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Journal: Processes, 2023
Volume: 11
Number: 2554
Article:
Structural Design and Preparation Process Research of Stacked MEMS Gas Sensors for Volatile Organic Compound Gases
Authors:
by
Guizhou Wu, Junfeng Wu, Juan Dong and Xinyu Zhang
Link:
https://www.mdpi.com/2227-9717/11/9/2554
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