4
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