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Journal: Electronics, 2025
Volume: 14
Number: 2022

Article: Impedance Monitoring of Capacitively Coupled Plasma Based on the Vacuum Variable Capacitor Positions of Impedance Matching Unit
Authors: by Hwang Gyu Kim, Jiseok Lee and Sang Jeen Hong
Link: https://www.mdpi.com/2079-9292/14/10/2022

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