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Journal: Electronics, 2025
Volume: 14
Number: 2022
Article:
Impedance Monitoring of Capacitively Coupled Plasma Based on the Vacuum Variable Capacitor Positions of Impedance Matching Unit
Authors:
by
Hwang Gyu Kim, Jiseok Lee and Sang Jeen Hong
Link:
https://www.mdpi.com/2079-9292/14/10/2022
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