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Journal: ElectronicsVolume: 9Number: 2086
Article: Q-Factor Performance of 28 nm-Node High-K Gate Dielectric under DPN Treatment at Different Annealing Temperatures
  • Authors:
  • Chii-Wen Chen1,
  • Shea-Jue Wang2 and
  • Wen-Ching Hsieh3
  • et al.
Link: https://www.mdpi.com/2079-9292/9/12/2086

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