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Journal: Processes, 2023
Volume: 11
Number: 2554

Article: Structural Design and Preparation Process Research of Stacked MEMS Gas Sensors for Volatile Organic Compound Gases
Authors: by Guizhou Wu, Junfeng Wu, Juan Dong and Xinyu Zhang
Link: https://www.mdpi.com/2227-9717/11/9/2554

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