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Journal: ElectronicsVolume: 14Number: 2022
Article: Impedance Monitoring of Capacitively Coupled Plasma Based on the Vacuum Variable Capacitor Positions of Impedance Matching Unit
  • Authors:
  • Hwang Gyu Kim,
  • Jiseok Lee and
  • Sang Jeen Hong*
Link: https://www.mdpi.com/2079-9292/14/10/2022

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