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Journal: ProcessesVolume: 11Number: 2554
Article: Structural Design and Preparation Process Research of Stacked MEMS Gas Sensors for Volatile Organic Compound Gases
  • Authors:
  • Guizhou Wu1,
  • Junfeng Wu1,* and
  • Juan Dong2
  • et al.
Link: https://www.mdpi.com/2227-9717/11/9/2554

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