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Journal: Electronics, 2020
Volume: 9
Number: 2086
Article:
Q-Factor Performance of 28 nm-Node High-K Gate Dielectric under DPN Treatment at Different Annealing Temperatures
Authors:
by
Chii-Wen Chen, Shea-Jue Wang, Wen-Ching Hsieh, Jian-Ming Chen, Te Jong, Wen-How Lan and Mu-Chun Wang
Link:
https://www.mdpi.com/2079-9292/9/12/2086
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